Patent Application
Utility
App. No. 16/672,237
· Confirmation No. 1068
METHOD AND APPARATUS FOR IMMERSION GRATING LITHOGRAPHY
Applicant:
Newport Corporation
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-04-13 | ABN |
Abandonment | 2 | View | |
| 2020-08-10 | CTNF |
Non-Final Rejection | 13 | View | |
| 2020-08-10 | 892 |
List of references cited by examiner | 1 | View | |
| 2020-08-10 | FWCLM |
Index of Claims | 1 | View | |
| 2020-08-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2020-08-10 | 1449 |
List of References cited by applicant and considered by examiner | 5 | View | |
| 2020-08-10 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2020-08-10 | SRNT |
Examiner's search strategy and results | 11 | View | |
| 2020-08-10 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2020-07-15 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2020-07-15 | CLM |
Claims | 4 | View | |
| 2020-07-15 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2020-07-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2020-07-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2020-06-11 | CTRS |
Requirement for Restriction/Election | 11 | View | |
| 2020-06-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2020-05-22 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2020-04-30 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2020-04-30 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 3 | View | |
| 2020-04-30 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 5 | View | |
| 2020-04-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-12-13 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2019-12-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2019-11-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-11-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-11-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2019-11-21 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2019-11-21 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2019-11-05 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2019-11-05 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-11-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-11-05 | OATH |
Oath or Declaration filed | 1 | View | |
| 2019-11-05 | OATH |
Oath or Declaration filed | 2 | View | |
| 2019-11-05 | OATH |
Oath or Declaration filed | 2 | View | |
| 2019-11-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-11-01 | TRNA |
Transmittal of New Application | 2 | View | |
| 2019-11-01 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-11-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2019-11-01 | ADS |
Application Data Sheet | 8 | View | |
| 2019-11-01 | SPEC |
Specification | 17 | View | |
| 2019-11-01 | CLM |
Claims | 5 | View | |
| 2019-11-01 | ABST |
Abstract | 1 | View | |
| 2019-11-01 | DRW |
Drawings-only black and white line drawings | 14 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
359/572
G03F7/2041
G03F7/70575
G02B5/1814
G02B5/1838
G02B5/1847
G03F7/2006
G03F7/70025
G03F7/70158
G03F7/702
G03F7/70883
H01L21/0275
H01S3/08009
H01S3/08031
H01S3/0805
H01S3/225
Prosecution
- Examiner
- CHANG, AUDREY Y
- Art Unit
- 2872
- Customer No.
- 45134
- Docket No.
- 0209-100ROC-18UT
- Confirmation No.
- 1068
Publication
- Pub. No.
- US20200159122A1
- Pub. Date
- 2020-05-21
from
BARCLAYS BANK PLC
RELEASE OF SECURITY INTEREST
Recorded 2022-08-24
from
BARCLAYS BANK PLC
RELEASE OF SECURITY INTEREST
Recorded 2022-08-24
PATENT SECURITY AGREEMENT (TERM LOAN)
Recorded 2020-01-23
PATENT SECURITY AGREEMENT (ABL)
Recorded 2020-01-23
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Quick Facts
- App. No.
- 16/672,237
- Filed
- 2019-11-01
- Pub. No.
- US20200159122A1
- Examiner
- CHANG, AUDREY Y
- Art Unit
- 2872
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