IP Library Granted Patent US 11,063,162
Granted Patent B2
US 11,063,162 · App. 16/601,038 · Granted Jul 13, 2021

Current generation from radiation with diamond diode-based devices for detection or power generation

Inventors: Jason M Holmes (Mesa, AZ); Franz A Koeck (Tempe, AZ); Manpuneet Benipal (Tempe, AZ); Ricardo O Alarcon (Chandler, AZ); Stephen Goodnick (Fort McDowell, AZ); Anna Zaniewski (Tempe, AZ); Robert Nemanich (Scottsdale, AZ)
Assignee: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY
H01L31/0288H01L31/115
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Quick Facts
Patent No.
US 11,063,162
App. No.
16/601,038
Granted
Jul 13, 2021
Kind
B2
Abstract

Diamond diode-based devices are configured to convert radiation energy into electrical current, useable for sensing (i.e., detection) or delivery to a load (i.e., energy harvesting). A diode-based detector includes an intrinsic diamond layer arranged between p-type diamond and n-type diamond layers, with the detector further including at least one of (i) a boron containing layer arranged proximate to the n-type and/or the intrinsic diamond layers, or (ii) an intrinsic diamond layer thickness in a range of 10 nm to 300 microns. A diode-based detector may be operated in a non-forward biased state, with a circuit used to transmit a current pulse in a forward bias direction to reset a detection state of the detector. An energy harvesting device may include at least one p-i-n stack (including an intrinsic diamond layer between p-type diamond and n-type diamond layers), with a radioisotope source arranged proximate to the at least one p-i-n stack.

Claims (49)

1. A diode-based detector device comprising:

a p-type diamond layer;

a n-type diamond layer; and

an intrinsic diamond layer arranged between the p-type diamond layer and the n-type diamond layer; and

a circuit configured to transmit a current pulse in a forward bias direction of the diode-based detector device to reset a detection state of the diode-based detector device, wherein during detector operation, the diode-based detector device is configured to be operated in a non-forward-biased state;

wherein the diode-based detector device further comprises at least one of the following features (i) or (ii):

(i) a boron-containing layer is arranged proximate to at least one of the n-type diamond layer or the intrinsic diamond layer, wherein the boron-containing layer comprises one or more of boron nitride, boron carbide, boron oxide, boron, another boron compound, or a conducting metal boride; or

(ii) the intrinsic diamond layer comprises a thickness in a range of from 10 nm to 300 microns.

2. The diode-based detector device of claim 1 , comprising feature (i).

3. The diode-based detector device of claim 2 , further comprising a first metal-containing contact adjacent to the n-type diamond layer, and a second metal-containing contact adjacent to the p-type diamond layer, wherein the first metal-containing contact is arranged between the n-type diamond layer and the boron-containing layer.

4. The diode-based detector device of claim 2 , wherein the boron-containing layer comprises a conducting boron-containing layer, and the n-type diamond layer is arranged between the conducting boron-containing layer and the intrinsic diamond layer.

5. The diode-based detector device of claim 4 , wherein the conducting boron-containing layer serves as a first contact, and the diode-based detector device further comprises a metal-containing contact adjacent to the p-type diamond layer.

6. The diode-based detector device of claim 2 , wherein:

the intrinsic diamond layer includes a first intrinsic diamond sublayer and a second intrinsic diamond sublayer; and

the boron-containing layer is arranged between the first intrinsic diamond sublayer and the second intrinsic diamond sublayer.

7. The diode-based detector device of claim 6 , wherein:

each of the p-type diamond layer, the n-type diamond layer, the first intrinsic diamond sublayer, and the second intrinsic diamond sublayer comprises single crystal material; and

the boron-containing layer comprises one or more of boron nitride, boron carbide, boron oxide, boron, or another boron compound.

8. The diode-based detector device of claim 1 , comprising feature (ii).

9. The diode-based detector device of claim 3 , wherein the intrinsic diamond layer comprises a thickness in a range of from 10 nanometers to 5 microns.

10. The diode-based detector device of claim 8 , wherein the intrinsic diamond layer comprises a thickness in a range of from 6 microns to 300 microns.

11. The diode-based detector device of claim 1 , comprising features (i) and (ii).

12. The diode-based detector device of claim 1 , further comprising a first metal-containing contact adjacent to the n-type diamond layer, and a second metal-containing contact adjacent to the p-type diamond layer.

13. The diode-based detector device of claim 12 , wherein the first metal-containing contact comprises an ohmic contact or a Schottky contact, and the second metal-containing contact comprises an ohmic contact.

14. The diode-based detector device of claim 1 , wherein boron atoms present in the boron-containing layer comprise at least 21% 10 B.

15. The diode-based detector device of claim 1 , wherein each of the p-type diamond layer, the n-type diamond layer, and the intrinsic diamond layer comprises single crystal or polycrystalline material.

16. The diode-based detector device of claim 1 , wherein the p-type diamond layer is doped with boron, and the n-type diamond layer is doped with phosphorus or nitrogen.

17. The diode-based detector device of claim 1 , being configured to operate at an applied voltage of greater than or equal to 0 V.

18. The diode-based detector device of claim 1 , being configured for detection of one or more of neutrons, protons, alpha particles, or beta particles, or being configured for detection of one or more of X-rays, ultraviolet rays, gamma rays, or photons.

19. A diode-based detector device comprising:

a p-type diamond layer comprising single crystal diamond material doped with boron at a first concentration;

a n-type diamond layer;

an intrinsic diamond layer arranged between the p-type diamond layer and the n-type diamond layer, wherein the intrinsic diamond layer includes a first intrinsic diamond sublayer and a second intrinsic diamond sublayer; and

a boron-containing layer arranged proximate to at least one of the n-type diamond layer or the intrinsic diamond layer, wherein the boron-containing layer comprises one or more of boron nitride, boron carbide, boron oxide, boron, another boron compound, or a conducting metal boride;

wherein the boron-containing layer is arranged between the first intrinsic diamond sublayer and the second intrinsic diamond sublayer; and

wherein the boron-containing layer comprises a p-type single crystal diamond material doped with boron at a second concentration, wherein the second concentration is less than the first concentration.

20. A diode-based detector device comprising:

a p-type diamond layer;

a n-type diamond layer; and

an intrinsic diamond layer arranged between the p-type diamond layer and the n-type diamond layer; and

a boron-containing layer is arranged proximate to at least one of the n-type diamond layer or the intrinsic diamond layer, wherein the boron-containing layer comprises one or more of boron nitride, boron carbide, boron oxide, boron, another boron compound, or a conducting metal boride; and

a first metal-containing contact adjacent to the n-type diamond layer, and a second metal-containing contact adjacent to the p-type diamond layer, wherein the first metal-containing contact is arranged between the n-type diamond layer and the boron-containing layer.

21. A diode-based detector device comprising:

a p-type diamond layer;

a n-type diamond layer; and

an intrinsic diamond layer arranged between the p-type diamond layer and the n-type diamond layer; and

a boron-containing layer is arranged proximate to at least one of the n-type diamond layer or the intrinsic diamond layer, wherein the boron-containing layer comprises one or more of boron nitride, boron carbide, boron oxide, boron, another boron compound, or a conducting metal boride; and

wherein the boron-containing layer comprises a conducting boron-containing layer, and the n-type diamond layer is arranged between the conducting boron-containing layer and the intrinsic diamond layer.

22. The diode-based detector device of claim 21 , wherein the conducting boron-containing layer serves as a first contact, and the diode-based detector device further comprises a metal-containing contact adjacent to the p-type diamond layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 10, 2020
From: HOLMES, JASON M; ZANIEWSKI, ANNA; GOODNICK, STEPHEN; ALARCON, RICARDO O; HATHWAR, RAGHURAJ; KOECK, FRANZ A; NEMANICH, ROBERT; BENIPAL, MANPUNEET
To: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY
Reel/Frame 051767/0616 →
CONFIRMATORY LICENSE Recorded Nov 4, 2019
From: ARIZONA STATE UNIVERSITY-TEMPE CAMPUS
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 050925/0486 →
Continuity (2)
Provisional Application 62745414 · Oct 14, 2018
Related Publication 20200119207A1 · Apr 16, 2020