Microelectronic devices with conductive contacts to silicide regions, and related devices
Microelectronic devices—having at least one conductive contact structure adjacent a silicide region—are formed using methods that avoid unintentional contact expansion and contact reduction. A first metal nitride liner is formed in a contact opening, and an exposed surface of a polysilicon structure is thereafter treated (e.g., cleaned and dried) in preparation for formation of a silicide region. During the pretreatments (e.g., cleaning and drying), neighboring dielectric material is protected by the presence of the metal nitride liner, inhibiting expansion of the contact opening. After forming the silicide region, a second metal nitride liner is formed on the silicide region before a conductive material is formed to fill the contact opening and form a conductive contact structure (e.g., a memory cell contact structure, a peripheral contact structure).
1. A microelectronic device, comprising:
at least one conductive contact structure over a metal silicide material, the at least one conductive contact structure extending through at least one dielectric material;
a first metal nitride liner on vertical sidewalls of the at least one conductive contact structure, the metal silicide material extending under the first metal nitride liner, the first metal nitride liner being directly adjacent the at least one dielectric material; and
a second metal nitride liner between the at least one conductive contact structure and the metal silicide material.
2. The microelectronic device of claim 1 , wherein the first metal nitride liner does not extend under the at least one conductive contact structure.
3. The microelectronic device of claim 1 , wherein:
the metal silicide material comprises cobalt silicide;
the first metal nitride liner and the second metal nitride liner comprise titanium nitride; and
the at least one conductive contact structure comprises tungsten.
4. The microelectronic device of claim 1 , wherein the second metal nitride liner extends from and between the at least one conductive contact structure and the metal silicide material.
5. The microelectronic device of claim 1 , wherein the microelectronic device comprises a dynamic random access memory device.
6. The microelectronic device of claim 1 , wherein an upper longitudinal end of the first metal nitride liner is directly laterally between the second metal nitride liner and the at least one dielectric material.
7. The microelectronic device of claim 1 , wherein a lower longitudinal end of the first metal nitride liner is directly laterally between the second metal nitride liner and the at least one dielectric material.
8. The microelectronic device of claim 1 , wherein the at least one dielectric material is in direct contact with the metal silicide material.
9. A microelectronic device, comprising:
a conductive contact structure laterally adjacent an electrically insulated conductive region, the conductive contact structure extending through at least one dielectric material;
a silicide region under the conductive contact structure;
a single metal nitride liner directly between the silicide region and the conductive contact structure; and
an additional metal nitride liner laterally surrounding the conductive contact structure and laterally adjacent the single metal nitride liner, the additional metal nitride liner being in direct contact with the at least one dielectric material,
wherein the silicide region extends under the additional metal nitride liner.