MEMS device with particle filter and method of manufacture

1. A method of manufacturing a MEMS sensor, the MEMS sensor comprising a carrier board with a media access opening, a MEMS chip mounted on the carrier board above the media access opening, and a film applied on a surface of the carrier board facing the MEMS chip and covering the media access opening, the method comprising the steps of:

providing the carrier board having the media access opening;

applying the film onto a top surface of the carrier board completely covering the media access opening, wherein the film consists of an organic material and is mounted on the carrier board by gluing;

providing perforations in a perforation area of the film, the perforation area extending at least partly over an area of the media access opening;

mounting the MEMS chip having a surface with a sensing area on the top surface of the carrier board such that a medium to be sensed can reach the sensing area through the media access opening,

and wherein

the film includes a polymer in a B stage acting as film and adhesive,

the film is applied by lamination, and

the film is cured after applying.

2. The method of claim 1 ,

wherein the film is applied to the entire top surface of the carrier board

wherein the film, after applying, is structured to be restricted in area to the area of the media access opening on the top surface plus a margin area around a perimeter of the media access opening,

wherein the film is glued to the top surface of the carrier board in the margin area,

wherein forming the perforations and structuring the film are performed in the same step with the same method.

3. The method of claim 1 ,

wherein the film is applied to the entire top surface of the carrier board

wherein the film, after applying, is structured to be restricted in area to the area of the media access opening on the top surface plus a margin area around a perimeter of the media access opening,

wherein the film is glued to the top surface of the carrier board in the margin area,

wherein the perforations are at first preformed as blind holes,

wherein a plasma etching step is performed later to etch the blind holes until the perforations are through-going through the film.

4. The method of claim 1 , wherein a laser is used for structuring the film and for forming the perforations or blind holes.

5. The method of claim 1 , further comprising

applying a metal layer to an entire surface of the film,

forming blind holes at least through the metal layer to form an etch mask for the later forming of perforations by etching.

6. The method of claim 1 , wherein a photolithographical structuring is used for forming the perforations and/or structuring the film.

7. The method of claim 1 , wherein the mounting the MEMS chip to the carrier board comprises soldering or gluing, and wherein, after mounting thereof, the MEMS chip is sealed to the top surface of the carrier board by a sealing to enclose a volume between MEMS chip, sealing and the carrier board, wherein the perforation area is completely arranged within said volume.

8. The method of claim 1 , wherein a package is formed by applying a cap over the MEMS chip and sealing it to the top surface of the carrier board thereby enclosing the MEMS chip and at least another chip necessary for the operation of the MEMS chip between the cap and the carrier board.

9. The method of claim 1 , wherein the material of the film includes polymer, polyimide foil, aromatic polyamides polymer foil, or metal foil.

10. The method of claim 1 , wherein the film has a thickness of about 1 μm to 10 μm in the area of the media access opening.

11. The method of claim 1 , wherein the perforations include a plurality of holes arranged in a regular pattern to provide an area ratio of perforations relative to the perforation area of 30% or more or 50% or more, each of the plurality of holes having a diameter of 2 μm to 10 μm.

12. The method of claim 1 , wherein the MEMS chip has a sensing surface, and wherein the MEMS chip is mounted to the carrier board above the film thereby keeping a distance between the perforation area of the film and the sensing surface of at least 10 μm or at least 50 μm.

13. The method of claim 1 , wherein the MEMS chip is mounted to the carrier board in a flip-chip assembly.

14. The method of claim 1 ,

wherein the carrier board has a multilayer structure of at least two dielectric layers sandwiching a wiring layer therebetween;

wherein the media access opening is structured individually in at least one layer;

wherein one of the dielectric layers includes one or more throughgoing holes in the area of the media access opening to provide a filter grid spanning across the media access opening;

wherein the diameter of the holes of the filter grid is at least 10 times greater than the diameter of the perforations.

15. A method of manufacturing a MEMS sensor, the MEMS sensor comprising a carrier board with a media access opening, a MEMS chip mounted on the carrier board above the media access opening, and a film applied on a top surface of the carrier board facing the MEMS chip and covering the media access opening, the method comprising the steps of:

providing the carrier board having the media access opening;

applying the film onto a top surface of the carrier board completely covering the media access opening;

providing perforations in a perforation area of the film, the perforation area extending at least partly over an area of the media access opening;

mounting the MEMS chip having a surface with a sensing area on the top surface of the carrier board such that a medium to be sensed can reach the sensing area through the media access opening,

and wherein the film is applied to the entire top surface of the carrier board,

wherein the film, after applying, is structured to be restricted in area to the area of the media access opening on the top surface plus a margin area around a perimeter of the media access opening,

wherein the film is glued to the top surface of the carrier board in the margin area,

wherein providing the perforations and structuring the film are performed in the same step with the same method.

16. A method of manufacturing a MEMS sensor, the MEMS sensor comprising a carrier board with a media access opening, a MEMS chip mounted on the carrier board above the media access opening, and a film applied on a top surface of the carrier board facing the MEMS chip and covering the media access opening, the method comprising the steps of:

providing the carrier board having the media access opening;

applying the film onto the top surface of the carrier board completely covering the media access opening;

providing perforations in a perforation area of the film, the perforation area extending at least partly over an area of the media access opening;

mounting the MEMS chip having a surface with a sensing area on the top surface of the carrier board such that a medium to be sensed can reach the sensing area through the media access opening,

and wherein the film is applied to the entire top surface of the carrier board,

wherein the film, after applying, is structured to be restricted in area to the area of the media access opening on the top surface plus a margin area around a perimeter of the media access opening,

wherein the film is glued to the top surface of the carrier board in the margin area,

wherein the perforations are at first preformed as blind holes, and

wherein a plasma etching step is performed later to etch the blind holes until the perforations are through-going through the film.