Techniques and mechanisms for operation of stacked transistors
Techniques and mechanisms for operating transistors that are in a stacked configuration. In an embodiment, an integrated circuit (IC) device includes transistors arranged along a line of direction which is orthogonal to a surface of a semiconductor substrate. A first epitaxial structure and a second epitaxial structure are coupled, respectively, to a first channel structure of a first transistor and a second channel structure of a second transistor. The first epitaxial structure and the second epitaxial structure are at different respective levels relative to the surface of the semiconductor substrate. A dielectric material is disposed between the first epitaxial structure and the second epitaxial structure to facilitate electrical insulation of the channels from each other. In another embodiment, the stacked transistors are coupled to provide a complementary metal-oxide-semiconductor (CMOS) inverter circuit.
1. An integrated circuit (IC) device comprising:
a semiconductor substrate;
a first transistor coupled to the semiconductor substrate, the first transistor including a first channel structure;
a second transistor including a second channel structure, wherein the first transistor and the second transistor are arranged in a stacked configuration along a line of direction orthogonal to a surface of the semiconductor substrate;
a first epitaxial structure coupled to the first channel structure at a first level relative to the surface of the semiconductor substrate;
a second epitaxial structure coupled to the second channel structure at a second level relative to the surface of the semiconductor substrate, the first level offset from the second level; and
a dielectric material disposed between the first epitaxial structure and the second epitaxial structure on a side of the stacked configuration, the dielectric material electrically isolating the first epitaxial structure from the second epitaxial structure.
2. The IC device of claim 1 , the first transistor further including a first gate structure extending at least partially around the first channel structure.
3. The IC device of claim 2 , the first gate structure extending completely around the first channel structure.
4. The IC device of claim 1 , the second transistor further including a second gate structure extending at least partially around the second channel structure.
5. The IC device of claim 4 , the second gate structure extending around the second channel structure.
6. The IC device of claim 1 , wherein a complementary metal-oxide-semiconductor (CMOS) circuit include the first transistor and the second transistor.
7. The IC device of claim 6 , wherein the first transistor is a N-type metal-oxide-semiconductor (NMOS) transistor and the second transistor is a P-type metal-oxide-semiconductor (PMOS) transistor.
8. The IC device of claim 1 , wherein an inverter circuit includes the first transistor and the second transistor.
9. The IC device of claim 1 , wherein one of the first channel structure and the second channel structure includes a nanowire.
10. The IC device of claim 1 , further comprising a via extending through the second epitaxial layer and to the first epitaxial layer.
11. A system comprising:
an integrated circuit (IC) device including: a semiconductor substrate;
a first transistor coupled to the semiconductor substrate, the first transistor including a first channel structure;
a second transistor including a second channel structure, wherein the first transistor and the second transistor are arranged in a stacked configuration along a line of direction orthogonal to a surface of the semiconductor substrate;
a first epitaxial structure coupled to the first channel structure at a first level relative to the surface of the semiconductor substrate;
a second epitaxial structure coupled to the second channel structure at a second level relative to the surface of the semiconductor substrate, the first level offset from the second level; and
a dielectric material disposed between the first epitaxial structure and the second epitaxial structure on a side of the stacked configuration, the dielectric material electrically isolating the first epitaxial structure from the second epitaxial structure; and
a display device coupled to the IC device, the display device to display an image based on a signal output by the IC device.
12. The system of claim 11 , the first transistor further including a first gate structure extending at least partially around the first channel structure.
13. The system of claim 12 , the first gate structure extending completely around the first channel structure.
14. The system of claim 11 , the second transistor further including a second gate structure extending at least partially around the second channel structure.
15. The system of claim 14 , the second gate structure extending around the second channel structure.