IP Library › Patent Application 62770340
Patent Application Provisional
App. No. 62/770,340 · Confirmation No. 6933

Method and Apparatus for Immersion Grating Lithography

Applicant: Newport Corporation
Provisional Application Expired
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2018-12-12 APP.FILE.REC Filing Receipt 3 View
2018-11-26 OATH Oath or Declaration filed 1 View
2018-11-26 OATH Oath or Declaration filed 2 View
2018-11-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-11-25 OATH Oath or Declaration filed 2 View
2018-11-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-11-21 ADS Application Data Sheet 8 View
2018-11-21 DRW Drawings-only black and white line drawings 16 View
2018-11-21 TR.PROV Provisional Cover Sheet (SB16) 3 View
2018-11-21 WFEE Fee Worksheet (SB06) 2 View
2018-11-21 N417 Electronic Filing System Acknowledgment Receipt 3 View
2018-11-21 SPEC Specification 17 View
2018-11-21 CLM Claims 3 View
2018-11-21 ABST Abstract 1 View
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Quick Facts
App. No.
62/770,340
Filed
2018-11-21