Polarizing plate
A polarizing plate having excellent optical properties includes: a transparent substrate that is transparent to light in a used wavelength band; grid-shaped protrusions arranged on the transparent substrate at a pitch shorter than the wavelength of light in the used band, extending in a predetermined direction, and has a reflective layer and a reflection control layer; and a groove which is recessed between the grid-shaped protrusions and whose width in a direction orthogonal to the predetermined direction is reduced to zero in the depth direction. This improves transmittance and reflectance properties, thereby achieving excellent optical properties.
1. A polarizing plate comprising:
a transparent substrate that is transparent to light in a used wavelength band;
grid-shaped protrusions arranged on the transparent substrate at a pitch shorter than the wavelength of the light in the used band, extending in a predetermined direction, and having a reflective layer and a reflection suppressing layer in this order; and
a groove which is recessed in the transparent substrate between the grid-shaped protrusions to a depth of 60 nm or more and 120 nm or less and with a substantially U-shape that does not have a bottom surface, wherein
the reflection suppressing layer is a mixture of a light absorbing material and a dielectric,
the reflection suppressing layer width in a direction orthogonal to the predetermined direction becomes smaller toward the tip side,
the polarizing plate has a transmission axis reflectance of 1% or less in the green wavelength band, and
the reflection suppressing layer contains Fe or Ta with Si, and has a concentration distribution in which the concentration of Fe or Ta is inclined in the layer thickness direction.
2. The polarizing plate according to claim 1 , wherein the cross-sectional shape of the groove in a direction orthogonal to the predetermined direction is asymmetric with respect to a perpendicular line passing through a midpoint of a width at which the depth of the groove is zero.
3. The polarizing plate according to claim 1 , wherein an angle between a perpendicular line passing through a midpoint of the width at which the depth of the groove is zero and a straight line passing through a deepest point of the groove and the midpoint is between +20° and −20°.
4. An optical device equipped with the polarizing plate according to claim 1 .
5. The polarizing plate according to claim 1 , wherein the groove has a substantially U-shape, and
a width X in the direction orthogonal to the predetermined direction with respect to the depth Y of the groove satisfies:
Y =(4 D/W 2 )* X 2 −D
where the origin (0, 0) is the midpoint of the width of the groove at which the depth of the groove is zero, the grid interval is W, and the depth of the groove is D wherein 60≤D≤120.
6. The polarizing plate according to claim 1 , wherein a width of a bottom of the groove in the direction orthogonal to the predetermined direction is 10 nm or less.
7. A method of manufacturing a polarizing plate comprising:
etching a reflective layer and a reflection suppressing layer laminated on a transparent substrate that is transparent to light in a used wavelength band to form grid-shaped protrusions arranged at a pitch shorter than the wavelength of light in the used band and extending in a predetermined direction, and a groove which is recessed in the transparent substrate between the grid-shaped protrusions to a depth of 60 nm or more and 120 nm or less and with a substantially U-shape that does not have a bottom surface, wherein
the reflection suppressing layer is a mixture of a light absorbing material and a dielectric,
the reflection suppressing layer width in a direction orthogonal to the predetermined direction becomes smaller toward the tip side,
the polarizing plate has a transmission axis reflectance of 1% or less in the green wavelength band, and
the reflection suppressing layer contains Fe or Ta with Si, and has a concentration distribution in which the concentration of Fe or Ta is inclined in the layer thickness direction.
8. The method of manufacturing a polarizing plate according to claim 7 , wherein the groove has a substantially U-shape, and
a width X in the direction orthogonal to the predetermined direction with respect to the depth Y of the groove satisfies:
Y =(4 D/W 2 )* x 2 −D
where the origin (0, 0) is the midpoint of the width of the groove at which the depth of the groove is zero, the grid interval is W, and the depth of the groove is D wherein 60≤D≤120.
9. The method of manufacturing a polarizing plate according to claim 7 , wherein a width of a bottom of the groove in the direction orthogonal to the predetermined direction is 10 nm or less.
10. A polarizing plate comprising:
a transparent substrate that is transparent to light in a used wavelength band;
grid-shaped protrusions arranged on the transparent substrate at a pitch shorter than the wavelength of the light in the used band, extending in a predetermined direction, and having a reflective layer, a first dielectric layer, an absorbing layer and a second dielectric layer in this order; and
a groove which is recessed in the transparent substrate between the grid-shaped protrusions to a depth of 60 nm or more and 120 nm or less and with a substantially U-shape that does not have a bottom surface, wherein
the polarizing plate has a transmission axis reflectance of 1% or less in the green wavelength band, and
the first dielectric layer has a thickness less than the second dielectric layer.
11. The polarizing plate according to claim 10 , wherein an angle between a perpendicular line passing through a midpoint of the width at which the depth of the groove is zero and a straight line passing through a deepest point of the groove and the midpoint is between +20° and −20°.
12. The polarizing plate according to claim 10 , wherein the absorbing layer contains Fe or Ta with Si.
13. The polarizing plate according to claim 10 , wherein the groove has a substantially U-shape, and
a width X in the direction orthogonal to the predetermined direction with respect to the depth Y of the groove satisfies:
Y =(4 D/W 2 )* X 2 −D
where the origin (0, 0) is the midpoint of the width of the groove at which the depth of the groove is zero, the grid interval is W, and the depth of the groove is D wherein 60≤D≤120.
14. The polarizing plate according to claim 10 , wherein a width of a bottom of the groove in the direction orthogonal to the predetermined direction is 10 nm or less.