Method of fastening a semiconductor chip on a lead frame, and electronic component

1. A method of attaching a semiconductor chip on a lead frame comprising:

A) providing a semiconductor chip,

B) applying a solder metal layer sequence to the semiconductor chip, wherein the solder metal layer sequence comprises a first metallic layer comprising indium or an indium-tin alloy,

C) providing a lead frame,

D) applying a metallization layer sequence to the lead frame, wherein the metallization layer sequence comprises a fourth layer comprising indium and/or tin arranged above the lead frame and a third layer comprising gold arranged above the fourth layer,

E) forming an intermetallic intermediate layer comprising gold and indium, gold and tin or gold, tin and indium,

G) applying the semiconductor chip to the lead frame via the solder metal layer sequence and the intermetallic intermediate layer, and

H) heating the arrangement produced in G) to attach the semiconductor chip to the lead frame.

2. The method according to claim 1 , further comprising:

F) heating the arrangement produced in D) to a temperature T1 higher than the melting point of tin and/or indium, wherein the intermetallic layer is formed in E1) before F) and/or in E2) after F).

3. The method according to claim 1 , wherein the solder metal layer sequence comprises a barrier layer arranged above the first metallic layer and a second metallic layer comprising gold arranged between the barrier layer and the semiconductor chip.

4. The method according to claim 1 , wherein the metallization layer sequence comprises a first layer comprising nickel arranged above the lead frame, and the fourth layer is arranged between the first layer and the third layer.

5. The method according to claim 2 , wherein the metallization layer sequence comprises a first layer comprising nickel arranged above the lead frame, and the fourth layer is arranged between the first layer and the third layer, and in E1) the intermetallic intermediate layer comprising gold and indium, gold and tin or gold, tin and indium is formed and in E2) the intermetallic intermediate layer comprising gold, nickel and tin; or gold, nickel, tin and indium is formed.

6. The method according to claim 4 , wherein the metallization layer sequence comprises a second layer comprising palladium and the second layer is arranged above the first layer, the fourth layer is arranged above the second layer and the third layer is arranged above the fourth layer.

7. The method according to claim 2 ,

wherein the metallization layer sequence comprises a first layer comprising nickel arranged above the lead frame and a second layer comprising palladium,

the second layer is arranged above the first layer, the fourth layer is arranged above the second layer and the third layer is arranged above the fourth layer, and

in E1) the intermetallic intermediate layer comprising gold and indium, gold and tin or gold, tin and indium is formed, and in E2) the intermetallic intermediate layer comprising gold, palladium and indium; gold, palladium and tin; gold, palladium, tin and indium; gold, nickel, palladium and indium; gold, nickel, palladium and tin or gold, nickel, palladium, tin and indium is formed.

8. The method according to claim 1 ,

wherein the metallization layer sequence comprises a second layer comprising palladium, and the second layer is arranged between the fourth layer and the third layer, and

in E) or E2) the intermetallic intermediate layer comprising gold, palladium and indium and/or tin is formed.

9. The method according to claim 1 , wherein the metallization layer sequence comprises a first layer comprising nickel, a second layer comprising palladium and a further fourth layer, and the first layer is arranged above the lead frame, the fourth layer is arranged above the first layer, the second layer is arranged above the fourth layer, the further fourth layer is arranged above the second layer and the third layer is arranged above the further fourth layer.

10. The method according to claim 2 ,

wherein the metallization layer sequence comprises a first layer comprising nickel, a second layer comprising palladium, and a further fourth layer,

the first layer is arranged above the lead frame, the fourth layer is arranged above the first layer, the second layer is arranged above the fourth layer, the further fourth layer is arranged above the second layer and the third layer is arranged above the further fourth layer, and

in E1) the intermetallic intermediate layer comprising gold and indium, gold and tin or gold, tin and indium is formed, and in E2) the intermetallic intermediate layer comprises gold, nickel, palladium and indium; gold, nickel, palladium and tin or gold, nickel, palladium tin and indium is formed.

11. The method according to claim 1 , wherein the fourth layer has a layer thickness of 10 nm to 5 μm.

12. The method according to claim 1 , wherein the third layer has a layer thickness of 3 nm to 5 nm.

13. The method according to claim 1 , wherein in H), a connection layer sequence is formed between the lead frame and the semiconductor chip, and the connection layer sequence comprises:

a first intermetallic layer comprising gold and indium or gold, indium and tin,

a second intermetallic layer comprising indium and nickel; indium and titanium; indium and a titanium compound; indium and platinum; indium, tin and nickel; indium, tin and titanium; indium, tin and a titanium compound or indium, tin and platinum, and

a third intermetallic layer comprising indium and gold or indium, tin and gold.

14. The method according to claim 1 , wherein, in E), the tin and/or the indium of the fourth layer reacts with the gold of the third layer.