Cutting oil composition
Disclosed is a cutting oil composition, which is vastly superior in view of layer separation, dispersibility, viscosity, ingot-cleaning time after sawing, and wafer warpage after sawing, compared to conventional cutting oil compositions, and which includes mineral oil that is highly hydrogenated, as represented by Chemical Formulas 1 to 3, bentonite clay as a thickener, and glycerol trioleate as a dispersant. A cutting method using the cutting oil composition is also provided.
1. A cutting oil composition, comprising a mixture of mineral oil represented by Chemical Formula 1, mineral oil represented by Chemical Formula 2 and mineral oil represented by Chemical Formula 3,
wherein Formula 1 is R1-(CnH2n−4)a-R2,
wherein Formula 2 is R3-(CnH2n−2)b-R4,
wherein Formula 3 is R5-(CnH2n)c-R6,
wherein n is 5 or 6, and R1, R2, R3, R4, R5 and R6 are each H or OH, and
wherein a is 7 to 20 b is 39 to 52 and c is 39 to 41.
2. The cutting oil composition of claim 1 , further comprising a thickener and a dispersant.
3. The cutting oil composition of claim 2 , wherein the thickener is bentonite clay and the dispersant is glycerol trioleate.
4. The cutting oil composition of claim 3 , comprising 65 to 93 wt % of the mixture of mineral oil, 0.7 to 3 wt % of the bentonite clay, and 5 to 35 wt % of the glycerol trioleate.
5. The cutting oil composition of claim 4 , comprising 70 to 90 wt % of the mixture of mineral oil, 1 to 2 wt % of the bentonite clay, and 9 to 29 wt % of the glycerol trioleate.