IP Library Granted Patent US 11,720,017
Granted Patent B2
US 11,720,017 · App. 16/604,045 · Granted Aug 8, 2023

Photoactive, inorganic ligand-capped inorganic nanocrystals

Inventors: Dmitri V. Talapin (Riverside, IL); Yuanyuan Wang (Chicago, IL); Hao Zhang (Urbana, IL)
Assignee: THE UNIVERSITY OF CHICAGO
G03F7/0042C09K11/025C09K11/0883C09K11/58C09K11/623C09K11/661C09K11/671C09K11/70C09K11/7492C09K11/7716C09K11/7773C09K11/883C09K11/892G03F7/20G03F7/30H01L21/0273H01L21/02565H01L21/02628H01L29/7869H01L31/055H01L33/502
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Quick Facts
Patent No.
US 11,720,017
App. No.
16/604,045
Granted
Aug 8, 2023
Kind
B2
Abstract

Ligand-capped inorganic particles, films composed of the ligand-capped inorganic particles, and methods of patterning the films are provided. Also provided are electronic, photonic, and optoelectronic devices that incorporate the films. The ligands that are bound to the inorganic particles are composed of a cation/anion pair. The anion of the pair is bound to the surface of the particle and at least one of the anion and the cation is photosensitive.

Claims (37)

1. A photopatternable film comprising:

inorganic crystals, each inorganic crystal having a surface;

inorganic anions bound to the surfaces of the inorganic crystals; and either:

photosensitive photoacid generator cations associated with the inorganic anions, whereby the inorganic anions and the photosensitive photoacid generator cations form a cation/anion pair; or

non-ionic photoacid generators mixed with the inorganic crystals.

2. The film of claim 1 , wherein the inorganic anions comprise metal halides, metal chalcogenides, metal oxides, chalcogenides, halides, O 2− , pseudohalides selected from CN − , N 3 − , SCN − , and OCN − , or a combination of two or more thereof.

3. The film of claim 1 , wherein the film comprises the photosensitive photoacid generator cations.

4. The film of claim 3 , wherein the photoacid generator cations comprise diaryliodonium, triarylsulfonium, diarylalkylsulfonium, or a combination thereof.

5. The film of claim 4 , wherein the inorganic anions and photoacid generator cations form ligands having the formula A 2 MX 4 , A-MX 3 , or A n -MX 6 wherein A represents the diaryliodonium, triarylsulfonium, diarylalkylsulfonium, or the combination thereof, M represents a metal atom, X represents a halogen atom, and where n=2, 3, or 4.

6. The film of claim 3 , wherein the photoacid generator cations comprise bis(4-tert-butylphenyl)iodonium, boc-methoxyphenyldiphenylsulfonium, (tert-butoxycarbonylmethoxynaphthyl)-diphenylsulfonium, (4 tert butylphenyl)diphenylsulfonium, diphenyliodonium, (4 fluorophenyl)diphenylsulfonium, (4 iodophenyl)diphenylsulfonium, (4-methoxyphenyl)diphenylsulfonium, (4 methylthiophenyl)methyl phenyl sulfonium, (4-phenoxyphenyl)diphenylsulfonium, (4 phenylthiophenyl)diphenylsulfonium, triarylsulfonium, triphenylsulfonium, tris(4-tert-butylphenyl)sulfonium, (4-methylphenyl) diphenylsulfonium or a combination of two or more thereof.

7. The film of claim 1 , wherein the inorganic crystals comprise metal crystals, semiconductor crystals, oxide crystals, magnetic crystals, dielectric crystals, light up-converting crystals, or a combination of two or more thereof.

8. The film of claim 1 , wherein the inorganic crystals comprise Group II-VI crystals.

9. The film of claim 8 , wherein the Group II-VI crystals comprise CdSe crystals, CdTe crystals, ZnS crystals, ZnSe crystals, ZnO crystals, HgSe crystals, HgTe crystals, HgS crystals, Hg x Cd 1-x Te crystals, HgxCd 1-x S crystals, Hg x Cd 1-x Se crystals, Cd x Zn 1-x Te crystals, Cd x Zn 1-x Se crystals, Cd x Zn 1-x S crystals, CdS crystals, ZnTe crystals, or mixtures of two or more thereof, where 0<x<1.

10. The film of claim 1 , wherein the inorganic crystals comprise Group III-V crystals.

11. The film of claim 10 , wherein the Group III-V crystals comprise InP crystals, InAs crystals, InN crystals, InSb crystals, GaAs crystals, GaP crystals, GaN crystals, In (1-x) GaxAs crystals, where 0<x<1, In 1-x Ga x P crystals, where 0<x<1, or a mixture of two or more thereof.

12. The film of claim 1 , wherein the inorganic crystals comprise metal oxide crystals.

13. The film of claim 12 , wherein the metal oxide crystals comprise Fe 2 O 3 , Al 2 O 3 , ZrO 2 , CeO 2 , ZnO, FeO, Fe 3 O 4 , HfO 2 , indium gallium zinc oxide (IGZO), Ga 2 O 3 , indium-tin oxide (ITO), TiO 2 , WO 3 , VO 2 , or a mixture of two or more thereof.

14. The film of claim 1 , wherein the inorganic crystals comprise metal crystals.

15. The film of claim 1 , wherein the crystals comprise Au, Ag, Fe, Pt, FePt, AlN, AlP, AlAs, Bi, Bi 2 S 3 , Bi 2 Se 3 , Bi 2 Te 3 , Co, CoPt, CoPt 3 , Cu, Cu 2 S, Cu 2 Se, CuInSe 2 , CuIn (1-x) Ga x (S,Se) 2 , Cu 2 ZnSn(S,Se) 4 , GaN, GaP, GaAs, GaSb, GaSe, Ge, InN, InSb, Ni, PbS, PbSe, PbTe, Pd, Ru, Rh, Si, Sn, In (1-x) Ga x As, where 0<x<1, In 1-x Ga x P, where 0<x<1, or a mixture of two or more thereof.

16. The film of claim 1 , wherein the inorganic crystals are core-shell crystals.

17. The film of claim 16 , wherein the core-shell crystals comprise a central core and an outer shell, and further wherein the core, the shell, or both, comprise Ag, Au, CdS, CdSe, CdTe, Fe, FeO, Fe 2 O 3 , Fe 3 O 4 , FePt, InP, InAs, PbS, PbSe, PbTe, Pt, ZnS, ZnSe, In (1-x) Ga x As, where 0<x<1, In1-xGaxP, where 0<x<1, or a mixture of two of more thereof.

18. The film of claim 1 , wherein the inorganic anions comprise a metal is selected from group 12 or group 13 of the periodic table.

19. The film of claim 5 , wherein MX 4 is CdCl 4 , ZnCl 4 , or InCl 4 , or wherein MX 3 is PbCl 3 , PbBr 3 , or PbI 3 .

20. A method of patterning an inorganic film comprising:

inorganic crystals, each inorganic crystal having a surface;

inorganic anions bound to the surfaces of the inorganic crystals; and either:

photosensitive photoacid generator cations associated with the inorganic anions, whereby the inorganic anions and the photosensitive photoacid generator cations form a cation/anion pair;

or non-ionic photoacid generators mixed with the inorganic crystals, wherein the surfaces of the inorganic crystals are charge-balanced by the inorganic anions,

the method comprising:

irradiating a first portion of the film with radiation, wherein the interaction between the radiation and the photosensitive photoacid generator cations or the photosensitive non-ionic photoacid generators results in the chemical modification of the film, while preventing a second portion of the film from being irradiated by the radiation; and

contacting the film with a solvent that dissolves the second portion of the film, but not the first portion of the film.

21. The method of claim 20 , wherein the solid film comprises the photosensitive photoacid generator cations.

22. The method of claim 20 , wherein the radiation comprises ultraviolet radiation.

23. The method of claim 20 , wherein the radiation comprises an electron beam.

24. The film of claim 1 , wherein the film comprises the photosensitive non-ionic photoacid generators.

25. The film of claim 24 , wherein the photosensitive non-ionic photoacid generators are N-hydroxy-5-norbornene-2,3-dicarboximide perfluoro-1-butanesulfonate, 2-(4-methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 4-N,N-dimethylaminophenyl p-toluenesulfonate, methyl trifluoromethane sulfonate, phenyl trifluoromethanesulfonate, 2-naphthyl trifluoromethanesulfonate, and 4-nitrophenyl trifluoromethanesulfonate, or a combination of two or more thereof.

26. The method of claim 20 , wherein the film comprises the photosensitive non-ionic photoacid generators.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 8, 2020
From: TALAPIN, DMITRI; WANG, YUANYUAN; ZHANG, HAO
To: THE UNIVERSITY OF CHICAGO
Reel/Frame 051447/0386 →
Continuity (3)
Provisional Application 62486566 · Apr 18, 2017
Provisional Application 62608839 · Dec 21, 2017
Related Publication 20200249570A1 · Aug 6, 2020