Semiconductor device to suppress electric field concentration on insulating protection film
A semiconductor device includes a semiconductor substrate that includes an element region and a peripheral withstand voltage region. An insulating protection film is provided above the peripheral withstand voltage region. The peripheral withstand voltage region includes a plurality of guard ring regions of p-type in direct contact with the insulating protection film and a drift region of n-type separating the guard ring regions from each other. Each guard ring region includes a guard ring low concentration region being in direct contact with the insulating protection film and a guard ring high concentration region having a p-type impurity concentration equal to or more than ten times as high as that in the corresponding guard ring low concentration region. Each guard ring high concentration region is provided under the corresponding guard ring low concentration region, and separated from the insulating protection film by the corresponding guard ring low concentration region.
1. A semiconductor device, comprising:
a semiconductor substrate;
an insulating protection film;
an upper electrode; and
a lower electrode,
wherein
the semiconductor substrate comprises:
an element region; and
a peripheral withstand voltage region provided around the element region,
the upper electrode is provided above the element region,
the insulating protection film is provided above the peripheral withstand voltage region,
the lower electrode is provided below the semiconductor substrate,
the element region comprises an element capable of allowing a current to flow between the upper electrode and the lower electrode,
the peripheral withstand voltage region comprises a plurality of guard ring regions of p-type and a drift region of n-type separating the guard ring regions from each other,
each of the guard ring regions comprises a guard ring low concentration region being in direct contact with the insulating protection film and a guard ring high concentration region, and
each of the guard ring high concentration regions is provided under the corresponding guard ring low concentration region, comprises a p-type impurity concentration equal to or more than ten times as high as that in the corresponding guard ring low concentration region, and is separated from the insulating protection film by the corresponding guard ring low concentration region.
2. The semiconductor device of claim 1 , wherein
the element region comprises an element p-type region being in direct contact with the upper electrode,
the drift region extends into the element region and is in direct contact with the element p-type region from below, and
the element p-type region comprises an element low concentration region being in direct contact with the upper electrode and an element high concentration region provided between the element low concentration region and the drift region and comprising a p-type impurity concentration equal to or more than ten times as high as that in the element low concentration region.
3. The semiconductor device of claim 2 , wherein a thickness of the element low concentration region is substantially same as a thickness of the guard ring low concentration regions.
4. The semiconductor device of claim 2 , wherein a thickness of the element high concentration region is substantially same as a thickness of the guard ring high concentration regions.
5. A method of manufacturing the semiconductor device of claim 2 , the method comprising:
forming the guard ring high concentration regions and the element high concentration region by p-type impurity implantation or epitaxial growth; and
forming the guard ring low concentration regions and the element low concentration region by p-type impurity implantation or epitaxial growth.
6. A method of manufacturing the semiconductor device of claim 1 , the method comprising:
forming the guard ring high concentration regions by p-type impurity implantation or epitaxial growth; and
forming the guard ring low concentration regions by p-type impurity implantation or epitaxial growth.
7. The semiconductor device of claim 1 , wherein in a plan view of an upper surface of the semiconductor substrate, each of the guard ring regions comprises a ring shape surrounding a periphery of the element region.
8. The semiconductor device of claim 1 , wherein:
the semiconductor substrate comprises a drain region of n-type comprising an n-type impurity concentration higher than an n-type impurity concentration in the drift region, extending continuously from the element region to the peripheral withstand voltage region, and being ohmic contact with the lower electrode in both of the element region and the peripheral withstand voltage region; and
the drift region extends continuously from the element region to the peripheral withstand voltage region, is provided on the drain region in both of the element region and the peripheral withstand voltage region, and separates the guard ring regions from the drain region.