Method for bonding substrates
A method for bonding a first substrate to a second substrate on mutually facing contact surfaces of the substrates, wherein the first substrate is mounted on a first chuck and the second substrate is mounted on a second chuck, and wherein a plate is arranged between the second substrate and the second chuck, wherein the second substrate with the plate is deformed with respect to the second chuck before and/or during the bonding. Furthermore, the present invention relates to a corresponding device and a corresponding plate.
1. A method for bonding a first substrate to a second substrate on mutually facing contact surfaces of the first and second substrates, said method comprising:
mounting the first substrate on a first chuck;
mounting the second substrate on a second chuck;
arranging a first plate between the second substrate and the second chuck;
arranging a second plate between the first substrate and the first chuck; and
bonding the first substrate to the second substrate,
wherein the second substrate with the first plate is deformed with respect to the second chuck before and/or during said bonding,
wherein the first substrate with the second plate is deformed with respect to the first chuck before and/or during said bonding, and
wherein at least one of the first and second plates is fixed by first fixing means respectively arranged on a circumference of the first and second chucks.
2. The method according to claim 1 , wherein the deformation of the second substrate with the first plate is set and/or controlled prior to a contacting of the mutually facing contact surfaces mirror symmetrically and/or concentrically to the mutually facing contact surfaces.
3. The method according to claim 1 , wherein the deformation of the second substrate with the first plate and/or the deformation of the first substrate with the second plate is respectively set and/or controlled by a bending means loading the first plate and/or the second plate.
4. The method according to claim 3 , further comprising:
fluid-pressure loading for the deformation of second substrate with the first plate and/or the deformation of the first substrate with the second plate.
5. The method according to claim 1 , in which at least one of the first and second substrates is fixed by second fixing means respectively arranged on the first and second plates, connected to the first fixing means on the first and second chuck.
6. The method according to claim 1 , further comprising:
detecting the deformation of at least of one of the first and second substrates and/or at least one of the first and second plates by use of curvature measuring means.
7. The method according to claim 1 , wherein the deformation of the first substrate with the second plate is set and/or controlled prior to a contacting of the mutually facing contact surfaces mirror symmetrically and/or concentrically to the mutually facing contact surfaces.
8. The method according to claim 1 , wherein the first fixing means is arranged annularly.
9. The method according to claim 8 , where the first fixing means is arranged in a ring-shaped manner.
10. The method according to claim 1 , wherein the first fixing means is arranged exclusively in a region of a circumferential edge of the first and second plates.