IP Library Granted Patent US 11,239,802
Granted Patent B2
US 11,239,802 · App. 16/590,465 · Granted Feb 1, 2022

Radio frequency transistor amplifiers having engineered instrinsic capacitances for improved performance

Inventors: Qianli Mu (San Jose, CA); Zulhazmi Mokhti (Morgan Hill, CA); Jia Guo (Durham, NC); Scott Sheppard (Chapel Hill, NC)
Assignee: Wolfspeed, Inc.
H03F1/30H01L29/2003H01L29/7787H03F3/193
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Quick Facts
Patent No.
US 11,239,802
App. No.
16/590,465
Granted
Feb 1, 2022
Kind
B2
Abstract

Gallium nitride based RF transistor amplifiers include a semiconductor structure having a gallium nitride based channel layer and a gallium nitride based barrier layer thereon, and are configured to operate at a specific direct current drain-to-source bias voltage. These amplifiers are configured to have a normalized drain-to-gate capacitance at the direct current drain-to-source bias voltage, and to have a second normalized drain-to-gate capacitance at two-thirds the direct current drain-to-source bias voltage, where the second normalized drain-to-gate capacitance is less than twice the first normalized drain-to-gate capacitance.

Claims (33)

1. A radio frequency (“RF”) transistor amplifier, comprising:

a semiconductor structure that includes a gallium nitride based channel layer and a gallium nitride based barrier layer that has a higher bandgap than the gallium nitride based channel layer on the gallium nitride based channel layer;

a source contact on the gallium nitride based barrier layer;

a drain contact on the gallium nitride based barrier layer; and

a gate contact on the gallium nitride based barrier layer between the source contact and the drain contact,

wherein the RF transistor amplifier is configured to operate at a first direct current drain-to-source bias voltage,

wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance that maintains at least 85% symmetry for a range of drain-to-source voltages about the first direct current drain-to-source bias voltage that is equal to 50% of the first direct current drain-to-source bias voltage, and

wherein a normalized drain-to-gate capacitance response of the RF transistor amplifier varies by less than a factor of four for all values of the drain-to-source voltage that are between one half the first direct current drain-to-source bias voltage and twice the first direct current drain-to-source bias voltage.

2. The RF transistor amplifier of claim 1 , wherein a normalized drain-to-gate capacitance response of the RF transistor amplifier varies by less than a factor of three for all values of the drain-to-source voltage that are between one half the first direct current drain-to-source bias voltage and twice the first direct current drain-to-source bias voltage.

3. The RF transistor amplifier of claim 1 , wherein a normalized drain-to-gate capacitance response of the RF transistor amplifier varies by less than a factor of two for all values of the drain-to-source voltage that are between two-thirds the first direct current drain-to-source bias voltage and twice the first direct current drain-to-source bias voltage.

4. The RF transistor amplifier of claim 3 , wherein the RF transistor amplifier is configured to have a first normalized drain-to-gate capacitance at the first direct current drain-to-source bias voltage, and to have a second normalized drain-to-gate capacitance at two-thirds the first direct current drain-to-source bias voltage, and

wherein the second normalized drain-to-gate capacitance is less than twice the first normalized drain-to-gate capacitance.

5. The RF transistor amplifier of claim 1 , wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance response that maintains at least 90% symmetry for a range of drain-to-source voltage values about the first direct current drain-to-source bias voltage that is equal to 50% of the first direct current drain-to-source bias voltage.

6. The RF transistor amplifier of claim 1 , wherein the RF transistor amplifier is configured so that a normalized drain-to-gate capacitance response varies by less than 100% for drain-to-source voltages in a range from the first direct current drain-to-source bias voltage to 20 volts below the first direct current drain-to-source bias voltage.

7. The RF transistor amplifier of claim 1 , wherein values of the normalized drain-to-gate capacitance are less than 4×10 −15 farads per watt for all drain-to-source voltage values greater than 32 volts.

8. The RF transistor amplifier of claim 1 , wherein values of the normalized drain-to-gate capacitance are less than 5×10 −15 farads per watt for all drain-to-source voltage values greater than 24 volts.

9. The RF transistor amplifier of claim 1 , wherein values of the normalized drain-to-gate capacitance are less than 6×10 −15 farads per watt for all drain-to-source voltage values greater than 24 volts.

10. The RF transistor amplifier of claim 1 , wherein the first direct current drain-to-source bias voltage is between 48 volts and 55 volts, and wherein values of the normalized drain-to-gate capacitance are less than 5×10 −15 farads per watt for all drain-to-source voltage values greater than 30 volts.

11. The RF transistor amplifier of claim 1 , wherein the first direct current drain-to-source bias voltage is 48 volts, and wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance that maintains at least 85% symmetry over a range of drain-to-source voltages from 36 volts to 60 volts.

12. The RF transistor amplifier of claim 1 , wherein the first direct current drain-to-source bias voltage is 48 volts, and wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance that maintains at least 70% symmetry over a range of drain-to-source voltages from 24 volts to 72 volts.

13. The RF transistor amplifier of claim 1 , wherein the RF transistor amplifier is configured to have a first normalized drain-to-gate capacitance at the first direct current drain-to-source bias voltage, and to have a second normalized drain-to-gate capacitance at two-thirds the first direct current drain-to-source bias voltage, and

wherein the second normalized drain-to-gate capacitance is less than twice the first normalized drain-to-gate capacitance.

14. A radio frequency (“RF”) transistor amplifier, comprising:

a semiconductor structure that includes a gallium nitride based channel layer and a gallium nitride based barrier layer that has a higher bandgap than the gallium nitride based channel layer on the gallium nitride based channel layer;

a source contact on the gallium nitride based barrier layer;

a drain contact on the gallium nitride based barrier layer; and

a gate contact on the gallium nitride based barrier layer between the source contact and the drain contact,

wherein the RF transistor amplifier is configured to operate at a first direct current drain-to-source bias voltage,

wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance that maintains at least 85% symmetry for a range of drain-to-source voltages about the first direct current drain-to-source bias voltage that is equal to 50% of the first direct current drain-to-source bias voltage, and

wherein the RF transistor amplifier is configured so that a normalized drain-to-gate capacitance response varies by less than 100% for drain-to-source voltages in a range from the first direct current drain-to-source bias voltage to 20 volts below the first direct current drain-to-source bias voltage.

15. The RF transistor amplifier of claim 14 , wherein the first direct current drain-to-source bias voltage is between 48 volts and 55 volts, and wherein values of the normalized drain-to-gate capacitance are less than 6×10 −15 farads per watt for all drain-to-source voltage values greater than 24 volts.

16. The RF transistor amplifier of claim 14 , wherein the first direct current drain-to-source bias voltage is between 48 volts and 55 volts, and wherein the normalized drain-to-gate capacitance response varies by less than a factor of three for all values of the drain-to-source voltage that are between one half the first direct current drain-to-source bias voltage and twice the first direct current drain-to-source bias voltage.

17. The RF transistor amplifier of claim 16 , wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance response that maintains at least 90% symmetry for a range of drain-to-source voltage values about the first direct current drain-to-source bias voltage that is equal to 50% of the first direct current drain-to-source bias voltage.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2023
From: WOLFSPEED, INC.
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 066236/0086 →
CHANGE OF NAME Recorded Dec 2, 2021
From: CREE, INC.
To: WOLFSPEED, INC.
Reel/Frame 058295/0730 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 6, 2019
From: MU, QIANLI; MOKHTI, ZULHAZMI; GUO, JIA; SHEPPARD, SCOTT
To: CREE, INC.
Reel/Frame 050931/0367 →