IP Library Granted Patent US 11,688,996
Granted Patent B2
US 11,688,996 · App. 16/648,171 · Granted Jun 27, 2023

Semiconductor multilayer structure

Inventors: Arto Aho (Lempäälä, FI); Riku Isoaho (Tampere, FI); Antti Tukiainen (Tampere, FI); Mircea Dorel Guina (Tampere, FI); Jukka Viheriälä (Lempäälä, FI)
Assignee: Tampere University Foundation, sr.
H01S5/32316H01L23/562H01L29/205H01L29/7786H01S5/021H01S5/125H01S5/3201
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,688,996
App. No.
16/648,171
Granted
Jun 27, 2023
Kind
B2
Abstract

A semiconductor device includes a substrate comprising a layer made of Ge and a semiconductor multilayer structure grown on the layer made of Ge. The semiconductor multilayer structure includes at least one first layer comprising a material selected from a group consisting of Al x Ga 1-x As, Al x Ga 1-x-y In y As, Al x Ga 1-x-y In y As 1-z P z , Al x Ga 1-x-y In y As 1-z N z , and Al x Ga 1-x-y In y As 1-z-c N z P c , Al x Ga 1-x-y In y As 1-z-c N z Sb c , and Al x Ga 1-x-y In y As 1-z-c P z Sb c , wherein for any material a sum of the contents of all group-III elements equals 1 and a sum of the contents of all group-V elements equals 1. The semiconductor multilayer structure also includes at least one second layer comprising a material selected from a group consisting of GaInAsNSb, GaInAsN, AlGaInAsNSb, AlGaInAsN, GaAs, GaInAs, GaInAsSb, GaInNSb, GaInP, GaInPNSb, GaInPSb, GaInPN, AlInP, AlInPNSb, AlInPN, AlInPSb, AlGaInP, AlGaInPNSb, AlGaInPN, AlGaInPSb, GaInAsP, GaInAsPNSb, GaInAsPN, GaInAsPSb, GaAsP, GaAsPNSb, GaAsPN, GaAsPSb, AlGaInAs and AlGaAs.

Claims (38)

1. A semiconductor device comprising:

a substrate comprising a layer made of Ge; and

a semiconductor multilayer structure comprising:

at least one first layer comprising a material selected from a group consisting of:

Al x Ga 1-x As, wherein x is approximately 0.6,

Al x Ga 1-x-y In y As, wherein 0≤x≤0.6 and 0≤y≤0.02,

Al x Ga 1-x-y In y As 1-z P z , Al x Ga 1-x-y In y As 1-z N z , and Al x Ga 1-x-y In y As 1-z-c N z P c , wherein 0≤x<1, 0≤y<1, 0≤z≤0.3, and 0≤c<1,

Al x Ga 1-x-y In y As 1-z-c N z Sb c , wherein 0≤x<1, 0≤y<1, 0≤z≤0.3, and 0≤c≤0.7, and

Al x Ga 1-x-y In y As 1-z-c P z Sb c , wherein 0≤x<1, 0≤y<1, 0≤z<1, and 0≤c≤0.3, wherein for any material a sum of the contents of all group-III elements equals 1 and a sum of the contents of all group-V elements equals 1; and

at least one second layer comprising a material selected from a group consisting of GaInAsNSb, GaInAsN, AlGaInAsNSb, AlGaInAsN, GaAs, GaInAs, GaInAsSb, GaInNSb, GaInP, GaInPNSb, GaInPSb, GaInPN, AlInP, AlInPNSb, AlInPN, AlInPSb, AlGaInP, AlGaInPNSb, AlGaInPN, AlGaInPSb, GaInAsP, GaInAsPNSb, GaInAsPN, GaInAsPSb, GaAsP, GaAsPNSb, GaAsPN, GaAsPSb, AlGaInAs and AlGaAs, wherein for any material a sum of the contents of all group-III elements equals 1 and a sum of the contents of all group-V elements equals 1;

wherein the semiconductor multilayer structure is grown on the layer made of Ge;

wherein the at least one first layer of the semiconductor multilayer structure has a lattice constant, which differs from a lattice constant of the Ge layer of the substrate by less than a difference between a lattice constant of GaAs and a lattice constant of Ge.

2. The semiconductor device of claim 1 , wherein:

the at least one first layer comprises a plurality of first layers;

the at least one second layer comprises a plurality of second layers; and

the semiconductor multilayer structure is an optoelectronic semiconductor multilayer structure comprising:

the plurality of first layers forming inactive layers, and

the plurality of second layers forming active layers.

3. The semiconductor device of claim 2 , wherein:

the semiconductor multilayer structure is a heterostructure forming a laser gain structure.

4. The semiconductor device of claim 2 , wherein:

the optoelectronic semiconductor multilayer structure comprises a distributed Bragg reflector comprising a plurality of layers of an AlGaAs-based material.

5. The semiconductor device of claim 1 , wherein:

the at least one first layer of the semiconductor multilayer structure comprises a Al x Ga 1-x As material fulfilling one of the following conditions:

x is approximately 0.6 and the material is Al x Ga 1-x As;

0<x≤0.6 and the material is Al x Ga 1-x-y In y As, wherein 0<y≤0.02; or

x>0.6 and the material is selected from a group consisting of Al x Ga 1-x-y In y As z P 1-z , Al x Ga 1-x-y In y As 1-z N z , and Al x Ga 1-x-y In y As 1-z-c N z P c , wherein 0<y≤0.02, 0<z≤0.3, and 0<c<1.

6. The semiconductor device of claim 1 , wherein:

the substrate comprises at least one additional layer of a material selected from a group consisting of Si, SiGe and Ge.

7. The semiconductor device of claim 6 , wherein:

the Ge layer is strain relaxed with respect to the at least one additional layer of the substrate.

8. The semiconductor device of claim 7 , wherein:

the Ge layer is compressively strained with respect to the at least one additional layer of the substrate and the substrate further comprises a strain compensation layer; and

the strain compensation layer is grown in direct contact with the Ge layer either between the Ge layer and the semiconductor multilayer structure or between the Ge layer and another layer of the substrate.

9. The semiconductor device of claim 6 , wherein:

a microelectronic device is manufactured on the at least one additional layer of the substrate.

10. The semiconductor device of claim 1 , wherein:

the semiconductor multilayer structure is a transistor.

Assignments (2)
MERGER Recorded Feb 19, 2021
From: TTY-SÄÄTIÖ SR
To: TAMPERE UNIVERSITY FOUNDATION SR
Reel/Frame 055343/0675 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 17, 2020
From: AHO, ARTO; ISOAHO, RIKU; TUKIAINEN, ANTII; GUINA, MIRCEA DOREL; VIHERIÄLÄ, JUKKA
To: TTY-SÄÄTIÖ SR
Reel/Frame 052968/0646 →
Continuity (2)
Related Publication 20200266610A1 · Aug 20, 2020
Related Publication 20220021188A2 · Jan 20, 2022