Bath and method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy
An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising a source of nickel ions, and optionally a source of ions of at least one alloying metal, at least one buffering agent, at least one of a dimer of a compound of formula (I) or mixtures thereof wherein R 1 is a substituted or unsubstituted alkenyl group, R 2 may be present or not, and if present R 2 is a —(CH 2 ) n —SO 3 − group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the group may be replaced by a substituent, preferably hydroxide; and a method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy with said aqueous bath.
1. An aqueous bath comprising
a source of nickel ions, and optionally a source of ions of at least one alloying metal,
at least one buffering agent,
at least one of a dimer of a compound of formula (I) or mixtures thereof
wherein
R 1 is a substituted or unsubstituted alkenyl group,
R 2 may be present or not, so that the nitrogen may be positively charged or not, and R 2 , if present, is a —(CH 2 ) n —SO 3 − group, wherein n is an integer in the range of 1-6, wherein one or more of the hydrogens in the —(CH 2 ) n —SO 3 − group may be replaced by a substituent,
wherein the at least one of a dimer of a compound of formula (I) or mixtures thereof comprises a compound of formula (II)
2. The aqueous bath of claim 1 , wherein the total concentration of the at least one of a dimer is 1-10000 mg/L.
3. The aqueous bath of claim 1 , wherein the alloying metal is selected from cobalt or iron or a combination thereof.
4. An aqueous bath comprising
a source of nickel ions, and optionally a source of ions of at least one alloying metal,
at least one buffering agent,
at least one of a dimer of a compound of formula (I) or mixtures thereof
wherein
R 1 is a substituted or unsubstituted alkenyl group,
R 2 may be present or not, so that the nitrogen may be positively charged or not, and R 2 , if present, is a —(CH 2 ) n —SO 3 − group, wherein n is an integer in the range of 1-6, wherein one or more of the hydrogens in the —(CH 2 ) n —SO 3 − group may be replaced by a substituent,
wherein the compound of formula (I) comprises a compound of formula (III)
5. The aqueous bath of claim 4 , wherein the dimer of the compound of formula (III) is a compound of formula (IV)
6. The aqueous bath of claim 4 , wherein the total concentration of the at least one of a dimer is 1-10000 mg/L.
7. The aqueous bath of claim 4 , wherein the alloying metal is selected from cobalt or iron or a combination thereof.
8. A compound of formula (II)
wherein R 2 is a —(CH 2 ) n —SO 3 − group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the —(CH 2 ) n —SO 3 − group may be replaced by a substituent.
9. The compound of claim 8 , which is a compound of formula (IV)