Stacked circuits of III-V devices over silicon with high quality integrated passives with hybrid bonding

1. A stacked circuit, comprising:

a first tier comprising one or more first technology devices of a first semiconductor type and one or more first interconnects, at least one first interconnect being electrically coupled to at least one first technology device; and

a second tier on the first tier, the second tier comprising one or more second technology devices of a second semiconductor type different from the first semiconductor type and one or more second interconnects, and at least one second interconnect being electrically coupled to at least one second technology device,

wherein an upper surface of the first tier and a lower surface of the second tier are hybrid bonded to each other in which

one or more portions of a first insulator exposed at the upper surface of the first tier are bonded to corresponding one or more portions of a second insulator exposed at the lower surface of the second tier, and

the one or more first interconnects exposed at the upper surface of the first tier are bonded to the one or more second interconnects exposed at the lower surface of the second tier such that the one or more first interconnects are electrically coupled to the one or more second interconnects.

2. The stacked circuit of claim 1 ,

wherein the one or more first interconnects and the one or more second interconnects are copper, and

wherein the first insulator and the second insulator are oxides.

3. The stacked circuit of claim 1 , wherein the first technology devices are Si-CMOS devices and the second technology devices are III-V devices.

4. The stacked circuit of claim 1 , wherein the first tier comprises:

a first device layer on a first substrate, the first device layer comprising the one or more first technology devices; and

a first interface layer on the first device layer, the first interface layer comprising the one or more first interconnects and the first insulator,

wherein the first interface layer is configured such that the one or more first interconnects are electrically coupled to the one or more first technology devices, and

wherein an upper surface of the first interface layer is the upper surface of the first tier such that at least one first technology device is electrically coupled to at least one second technology device through, in order, at least one first interconnect and at least one second interconnect.

5. The stacked circuit of claim 4 , wherein the first tier further comprises:

a first routing layer in between the first device layer and the first interface layer, the first routing layer comprising one or more first signal routers configured such that the one or more first interconnects are electrically coupled to the one or more first technology devices through the one or more first signal routers.

6. The stacked circuit of claim 1 , wherein the second tier comprises:

a second interface layer on the first tier, the second interface layer comprising the one or more second interconnects and the second insulator; and

a second device layer on the second interface layer, the second device layer comprising the one or more second technology devices,

wherein the second interface layer is configured such that the one or more second interconnects are electrically coupled to the one or more second technology devices, and

wherein a lower surface of the second interface layer is the lower surface of the second tier such that at least one first technology device is electrically coupled to at least one second technology device through, in order, at least one first interconnect and at least one second interconnect.

7. The stacked circuit of claim 6 , wherein the second device layer also comprises one or more second signal routers configured such that the one or more second interconnects are electrically coupled to the one or more second technology devices through the one or more second signal routers.

8. The stacked circuit of claim 6 , wherein the second tier further comprises:

an epitaxial layer on the second device layer; and

one or more through-vias configured to extend from an upper surface to a lower surface of the epitaxial layer such that

at least one through-via is electrically coupled to at least one first technology device, and

at least one through-via is electrically coupled to at least one second technology device.

9. The stacked circuit of claim 1 , further comprising:

a third tier on the second tier, the third tier comprising one or more high quality (HQ) integrated passive devices (IPD) and/or one or more third signal routers,

wherein the one or more HQ-IPDs and/or the one or more third signal routers are configured such that

at least one HQ-IPD is electrically coupled to at least one first technology device,

at least one HQ-IPD is electrically coupled to at least one second technology device,

at least one third signal router is electrically coupled to at least one first technology device,

at least one third signal router is electrically coupled to at least one second technology device, or

any combination thereof.

10. The stacked circuit of claim 9 , wherein the one or more HQ-IPDs comprise one or more inductors, one or more capacitors, or any combination thereof.

11. The stacked circuit of claim 9 , further comprising:

a thermal spreader between the second tier and the third tier; and

one or more through-vias configured to extend from an upper surface to a lower surface of the thermal spreader such that

at least one HQ-IPD is electrically coupled to at least one first technology device through at least one through-via,

at least one HQ-IPD is electrically coupled to at least one second technology device through at least one through-via,

at least one third signal router is electrically coupled to at least one first technology device through at least one through-via,

at least one third signal router is electrically coupled to at least one second technology device through at least one through-via, or

any combination thereof.

12. The stacked circuit of claim 11 , wherein the thermal spreader comprises an aluminum nitride (AlN) layer and/or a diamond layer.

13. The stacked circuit of claim 9 , further comprising:

one or more bumps on the third tier configured to enable signal exchanges between the stacked circuit and devices external to the stacked circuit.

14. The stacked circuit of claim 13 , wherein the third tier comprises a plurality of metallizations such that the plurality of metalizations and at least one bump are vertically aligned over at least one second technology device so as to provide a vertical thermal path from the at least one second technology device.

15. A method of fabricating a stacked circuit, the method comprising:

forming a first tier comprising one or more first technology devices of a first semiconductor type and one or more first interconnects such that at least one first interconnect is electrically coupled to at least one first technology device;

forming a second tier, the second tier comprising one or more second technology devices of a second semiconductor type different from the first semiconductor type and one or more second interconnects, and at least one second interconnect being electrically coupled to at least one second technology device; and

hybrid bonding the first tier with the second tier in which

one or more portions of a first insulator exposed at an upper surface of the first tier are bonded to corresponding one or more portions of a second insulator exposed at a lower surface of the second tier, and

the one or more first interconnects exposed at the upper surface of the first tier are bonded to the one or more second interconnects exposed at the lower surface of the second tier such that the one or more first interconnects are electrically coupled to the one or more second interconnects.

16. The method of claim 15 , wherein the first technology devices are Si-CMOS devices and the second technology devices are III-V devices.

17. The method of claim 1 , wherein forming the first tier comprises:

forming a first device layer on a first substrate, the first device layer comprising the one or more first technology devices; and

forming a first interface layer on the first device layer, the first interface layer comprising the one or more first interconnects and the first insulator such that the one or more first interconnects are electrically coupled to the one or more first technology devices, and

wherein an upper surface of the first interface layer is the upper surface of the first tier such that at least one first technology device is electrically coupled to at least one second technology device through, in order, at least one first interconnect and at least one second interconnect.

18. The method of claim 15 , wherein forming the second tier comprises:

forming an epitaxial layer on a carrier;

forming a second device layer on the epitaxial layer, the second device layer comprising the one or more second technology devices; and

forming a second interface layer on the second device layer such that the one or more second interconnects are electrically coupled to the one or more second technology devices.

19. The method of claim 18 ,

wherein the carrier comprises a Si carrier wafer and the epitaxial layer comprises an undoped gallium arsenide (GaAs) layer, and

wherein forming the second tier further comprises forming a buffer layer in between the carrier and the epitaxial layer.

20. The method of claim 19 , wherein the buffer layer is formed from germanium (Ge).

21. The method of claim 18 , wherein the carrier comprises a gallium arsenide (GaAs) wafer and the epitaxial layer is a GaAs layer that directly contacts the carrier.

22. The method of claim 21 , wherein the carrier comprises a plurality of sliced GaAs substrates.

23. The method of claim 18 , wherein forming the second device layer also comprises forming one or more second signal routers such that at least one second interconnect is electrically coupled to at least one second technology device through at least one second signal router.

24. The method of claim 23 , wherein at least one second signal router is electrically coupled to at least one first technology device through, in order, at least one second interconnect and corresponding at least one first interconnect.

25. The method of claim 15 , wherein hybrid bonding the first tier with the second tier comprises:

orienting the first tier and/or the second tier such that a first interface layer of the first tier and a second interface layer of the second tier are face-to-face (F2F), the first interface layer comprising the one or more first interconnects and the second interface layer comprising the one or more second interconnects; and

bonding the first tier and the second tier together such that the one or more first interconnects are electrically coupled to the corresponding one or more second interconnects.

26. The method of claim 25 , wherein hybrid bonding the first tier with the second tier further comprises:

heat treating the first interface layer and the second interface layer subsequent to bringing the first interface layer into contact with the second interface layer.

27. The method of claim 15 , further comprising:

forming a third tier on the second tier, the third tier comprising one or more high quality (HQ) integrated passive devices (IPD) and/or one or more third signal routers,

wherein the one or more HQ-IPDs and/or the one or more third signal routers are formed such that

at least one HQ-IPD is electrically coupled to at least one first technology device,

at least one HQ-IPD is electrically coupled to at least one second technology device,

at least one third signal router is electrically coupled to at least one first technology device,

at least one third signal router is electrically coupled to at least one second technology device, or

any combination thereof.

28. The method of claim 27 ,

wherein the second tier comprises a second device layer and an epitaxial layer on the second device layer, the second device layer comprising the one or more second technology devices, and an upper surface of the epitaxial layer being an upper surface of the second tier, and

wherein the method further comprises forming one or more through-vias to extend from the upper surface to a lower surface of the epitaxial layer such that at least one HQ-IPD is electrically coupled to at least one first technology device through at least one through-via,

at least one HQ-IPD is electrically coupled to at least one second technology device through at least one through-via,

at least one third signal router is electrically coupled to at least one first technology device through at least one through-via,

at least one third signal router is electrically coupled to at least one second technology device through at least one through-via, or

any combination thereof.

29. The method of claim 28 , further comprising:

forming a thermal spreader in between the second tier and the third tier,

wherein the one or more through-vias are formed to extend from an upper surface of the thermal spreader to the lower surface of the epitaxial layer.

30. The method of claim 27 , further comprising:

forming one or more bumps on the third tier to enable signal exchanges between the stacked circuit and devices external to the stacked circuit,

wherein the third tier comprises a plurality of metallizations, and

wherein the third tier and the one or more bumps are formed such that the plurality of metalizations and at least one bump are vertically aligned over at least one second technology device so as to provide a vertical thermal path from the at least one second technology device.