IP Library Patent Application 16672237
Patent Application Utility
App. No. 16/672,237 · Confirmation No. 1068

METHOD AND APPARATUS FOR IMMERSION GRATING LITHOGRAPHY

Applicant: Newport Corporation
Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
Code Description Pages PDF
2021-04-13 ABN Abandonment 2 View
2020-08-10 CTNF Non-Final Rejection 13 View
2020-08-10 892 List of references cited by examiner 1 View
2020-08-10 FWCLM Index of Claims 1 View
2020-08-10 SRFW Search information including classification, databases and other search related notes 1 View
2020-08-10 1449 List of References cited by applicant and considered by examiner 5 View
2020-08-10 1449 List of References cited by applicant and considered by examiner 4 View
2020-08-10 SRNT Examiner's search strategy and results 11 View
2020-08-10 BIB Bibliographic Data Sheet 1 View
2020-07-15 ELC. Response to Election / Restriction Filed 1 View
2020-07-15 CLM Claims 4 View
2020-07-15 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2020-07-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2020-07-15 WFEE Fee Worksheet (SB06) 1 View
2020-06-11 CTRS Requirement for Restriction/Election 11 View
2020-06-11 SRFW Search information including classification, databases and other search related notes 1 View
2020-05-22 NTC.PUB Notice of Publication 1 View
2020-04-30 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2020-04-30 REF.OTHER Other reference-Patent/Application/Search Documents 3 View
2020-04-30 REF.OTHER Other reference-Patent/Application/Search Documents 5 View
2020-04-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-12-13 APP.FILE.REC Filing Receipt 4 View
2019-12-13 WFEE Fee Worksheet (SB06) 1 View
2019-11-22 WFEE Fee Worksheet (SB06) 2 View
2019-11-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-11-21 WFEE Fee Worksheet (SB06) 1 View
2019-11-21 APP.FILE.REC Filing Receipt 4 View
2019-11-21 NTC.MISS.PRT Notice to File Missing Parts 2 View
2019-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2019-11-05 WFEE Fee Worksheet (SB06) 2 View
2019-11-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-11-05 OATH Oath or Declaration filed 1 View
2019-11-05 OATH Oath or Declaration filed 2 View
2019-11-05 OATH Oath or Declaration filed 2 View
2019-11-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-11-01 TRNA Transmittal of New Application 2 View
2019-11-01 WFEE Fee Worksheet (SB06) 2 View
2019-11-01 N417 Electronic Filing System Acknowledgment Receipt 3 View
2019-11-01 ADS Application Data Sheet 8 View
2019-11-01 SPEC Specification 17 View
2019-11-01 CLM Claims 5 View
2019-11-01 ABST Abstract 1 View
2019-11-01 DRW Drawings-only black and white line drawings 14 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
16/672,237
Filed
2019-11-01
Pub. No.
US20200159122A1
Art Unit
2872