Method of producing a radiation-emitting semiconductor component, and radiation-emitting semiconductor component
A method of manufacturing semiconductor device includes providing a radiation emitting semiconductor chip having a first main surface, applying a metallic seed layer to a second main surface opposite the first main surface, galvanically depositing first and second metallic volume regions on the seed layer, depositing an adhesion promoting layer on the volume regions, and applying a casting compound at least between contact points, wherein before the metallic volume regions are galvanically deposited, a dielectric layer is first applied to the seed layer over its entire surface and openings are produced in the dielectric layer by etching, and a material of the metallic volume regions is deposited through the openings of the dielectric layer, wherein the dielectric layer is underetched at boundaries to the openings and the underetches are filled with material of the metallic volume regions during the galvanical depositing of the metallic volume regions.
1. A method of manufacturing a radiation emitting semiconductor device comprising:
providing a radiation emitting semiconductor chip having a first main surface comprising a radiation exit surface of the semiconductor chip,
applying a metallic seed layer to a second main surface of the semiconductor chip opposite the first main surface,
galvanically depositing a metallic volume region of a first electrical contact point and a metallic volume region of a second electrical contact point on the seed layer,
depositing an adhesion promoting layer on the volume regions of the first electrical contact point and the second electrical contact point, and
applying a casting compound at least between the contact points, wherein
before the metallic volume regions are galvanically deposited, a dielectric layer is first applied to the seed layer over its entire surface and openings are produced in the dielectric layer by etching,
a material of the metallic volume regions is deposited through the openings of the dielectric layer, wherein the dielectric layer is underetched at boundaries to the openings and the underetches are filled with material of the metallic volume regions during the galvanical depositing of the metallic volume regions, and
the adhesion promoting layer is applied to the volume regions such that it completely covers each of the surfaces of the volume reasons,
the casting compound is applied such that the casting compound completely envelops the electrical contact points, and
first main surfaces of the electrical contact points are exposed by removing the casting compound, wherein the adhesion promoting layer is removed from the first main surfaces.
2. The method according to claim 1 , wherein
structural elements of a photoresist are applied to the dielectric layer over the entire surface, and
the openings in the dielectric layer are produced by etching the regions, which are freely accessible.
3. The method according to claim 2 , wherein the metallic volume regions are deposited between the structural elements of the photoresist.
4. The method according to claim 1 , wherein the volume regions comprise one of nickel, copper, tin, and gold.
5. The method according to claim 1 , wherein the adhesion promoting layer comprises one of SiN, SiO x , Ti, TiO 2 , Sn, and fluorine-containing compounds.
6. The method according to claim 1 , wherein the adhesion promoting layer is applied by one of galvanical deposition, PVD, CVD, electroless galvanic deposition, sputtering, spinning, dipping, and spraying.
7. The method according to claim 1 , wherein the adhesion promoting layer has a thickness of 0.5 nanometers to 5 micrometers.
8. The method according to claim 1 , wherein the seed layer comprises one of Au, Ti, Cu, Al, Ag, Sn, Rh, and Pt.
9. The method according to claim 1 , wherein the seed layer is applied by one of electroless galvanic deposition, vapor deposition, PECVD, and sputtering.
10. A radiation emitting semiconductor device comprising:
a radiation emitting semiconductor chip having a first main surface comprising a radiation exit surface of the semiconductor chip,
a seed layer on a second main surface of the semiconductor chip opposite the first main surface, and
a first electrical contact point and a second electrical contact point arranged at the second main surface of the semiconductor chip, wherein
each contact point has a metallic volume region and an adhesion promoting layer, the adhesion promoting layer forming at least partially an outer surface of the contact point and effecting adhesion promotion to a casting compound that laterally completely envelops the contact points,
a second main surface of each contact point facing the semiconductor chip has a larger area than a first main surface of each contact point opposite the second main surface,
the metallic volume region of the contact points is galvanically deposited on the seed layer, wherein side faces of the contact points are completely covered with the adhesion promoting layer and the first main surface of the contact points is free of the adhesion promoting layer, and
the contact points and the casting compound are flush with each other.
11. The radiation emitting semiconductor device according to claim 10 , wherein the adhesion promoting layer completely covers side surfaces of the volume regions of the contact points, while a main surface of the volume regions is free of the adhesion promoting layer.
12. The radiation emitting semiconductor device according to claim 11 , wherein a solderable layer forming a mounting surface of the contact points is applied to the main surface of the volume regions, which is free of the adhesion promoting layer.
13. The radiation emitting semiconductor device according to claim 10 , wherein the adhesion promoting layer comprises tin or is formed of tin.