Silicon carbide field-effect transistors

1. A silicon carbide (SiC) field-effect transistor (FET) comprising:

a substrate of a first conductivity type;

a drift region of the first conductivity type disposed on the substrate;

a spreading layer of the first conductivity type disposed in the drift region;

a body region of a second conductivity type disposed in the spreading layer;

a source region of the first conductivity type disposed in the body region;

a spacer layer of the first conductivity type disposed on the source region the body region and the spreading layer;

a lateral channel region of the first conductivity type disposed in the spacer layer; and

a gate structure including:

an aluminum nitride (AlN) layer disposed on the lateral channel region; and

an aluminum gallium nitride (AlGaN) layer of the second conductivity type disposed on the AlN layer.

2. The SiC FET of claim 1 , wherein the lateral channel region is configured to be pinched off under a zero-bias condition of the gate structure.

3. The SiC FET of claim 1 , wherein the AlN layer has a thickness between 1 nanometer (nm) and 30 nm.

4. The SiC FET of claim 1 , wherein the drift region is an epitaxial SiC drift region.

5. The SiC FET of claim 1 , wherein the spacer layer is a regrown SiC layer.

6. The SiC FET of claim 1 , wherein the lateral channel region has a depth of less than 20 nanometers (nm).

7. The SiC FET of claim 1 , wherein the AlGaN layer has a magnesium doping concentration of greater than or equal to 1×10 18 cm −3 .

8. The SiC FET of claim 1 , wherein the gate structure further includes:

a gallium nitride (GaN) layer of the second conductivity type disposed on the AlGaN layer; and

a metal gate electrode disposed on the GaN layer, the metal gate electrode defining an Ohmic contact with the GaN layer.

9. The SiC FET of claim 1 , wherein the gate structure further includes:

a gallium nitride (GaN) layer of the second conductivity type disposed on the AlGaN layer;

a GaN layer of the first conductivity type disposed on the GaN layer of the second conductivity type, the GaN layer of the first conductivity type defining a tunnel contact with the GaN layer of the second conductivity type; and

a metal gate electrode disposed on the GaN layer of the first conductivity type, the metal gate electrode defining an Ohmic contact with the GaN layer of the first conductivity type.

10. The SiC FET of claim 1 , wherein the AlGaN layer has an AlN mole fraction of greater than or equal to eighteen percent.

11. The SiC FET of claim 1 , further comprising:

an Ohmic drain contact disposed on the substrate;

an interlayer dielectric disposed on the gate structure;

a source metal structure including:

an Ohmic contact layer, the Ohmic contact layer defining:

an Ohmic contact to the body region; and

an Ohmic contact to the source region; and

a metal layer disposed on the Ohmic contact, a portion of the lateral channel region and the interlayer dielectric, the gate structure being electrically isolated from the metal layer by the interlayer dielectric.

12. The SiC FET of claim 11 , wherein the Ohmic contact to the body region includes a subcontact region of the second conductivity type disposed in the body region, the subcontact region having a doping concentration that is higher than a doping concentration of the body region.

13. The SiC FET of claim 11 , wherein the Ohmic contact layer is in contact with the spacer layer and the lateral channel region.

14. The SiC FET of claim 1 , wherein the spreading layer includes a vertical channel region of the SiC FET, the vertical channel region having a doping concentration that is greater than a doping concentration of the drift region.

15. The SiC FET of claim 1 , wherein the gate structure further includes:

a gallium nitride (GaN) layer of the first conductivity type disposed on the AlGaN layer, the GaN layer defining a tunnel contact with the AlGaN layer; and

a metal gate electrode disposed on the GaN layer, the metal gate electrode defining an Ohmic contact with the GaN layer.

16. A silicon carbide (SiC) field-effect transistor (FET) comprising:

an n-type substrate;

an n-type drift region disposed on the substrate;

an n-type spreading layer disposed in the drift region;

a p-type body region disposed in the spreading layer;

an n-type source region in the body region;

an n-type spacer layer disposed on the source region the body region and the spreading layer;

an n-type lateral channel region disposed in the spacer layer; and

a gate structure including:

an aluminum nitride (AlN) layer disposed on the lateral channel region;

a p-type aluminum gallium nitride (AlGaN) layer disposed on the AlN layer;

a p-type gallium nitride (GaN) layer disposed on the AlGaN layer; and

a metal gate electrode disposed on the GaN layer, the metal gate electrode defining an Ohmic contact with the GaN layer.

17. The SiC FET of claim 16 , wherein the AlN layer has a thickness between 1 nanometer (nm) and 30 nm.

18. The SiC FET of claim 16 , wherein the lateral channel region has a depth of less than 20 nanometers (nm).

19. The SiC FET of claim 16 , wherein the AlGaN layer has an AlN mole fraction of greater than or equal to eighteen percent.

20. A silicon carbide (SiC) field-effect transistor (FET) comprising:

an n-type substrate;

an n-type drift region disposed on the substrate;

an n-type spreading layer disposed in the drift region;

a p-type body region disposed in the spreading layer;

an n-type source region disposed in the body region;

an n-type spacer layer disposed on the source region, the body region and the spreading layer;

an n-type lateral channel region, the lateral channel region being disposed in the spacer layer; and

a gate structure including:

an aluminum nitride (AlN) layer disposed on the lateral channel region;

a p-type aluminum gallium nitride (AlGaN) layer disposed on the AlN layer;

an n-type gallium nitride (GaN) layer disposed on the AlGaN layer, the GaN layer defining a tunnel contact with the AlGaN layer; and

a metal gate electrode disposed on the GaN layer, the metal gate electrode defining an Ohmic contact with the GaN layer.

21. The SiC FET of claim 20 , wherein the AlGaN layer has an AlN mole fraction of greater than or equal to eighteen percent.