IP Library Granted Patent US 11,171,104
Granted Patent B2
US 11,171,104 · App. 16/662,293 · Granted Nov 9, 2021

IC chip package with dummy solder structure under corner, and related method

Inventors: Manish Nayini (Wappingers Falls, NY); Richard S. Graf (Gray, ME); Janak G. Patel (South Burlington, VT); Nazmul Habib (Colchester, VT)
Assignee: MARVELL ASIA PTE, LTD.
H01L24/14B23K1/0008H01L21/4853H01L21/563H01L23/3157H01L23/49805H01L23/49816H01L23/49838H01L24/13H01L24/16H01L24/81B23K2101/40H01L2224/13211H01L2224/13239H01L2224/13247H01L2224/1403H01L2224/14517H01L2224/16227H01L2224/81125H01L2224/81815H01L2924/014H01L2924/0105H01L2924/01029H01L2924/01047H01L2924/15321H01L2924/18161H01L2924/35121
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Quick Facts
Patent No.
US 11,171,104
App. No.
16/662,293
Granted
Nov 9, 2021
Kind
B2
Abstract

An IC chip package includes a substrate having a plurality of interconnect metal pads, and a chip having a plurality of interconnect metal pads arranged thereon. An interconnect solder structure electrically connects each of the plurality of interconnect metal pads. The chip is devoid of the interconnect solder structures and interconnect metal pads at one or more corners of the chip. Rather, a dummy solder structure connects the IC chip to the substrate at each of the one or more corners of the IC chip, and the dummy solder structure is directly under at least one side of the IC chip at the one or more corners of the IC chip. The dummy solder structure has a larger volume than a volume of each of the plurality of interconnect solder structures. The dummy solder structure eliminates a chip-underfill interface at corner(s) of the chip where delamination would occur.

Claims (50)

1. A method, comprising:

forming a first plurality of interconnect metal pads on an integrated circuit (IC) chip, except at one or more corners of the IC chip, and forming a first mounting metal pad in the one or more corners of the IC chip;

forming a plurality of interconnect solder structures on the first plurality of interconnect metal pads on the IC chip, wherein the IC chip is devoid of the interconnect solder structures at the one or more corners of the IC chip;

forming on a substrate:

a second plurality of interconnect metal pads configured to couple with the first plurality of interconnect metal pads on the IC chip using the plurality of interconnect solder structures, and

a second mounting metal pad at one or more locations of the substrate that are configured to align with a respective one of the first mounting metal pads, each of the second mounting metal pads having a larger area than each of the first and second plurality of interconnect metal pads;

forming a dummy solder structure on each of the second mounting metal pads on the substrate, each of the dummy solder structures being larger in area than each of the interconnect solder structures;

mounting the IC chip to the substrate, resulting in the plurality of interconnect solder structures interconnecting the first and second plurality of interconnect metal pads and the dummy solder structure interconnecting the one or more corners of the IC chip to the substrate; and

forming an underfill extending between the IC chip and the substrate and into an area surrounding the interconnect solder structures and the dummy solder structure, wherein the dummy solder structure prevents the underfill from being disposed under a respective one of the corners of the IC chip.

2. The method of claim 1 , wherein forming the first plurality of interconnect metal pads and the first mounting metal pad on the IC chip includes:

forming a first mask over a seed layer on the IC chip, the first mask including a first set of openings exposing areas for the first plurality of interconnect metal pads and a second set of larger openings exposing areas for the first mounting metal pads,

forming the first plurality of interconnect metal pads and the first mounting metal pads in the first set of openings and the second set of larger openings, and

removing the first mask; and

wherein forming the plurality of interconnect solder structures includes:

forming a second mask over a surface of the IC chip, the second mask covering the first mounting metal pads and including a third set of openings exposing the first plurality of interconnect metal pads,

forming the plurality of interconnect solder structures in the third set of openings, and removing the second mask.

3. The method of claim 1 , wherein forming the first plurality of interconnect metal pads and the first mounting metal pad on the IC chip includes:

forming a first mask over a seed layer on the IC chip, the first mask including a first set of openings exposing areas for the first mounting metal pads,

forming the first mounting metal pads in the first set of openings using the first mask, and

removing the first mask; and

wherein forming the plurality of interconnect solder structures includes:

forming a second mask on the IC chip, the second mask covering the first mounting metal pads and including a second set of openings exposing areas for the first plurality of interconnect metal pads and the plurality of interconnect solder structures, wherein each of the second set of openings is smaller than each of the first set of openings in the first mask,

forming the first plurality of interconnect metal pads and the plurality of interconnect solder structures in the second set of openings, and

removing the second mask.

4. The method of claim 1 , wherein forming the first mounting metal pad in each of the one or more corners of the IC chip occurs prior to dicing the IC chip from a wafer, and also includes forming the first mounting metal pad in a dicing channel on the wafer, and

wherein the first mounting metal pad extends through a side of the IC chip after dicing the IC chip from the wafer.

5. The method of claim 1 , wherein forming the first and second mounting metal pads includes forming the first and second mounting metal pads with larger area than each of the first and second plurality of interconnect metal pads.

6. The method of claim 1 , wherein the dummy solder structure includes a first solder material that is softer than a different, second solder material of each of the plurality of interconnect solder structures.

7. The method of claim 1 , wherein the dummy solder structure at the one or more corners of the IC chip extends laterally outward beyond at least one side of the IC chip.

8. The method of claim 1 , wherein the dummy solder structure has a larger volume than a volume of each of the plurality of interconnect solder structures.

9. An integrated circuit (IC) chip package, comprising:

a substrate having a first plurality of interconnect metal pads and a first plurality of mounting metal pads arranged thereon, the first plurality of interconnect metal pads electrically connected to internal wiring of the substrate, and the first plurality of mounting metal pads not electrically connected to the internal wiring of the substrate;

an integrated circuit (IC) chip having a second plurality of interconnect metal pads and a second plurality of mounting metal pads arranged thereon, the second plurality of interconnect metal pads electrically connected to internal wiring of the IC chip, and the second plurality of mounting metal pads not electrically connected to the internal wiring of the IC chip;

an interconnect solder structure connecting each of the first and second plurality of interconnect metal pads, the IC chip being devoid of the interconnect solder structures at one or more corners of the IC chip;

a dummy solder structure connecting the first and second plurality of mounting metal pads;

and

an underfill extending between the IC chip and the substrate and into an area surrounding the interconnect solder structures and the dummy solder structure, wherein the dummy solder structure prevents the underfill from being disposed under a respective one of the corners of the IC chip.

10. The IC chip package of claim 9 , wherein the dummy solder structure is directly under at least one side of the IC chip at the one or more corners of the IC chip, and wherein at least one dummy solder structure extends laterally outward beyond the at least one side of the IC chip.

11. The IC chip package of claim 9 , wherein the dummy solder structure includes a first solder material that is softer than a different, second solder material of the interconnect solder structures.

12. The IC chip package of claim 9 , wherein each dummy solder structure and each interconnect solder structure includes one of a tin-silver alloy and copper.

13. The IC chip package of claim 9 , wherein the dummy solder structure has a larger volume than a volume of each of the interconnect solder structures.

14. The IC chip package of claim 9 , further comprising:

a first mounting metal pad in the one or more corners of the IC chip, the first mounting metal pad configured to couple to the dummy solder structure; and

a second mounting metal pad on the substrate, the second mounting metal pad configured to couple to the dummy solder structure,

wherein the dummy solder structure mechanically couples respective first and second mounting metal pads together, and

wherein each of the first and second mounting metal pads are larger in area than each of the first and second plurality of interconnect metal pads.

15. The IC chip package of claim 14 , wherein the dummy solder structure is directly under at least one side of the IC chip at the one or more corners of the IC chip, and wherein the second mounting metal pad on the substrate extends laterally beyond the at least one side of the IC chip.

16. The IC chip package of claim 14 , wherein the dummy solder structure and respective first and second mounting metal pads are electrically inactive, and each interconnect solder structure and respective interconnect metal pad are electrically active.

17. The IC chip package of claim 14 , wherein the first mounting metal pad in the one or more corners of the IC chip is in an area adjacent a dicing channel of the IC chip.

18. The IC chip package of claim 14 , wherein the first mounting metal pad extends through a side of the IC chip.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 6, 2020
From: MARVELL INTERNATIONAL LTD.
To: CAVIUM INTERNATIONAL
Reel/Frame 053987/0949 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 6, 2020
From: CAVIUM INTERNATIONAL
To: MARVELL ASIA PTE, LTD.
Reel/Frame 053988/0195 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 10, 2019
From: GLOBALFOUNDRIES, INC.
To: MARVELL INTERNATIONAL LTD.
Reel/Frame 051229/0096 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 20, 2019
From: GLOBALFOUNDRIES, INC.
To: MARVELL INTERNATIONAL LTD.
Reel/Frame 051061/0681 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2019
From: NAYINI, MANISH; GRAF, RICHARD S.; PATEL, JANAK G.; HABIB, NAZMUL
To: GLOBALFOUNDRIES INC.
Reel/Frame 050813/0911 →
Cited By (1)
US 12,324,361