Electrical connection device with a short-circuit wiring pattern that reduces connection wirings
An electrical connection device includes: a plurality of probes ( 10 ) in which distal end portions contact an inspection object ( 2 ) during measurement; and a space transformer ( 30 ) including a plurality of connection wirings ( 33 ), in each of which a first terminal electrically connected to any of proximal end portions of the plurality of probes ( 10 ) is arranged on a first main surface ( 301 ), and a second terminal is exposed to a second main surface ( 302 ), and having a short-circuit wiring pattern formed on the first main surface, the short-circuit wiring pattern electrically connecting, to the same connection wiring ( 33 ), proximal end portions of a plurality of same-potential probes ( 10 ) set at a same potential during measurement among the plurality of probes ( 10 ).
1. An electrical connection device for use in measuring electrical characteristics of an inspection object, comprising:
a plurality of probes in which distal end portions contact the inspection object during measurement; and
a space transformer including:
a plurality of connection wirings, each having a first terminal arranged on a first main surface of the space transformer, and each having a second terminal exposed relative to a second main surface of the space transformer, the first terminal connected to a proximal end portion of at least one of the plurality of probes; and
a short-circuit wiring pattern formed on the first main surface, the short-circuit wiring pattern electrically connecting proximal end portions of at least two of the plurality of probes to a common one of the plurality of connection wirings, such that during measurement the at least two of the plurality of probes are set at a same voltage potential using the common one of the plurality of connection wirings.
2. The electrical connection device according to claim 1 , wherein the short-circuit wiring pattern connects a plurality of the adjacent same-potential probes to each other.
3. The electrical connection device according to claim 1 , wherein there are a plurality of the connection wirings which electrically connect to the single short-circuit wiring pattern.
4. The electrical connection device according to claim 1 , wherein an interval between the second terminals is wider than an interval between the first terminals.
5. The electrical connection device according to claim 1 , further comprising an electrode substrate having a plurality of electrode pads arranged thereon, the electrode pads being individually and electrically connected to a plurality of the second terminals.
6. The electrical connection device according to claim 5 , wherein the proximal end portions of the probes and the electrode pads are electrically connected by portions of the connection wirings, the portions extending from the second main surface.
7. The electrical connection device according to claim 1 , wherein the connection wirings are conductive wires having flexibility.
8. The electrical connection device according to claim 1 , wherein the space transformer has a configuration in which a resin layer is disposed on a support substrate, and positions of the connection wirings are fixed on the second main surface by the resin layer.