Method of forming a straight via profile with precise critical dimension control
A method for manufacturing a semiconductor device includes forming a first interconnect level having a conductive metal layer formed in a first dielectric layer. In the method, a cap layer is formed on the first interconnect level, and a second interconnect level including a second dielectric layer is formed on the cap layer. The method also includes forming a third interconnect level including a third dielectric layer on the second interconnect level. An opening is formed through the second and third interconnect levels and over the conductive metal layer. Sides of the opening are lined with a spacer material, and a portion of the cap layer at a bottom of the opening is removed from a top surface of the conductive metal layer. The spacer material is removed from the opening, and a conductive material layer is deposited in the opening on the conductive metal layer.
1. A semiconductor device, comprising:
a first interconnect level comprising a first dielectric layer and a first conductive layer formed in the first dielectric layer;
a first cap layer disposed on the first interconnect level;
a second interconnect level disposed on the first cap layer, wherein the second interconnect level comprises a second dielectric layer and a second conductive layer formed in the second dielectric layer;
a third interconnect level disposed on the second interconnect level, wherein the third interconnect level comprises a third dielectric layer;
a super via comprising a conductive material layer disposed through the second and third interconnect levels and on the first conductive layer; and
a via comprising another conductive material layer disposed through the third interconnect level, wherein the via comprises a stepped portion, and wherein the via is formed on an overlay alignment marker formed in the second dielectric layer;
wherein the super via comprises a straight profile through the second and third interconnect levels.
2. The semiconductor device according to claim 1 , further comprising a second cap layer disposed on the second interconnect level between the second and third interconnect levels.
3. The semiconductor device according to claim 2 , wherein the super via is disposed through the first and second cap layers.
4. The semiconductor device according to claim 2 , further comprising an additional via disposed through the third interconnect level and on the second conductive layer, wherein the additional via comprises a straight profile through the third interconnect level.
5. The semiconductor device according to claim 4 , wherein the additional via is disposed through the second cap layer.
6. The semiconductor device according to claim 1 , wherein an angle formed between the stepped portion and a wall of the via is one of 90° and about 90°.
7. The semiconductor device according to claim 1 , further comprising a cap layer on the overlay alignment marker between the via and the overlay alignment marker.
8. The semiconductor device according to claim 1 , further comprising a second cap layer disposed on the second interconnect level between the second and third interconnect levels, wherein the via is disposed through the second cap layer.
9. The semiconductor device according to claim 1 , further comprising an additional via disposed through the second interconnect level, wherein the additional via comprises a straight profile through the second interconnect level.
10. The semiconductor device according to claim 9 , wherein the additional via is disposed through the first cap layer.
11. A semiconductor device, comprising:
a first interconnect level comprising a first dielectric layer;
a first cap layer disposed on the first interconnect level;
a second interconnect level disposed on the first cap layer, wherein the second interconnect level comprises a second dielectric layer;
a super via comprising a conductive material layer disposed through the first and second interconnect levels; and
a via comprising another conductive material layer disposed through the second interconnect level, wherein the via comprises a stepped portion, and wherein the via is formed on an overlay alignment marker formed in the first dielectric layer;
wherein the super via comprises a straight profile through the first and second interconnect levels.
12. The semiconductor device according to claim 11 , further comprising:
a third interconnect level disposed under first interconnect level; and
a second cap layer disposed on the third interconnect level between the first and third interconnect levels.
13. The semiconductor device according to claim 12 , wherein the super via is disposed through the first and second cap layers.
14. The semiconductor device according to claim 11 , wherein an angle between the stepped portion and a wall of the via is one of 90° and about 90°.
15. The semiconductor device according to claim 11 , further comprising a cap layer on the overlay alignment marker between the via and the overlay alignment marker.
16. The semiconductor device according to claim 11 , wherein the via is disposed through the first cap layer.