Solid-state imaging element and imaging apparatus
Variations in photoelectric conversion performance between pixels (valid pixels and light-shielding pixels) in an imaging element are reduced. A solid-state imaging element includes: a plurality of pixels including a color filter for transmitting a light having a predetermined wavelength among incident lights, a photoelectric conversion portion formed on a semiconductor substrate and for performing photoelectric conversion in accordance with a light transmitted through the color filter, and an insulating layer placed between the color filter and the semiconductor substrate; light-shielding pixels among the plurality of pixels, including a first light-shielding portion disposed in a vicinity of the color filter on the insulating layer and for shielding the light transmitted through the color filter in its own pixel; and a second light-shielding portion disposed on the insulating layer between the plurality of pixels and the light-shielding pixels, and for shielding a light transmitted through the color filter of the adjacent pixel.
1. A solid-state imaging element, comprising:
a plurality of pixels that includes a plurality of valid pixels and a plurality of light-shielding pixels, wherein each pixel of the plurality of pixels includes:
a color filter, wherein the color filter is configured to transmit a light having a determined wavelength among a plurality of incident lights;
a semiconductor substrate;
a photoelectric conversion portion on the semiconductor substrate, wherein the photoelectric conversion portion is configured to perform photoelectric conversion based on the light transmitted through the color filter; and
an insulating layer between the color filter and the semiconductor substrate, wherein
the plurality of light-shielding pixels includes:
a first light-shielding portion in a vicinity of the color filter on the insulating layer, wherein the first light-shielding portion is configured to shield the light transmitted through the color filter in a respective light-shielding pixel of the plurality of light-shielding pixels; and
a plurality of second light-shielding portions on the insulating layer between the plurality of valid pixels and the plurality of light-shielding pixels, wherein
each second light-shielding portion of the plurality of second light-shielding portions is configured to shield the light transmitted through the color filter of an adjacent pixel of the plurality of pixels, and
a first end of the first light-shielding portion and a second end of the first light-shielding portion are in contact with different second light-shielding portions of the plurality of second light-shielding portions.
2. The solid-state imaging element according to claim 1 , wherein
each pixel of the plurality of valid pixels and the plurality of light-shielding pixels includes a hydrogen source, and
the hydrogen source is configured to supply hydrogen to the semiconductor substrate.
3. The solid-state imaging element according to claim 2 , wherein
the plurality of valid pixels and the plurality of light-shielding pixels include an intralayer lens as the hydrogen source, and
the intralayer lens is configured to condense the light transmitted through the color filter to the photoelectric conversion portion.
4. The solid-state imaging element according to claim 2 , further comprising:
a valid pixel region that includes the plurality of valid pixels; and
a light-shielding pixel region that includes the plurality of light-shielding pixels, wherein the light-shielding pixel region is outside the valid pixel region.
5. The solid-state imaging element according to claim 4 , wherein
each light-shielding pixel of the plurality of light-shielding pixels includes the hydrogen source of a different size, and
a size of the hydrogen source is based on a distance from the valid pixel region to the respective light-shielding pixel.
6. The solid-state imaging element according to claim 4 , wherein
the plurality of light-shielding pixels further includes a third light-shielding portion,
the third light-shielding portion is adjacent to an end portion of a respective second light-shielding portion of the plurality of second light-shielding portions, and
the third light-shielding portion is in a vicinity of the semiconductor substrate.
7. The solid-state imaging element according to claim 6 , wherein
each light-shielding pixel of the plurality of light-shielding pixels includes the third light-shielding portion, and
the third light-shielding portion of each light-shielding pixel has a different size, and
a size of the third light-shielding portion is based on a distance from the valid pixel region to the respective light-shielding pixel.
8. The solid-state imaging element according to claim 1 , wherein
the plurality of pixels further includes a fourth light-shielding portion,
the fourth light-shielding portion is adjacent to a respective second light-shielding portion of the plurality of second light-shielding portions,
the fourth light-shielding portion protrudes into a region where the color filter is disposed, and
the fourth light-shielding portion is configured to shield the light transmitted through the color filter of the adjacent pixel.
9. The solid-state imaging element according to claim 8 , wherein a width of the fourth light-shielding portion is smaller than a width of the respective second light-shielding portion.
10. An imaging apparatus, comprising:
a plurality of pixels that includes a plurality of valid pixels and a plurality of light-shielding pixels, wherein each pixel of the plurality of pixels includes:
a color filter, wherein the color filter is configured to transmit a light having a determined wavelength among a plurality of incident lights;
a semiconductor substrate;
a photoelectric conversion portion on the semiconductor substrate, wherein the photoelectric conversion portion is configured to perform photoelectric conversion based on the light transmitted through the color filter; and
an insulating layer between the color filter and the semiconductor substrate, wherein
the plurality of light-shielding pixels includes:
a first light-shielding portion in a vicinity of the color filter on the insulating layer, wherein the first light-shielding portion is configured to shield the light transmitted through the color filter in a respective light-shielding pixel of the plurality of light-shielding pixels; and
a plurality of second light-shielding portions on the insulating layer between the plurality of valid pixels and the plurality of light-shielding pixels, wherein
each second light-shielding portion of the plurality of second light-shielding portions is configured to shield the light transmitted through the color filter of an adjacent pixel of the plurality of pixels, and
a first end of the first light-shielding portion and a second end of the first light-shielding portion are in contact with different second light-shielding portions of the plurality of second light-shielding portions; and
a processing circuit configured to process image signals based on electric charges generated by photoelectric conversion in each photoelectric conversion portion in the plurality of valid pixels and the plurality of light-shielding pixels.