Fluid sensor and mass flow controller
The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.
1. A fluid sensor, comprising at least two measuring tubes whose inside diameters have a proportional relationship,
each measuring tube comprises a middle portion and two bent portions located on two sides of the middle portion, the two bent portions being parallel to each other and perpendicular to the middle portion;
the fluid sensor further comprises:
a base, wherein at least two first mounting grooves are provided on a first surface of the base, and two first through holes penetrating through the base in a direction perpendicular to the first surface are provided at outer sides of two ends of each first mounting groove, respectively; and the middle portion of each measuring tube is located in the first mounting groove corresponding to the measuring tube, and the two bent portions pass through the two first through holes, respectively;
the fluid sensor further comprises:
pressing blocks, wherein a number of the pressing blocks is the same as a number of the first through holes, and the pressing blocks are at least partially disposed in the first through holes in a one-to-one correspondence; a second through hole is provided in each pressing block, and the second through hole has an inside diameter smaller than that of the first through hole corresponding to the pressing block where the second through hole is located; and the bent portion passes through the first through hole and the second through hole successively, and a seal is provided between each bent portion and the second through hole corresponding to the bent portion.
2. The fluid sensor of claim 1 , wherein the inside diameters of the at least two measuring tubes are the same.
3. The fluid sensor of claim 1 , wherein the inside diameters of the at least two measuring tubes are different.
4. The fluid sensor of claim 3 , wherein a number of the at least two measuring tubes is two; and
a ratio of the inside diameters of the two measuring tubes is greater than or equal to 1:2.
5. The fluid sensor of claim 1 , wherein a thermal insulation material is provided in each first mounting groove to coat the middle portion of the measuring tube corresponding to the first mounting groove.
6. The fluid sensor of claim 1 , wherein a second mounting groove is disposed at one side of each of the first mounting grooves and on the first surface of the base;
the fluid sensor further comprises:
a terminal plate disposed in the second mounting groove; and
a sensing wire, wherein each of the measuring tubes is wound by the sensing wire, respectively, and the sensing wire is electrically connected to the terminal plate.
7. The fluid sensor of claim 6 , further comprising:
a cover plate disposed on the first surface of the base and fixedly connected to the base, wherein a third through hole is provided in the cover plate at a position corresponding to each terminal plate; and
a plurality of terminals, wherein each of the terminals is electrically connected to a terminal plates through the third through holes corresponding to each terminal plate, respectively.
8. A mass flow controller, comprising the fluid sensor according to claim 1 .
9. The mass flow controller of claim 8 , further comprising:
an inflow port;
a flow divider connected to the inflow port and comprising an internal channel; the flow divider being configured to divide a fluid flowing out of the inflow port into each measuring tube of the fluid sensor and the internal channel according to a predetermined flow ratio;
a fluid channel having a gas inlet end connected to a gas outlet end of the internal channel,
wherein a flow control valve is disposed on the fluid channel; and
an outflow port connected to the gas outlet end of the fluid channel.
10. The mass flow controller of claim 9 , further comprising:
a control circuit board configured to receive a flow detection signal sent from the fluid sensor, calculate a difference between the flow detection signal and a set flow value, and control the flow control valve to adjust a flow of a fluid passing through the fluid channel according to a calculation result until the flow of the fluid is equal to the set flow value.