IP Library Granted Patent US 11,011,361
Granted Patent B1
US 11,011,361 · App. 16/618,198 · Granted May 18, 2021

Mass spectrometer and nozzle member

Inventors: Kiyomi Yoshinari (Tokyo, JP); Yasushi Terui (Tokyo, JP)
Assignee: Hitachi High-Tech Corporation
H01J49/0431H01J49/022H01J49/025H01J49/0445H01J49/24
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Quick Facts
Patent No.
US 11,011,361
App. No.
16/618,198
Granted
May 18, 2021
Kind
B1
Abstract

The mass spectrometer includes an ionization unit that ionizes a sample; a nozzle unit having an inflow port that is connected to the ionization unit by a flow pipe and through which the ionized sample flows, and an outflow port from which the sample flowing in flows out; a vacuum chamber that is evacuated by vacuum evacuation means and into which the sample flows from the nozzle unit; a mass analysis unit that is located downstream of a flow of the sample relative to the vacuum chamber and that selects ions from the sample; and an ion detection unit that detects the ions selected by the mass analysis unit, wherein a division portion that divides a flow of the sample is provided inside the nozzle unit, and the division portion has a tapered projection whose diameter decreases toward the outflow port.

Claims (41)

1. A mass spectrometer comprising:

an ionization unit that ionizes a sample;

a nozzle unit having an inflow port that is connected to the ionization unit by a flow pipe and through which the ionized sample flows, and an outflow port from which the sample flowing in flows out;

a vacuum chamber that is evacuated by vacuum evacuation means and into which the sample flows from the nozzle unit;

a mass analysis unit that is located downstream of a flow of the sample relative to the vacuum chamber and that selects ions from the sample; and

an ion detection unit that detects the ions selected by the mass analysis unit, wherein

a division portion that divides a flow of the sample is provided inside the nozzle unit, and

the division portion has a tapered projection whose diameter decreases toward the outflow port.

2. The mass spectrometer according to claim 1 , wherein

the projection has a conical shape.

3. The mass spectrometer according to claim 2 , wherein

a central axis of the projection and a central axis of the outflow port substantially coincide with each other.

4. The mass spectrometer according to claim 1 , wherein

the division portion has a substantially circular cross section.

5. The mass spectrometer according to claim 1 , wherein

a support portion which supports the division portion is provided on an inner wall of the nozzle unit at a position closer to the inflow port than the outflow port.

6. The mass spectrometer according to claim 1 , wherein

the division portion is supported by a plurality of support portions.

7. The mass spectrometer according to claim 4 , wherein

the division portion is supported by an annular support portion that has a boundary with an outer periphery of the division portion and an outer periphery of an inner wall of the nozzle unit, the annular support portion being provided with a plurality of holes.

8. The mass spectrometer according to claim 1 , wherein

a ratio P1/P2 between a pressure P1 in the flow pipe and a pressure P2 in the vacuum chamber is 50 times or more.

9. The mass spectrometer according to claim 1 , wherein

the mass analysis unit includes n sets of rod-shaped electrodes to which a DC voltage Un and an AC voltage Vn RF COS (Ω RF +RF) are applied where n is an integer of 2 or more.

10. The mass spectrometer according to claim 2 , wherein

a vertex of the projection is located closer to the inflow port than an opening end of the outflow port.

11. The mass spectrometer according to claim 1 , further comprising:

an outer portion having an opening surrounding the division portion, the opening whose diameter decreases from the inflow port toward the outflow port having a tapered shape.

12. The mass spectrometer according to claim 1 , wherein

the division portion has an end closer to the inflow port, the end projecting relative to the inflow port.

13. A nozzle member used in a mass spectrometer, wherein

the nozzle member has an inflow port into which an ionized sample flows and an outflow port from which the sample flowing in flows out, and a division portion that divides a flow of the sample is provided inside the nozzle member, and

the division portion has a taper-shaped projection whose diameter decreases toward the outflow port.

14. A mass spectrometer comprising:

an ionization unit that ionizes a sample;

a nozzle unit having an inflow port that is connected to the ionization unit by a flow pipe and through which the ionized sample flows, and an outflow port from which the sample flowing in flows out;

a vacuum chamber that is evacuated by vacuum evacuation means and into which the sample flows from the nozzle unit;

a mass analysis unit that is located downstream of a flow of the sample relative to the vacuum chamber and that selects ions from the sample; and

an ion detection unit that detects the ions selected by the mass analysis unit, wherein

a division portion that divides a flow of the sample is provided inside the nozzle unit, and

the division portion causes the divided flow of the sample to cross and flow into the vacuum chamber.

Assignments (2)
CHANGE OF NAME Recorded Apr 14, 2020
From: HITACHI HIGH-TECHNOLOGIES CORPORATION
To: HITACHI HIGH-TECH CORPORATION
Reel/Frame 052398/0249 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 3, 2019
From: YOSHINARI, KIYOMI; TERUI, YASUSHI
To: HITACHI HIGH-TECHNOLOGIES CORPORATION
Reel/Frame 051163/0374 →
Priority Claims (1)
JP JP2017-113622 · Jun 8, 2017 · national