Fluid control device

1. A fluid control device comprising:

a plurality of fluid heating sections connected to each other and each provided with a flow path or a fluid accommodation portion inside, the plurality of fluid heating sections including a vaporizing section, a preheating section disposed adjacent to the vaporizing section for preheating a liquid to be supplied to the vaporizing section, and a fluid control measurement section disposed adjacent to the vaporizing section for controlling or measuring a gas delivered from the vaporizing section;

heaters each configured to heat each of the plurality of fluid heating sections to different temperatures;

a heat insulating member disposed between the preheating section and the vaporizing section;

a stop valve provided downstream of the fluid control measurement section; and

a further heat insulating member provided outside the stop valve and disposed between a valve downstream flow path of the stop valve and a valve upstream flow path of the stop valve;

wherein the heaters are configured to heat corresponding fluid heating sections from outside.

2. The fluid control device according to claim 1 , wherein the heaters include a first heater disposed at a distance from the preheating section for heating the preheating section from outside; a second heater disposed at a distance from the vaporizing section for heating the vaporizing section from outside; and a third heater disposed at a distance from the fluid control measurement section for heating the fluid control measurement section from outside; and the first, second, and third heaters are configured to independently heat the preheating section, the vaporizing section, and the fluid control measurement section respectively.

3. The fluid control device according to claim 2 , wherein a gap is provided between the first heater and the second heater, and the heat insulating member is provided at a position of the gap between the first heater and the second heater.

4. The fluid control device according to claim 1 , wherein the further heat insulating member is disposed so as to be straddled by the stop valve.

5. The fluid control device according to claim 1 , further comprising a liquid filling valve provided in a flow path between the preheating section and the vaporizing section, wherein the heat insulating member is disposed so as to be straddled by the liquid filling valve.

6. The fluid control device according to claim 1 , wherein there is no heat insulating member between the vaporizing section and the fluid control measurement section.

7. The fluid control device according to claim 1 , wherein each of the heaters comprises a heating element and a heat transfer member thermally connected to the heating element, and each heating element includes a rod shaped cartridge heater inserted into an elongated hole formed in the corresponding heat transfer member.

8. The fluid control device according to claim 1 , wherein each of the heaters includes a heating element and a heat transfer member thermally connected to the heating element, and each heat transfer member has an inner surface facing the corresponding heating section, the inner surface being treated for improving heat dissipation.

9. The fluid control device according to claim 8 , wherein each heat transfer member comprises an aluminum or an aluminum alloy, and the inner surface of the heat transfer member includes an anodized surface.

10. The fluid control device according to claim 9 , wherein each heat transfer member has an outer surface located opposite side of the inner surface, and the outer surface includes a polished surface or a mirror finished surface.