Glassy carbon probe and microfabrication method
A probe device is disclosed that includes one or more insulating layers and a glassy carbon layer. The glassy carbon layer includes one or more channels. Each channel includes a microstructure, which may include an electrode region, interconnect region, and bump pad region. The electrode region may be placed in contact with a human or animal patient or test subject and used to collect or deliver signals in applications such as electrocorticography (ECoG), electromyography (EMG), and neural stimulation. A method of making a probe includes depositing a glassy carbon precursor on a substrate, patterning the precursor using photolithography, pyrolyzing the precursor to allow the formation of glassy carbon, and depositing one or more insulating layers.
1. A probe comprising:
a first insulating layer; and
a glassy carbon layer on at least a portion of the first insulating layer;
wherein the glass carbon layer provides one or more channels to enable acquisition of one or more signals, each of the one or more channels comprising a microstructure,
wherein the microstructure comprises a bump pad, an interconnect defining a trace, and an electrode,
wherein an upper surface of the bump pad, an upper surface of the interconnect, and an upper surface of the electrode are disposed on a same plane that forms a surface of the glass carbon layer, and
wherein the glassy carbon layer including the bump pad, the interconnect, and the electrode are composed of glassy carbon.
2. The probe of claim 1 further comprising:
a second insulating layer on at least a portion of the glassy carbon layer, the second layer is layered over the interconnect, wherein the second insulating layer is not layered over the bump pad and the electrode.
3. The probe of claim 1 , wherein the one or more channels comprises a plurality of channels to form an array of electrodes, each of the plurality of channels comprises a respective microstructure.
4. The probe of claim 1 , wherein the bump pad is configured as an interface to enable the probe to be coupled to at least an external device.
5. The probe of claim 1 , wherein the microstructure comprising the bump pad, the interconnect, and the electrode are formed from a same layer of precursor material during pyrolysis.
6. The probe of claim 3 , wherein the array of electrodes is configured as a microarray.
7. The probe of claim 1 , wherein the electrode is sized between 1 square nanometer and 1 square meter to enable the electrode to make contact with at least a portion of a patient or test subject.
8. The probe of claim 1 further comprising:
a device coupled to the probe, the device delivering and/or receiving, via at least the microstructure, the one or more signals to the probe.
9. The probe of claim 8 , wherein the device is configured to provide electrocorticography, electroencephalography, neural stimulation, or electromyography.
10. The probe of claim 1 , wherein the glassy carbon is formed from patterned pyrolysed carbon.
11. The probe of claim 1 , wherein the glassy carbon layer is positioned between the first insulating layer and a second insulating layer.
12. The probe of claim 2 , wherein the first insulating layer is positioned on a first side of the interconnect, and wherein the second insulating layer is layered over a second side of the interconnect opposite the first side.
13. The probe of claim 1 , wherein each of the bump pad, the interconnect, and the electrode does not include metal.