IP Library Granted Patent US 11,635,614
Granted Patent B2
US 11,635,614 · App. 16/604,763 · Granted Apr 25, 2023

Systems and methods for beam steering using a micromirror device

Inventors: Yuzuru Takashima (Tucson, AZ); Braden Smith (Tucson, AZ); Brandon Hellman (Tucson, AZ)
Assignee: Arizona Board of Regents on Behalf of the University of Arizona
G02B26/10G01S7/4815G01S7/4817G02B26/0833
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Quick Facts
Patent No.
US 11,635,614
App. No.
16/604,763
Granted
Apr 25, 2023
Kind
B2
Abstract

A beam steering apparatus including a first actuatable micromirror array (AMA) having a pitch, p, adapted to impart a modulation to a wavefront incident on the first AMA by a transition between a first state and a second state, wherein the first AMA has a transition time (T) between the first state and the second state, and at least one light source adapted to provide the incident wavefront having a duration, t, to the first AMA, where t≤T. The AMA may be a MEMS device such as a digital micromirror array. The beam steering apparatus may constitute a portion of LIDAR system.

Claims (236)

1. A beam steering apparatus, comprising:

a first actuatable micromirror array (AMA) having a pitch, p, adapted to impart a modulation to a wavefront incident on the first AMA by a transition between a first state and a second state, wherein the first AMA has a transition time (T) between the first state and the second state; and

at least one light source adapted to provide the incident wavefront having a duration, t max , to the first AMA,

where t max ≤T;

wherein

t max ≤T/N Max ,

where N Max is the number of diffraction orders of the incident wavefront supported by the AMA, and is given by,

N

max

=

1

+

floor

p

[

sin

(

2

α

-

β

)

+

sin

(

β

)

]

2

λ

+

floor

p

[

sin

(

-

2

α

-

β

)

+

sin

(

β

)

]

2

λ

where 2α is the phase tilt angle induced by the first AMA for a normal incident wavefront, β is the in-plane angle of incidence of the incident wavefront along which phase is modulated, λ is the wavelength of light from the at least one light source, and the function ‘floor’ rounds N Max down to the nearest integer,

further wherein the first AMA functions as a blazed grating according to the equation

θ

m

=

arcsin

(

2

m

λ

p

-

sin

(

β

)

)

+

β

,

where θ m is a diffraction angle supported by said blazed grating, and m is the diffraction order.

2. The beam steering apparatus of claim 1 , wherein the first state and second state are discrete ON and OFF states, respectively.

3. The beam steering apparatus of claim 1 , wherein the at least one light source comprises a laser.

4. The beam steering apparatus of claim 1 , wherein the at least one light source comprises a plurality of laser diodes.

5. The beam steering apparatus of claim 1 , wherein the at least one light source comprises a plurality of light sources producing at least two different wavelengths.

6. The beam steering apparatus of claim 1 , wherein the incident wavefront is planar.

7. The beam steering apparatus of claim 1 , wherein the at least one light source is configured to produce collimated light.

8. The beam steering apparatus of claim 1 , wherein the at least one light source is configured to produce quasi-collimated light.

9. The beam steering apparatus of claim 1 , wherein the first AMA has only 2 discrete states of operation.

10. The beam steering apparatus of claim 1 , further comprising a second AMA cascaded with the first AMA to receive light from the incident wavefront after is incident on the first AMA.

11. A method for making an effective blazed grating, comprising:

actuating an actuatable micromirror array (AMA) array between a first state and a second state, wherein the AMA has a transition time, T between the first state and the second state; and

directing a wavefront onto the AMA, the wavefront having a duration t,

where t max ≤T, wherein

where t max ≤T, wherein

where N Max is the number of diffraction orders with diffraction efficiency equal to or greater than 50% of the incident wavefront supported by the AMA,

wherein the AMA functions as a blazed grating according to the equation

θ

m

=

arcsin

(

2

m

λ

p

-

sin

(

β

)

)

+

β

,

where θ m is the diffraction angle(s) supported by said blazed grating, λ is the wavelength of the incident wavefront, and m is the diffraction order, β is in-plane angle of incidence of incident wavefront along which phase is modulated.

12. A LIDAR system for detecting an object, comprising:

a first actuatable micromirror array (AMA) having a pitch, p, adapted to impart a modulation to a wavefront incident on the first AMA by a transition between a first state and a second state, wherein the first AMA has a transition time (T) between the first state and the second state;

at least one light source adapted to provide the incident wavefront having a maximum duration, t max , to the first AMA, where t max ≤T; and

a detector positioned to receive light from the wavefront after it is directed onto the object,

wherein

t max ≤T/N Max ,

where N Max is the number of diffraction orders of the incident wavefront supported by the AMA, and is given by,

N

max

=

1

+

floor

"\[LeftBracketingBar]"

p

[

sin

(

2

α

-

β

)

+

sin

(

β

)

]

2

λ

"\[RightBracketingBar]"

+

floor

"\[LeftBracketingBar]"

p

[

sin

(

-

2

α

-

β

)

+

sin

(

β

)

]

2

λ

"\[RightBracketingBar]"

where 2α is the phase tilt angle induced by the first AMA for a normal incident wavefront, β is the in-plane angle of incidence of the incident wavefront along which phase is modulated, λ is the wavelength of light from the at least one light source, and the function ‘floor’ rounds NMax down to the nearest integer,

further wherein the first AMA functions as a blazed grating according to the equation

θ

m

=

arc

sin

(

2

m

λ

p

-

sin

(

β

)

)

+

β

,

where θ m is a diffraction angle supported by said blazed grating, and m is the diffraction order.

13. The LIDAR system of claim 12 , wherein the first state and second state are discrete ON and OFF states, respectively.

14. The LIDAR system of claim 12 , wherein the at least one light source comprises a laser.

15. The beam steering apparatus of claim 12 , wherein the at least one light source comprises a plurality of light sources producing at least two different wavelengths.

16. The beam steering apparatus of claim 12 , wherein the at least one light source is adapted to produce collimated light.

17. The beam steering apparatus of claim 12 , wherein the first AMA has only 2 discrete states of operation.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2019
From: TAKASHIMA, YUZURU; SMITH, BRADEN; HELLMAN, BRANDON
To: ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIVERSITY OF ARIZONA
Reel/Frame 051004/0243 →
Continuity (2)
Provisional Application 62485554 · Apr 14, 2017
Related Publication 20200379250A1 · Dec 3, 2020
Cited By (1)
US 12,704,635