Method for epitaxial growth and device
A semiconductor device includes first and second semiconductor fins extending from a substrate and a source/drain region epitaxially grown in recesses of the first and second semiconductor fins. A top surface of the source/drain region is higher than a surface level with top surfaces of the first and second semiconductor fins. The source/drain region includes a plurality of buffer layers. Respective layers of the plurality of buffer layers are embedded between respective layers of the source/drain region. Each of the plurality of buffer layers may have an average thickness in a range of about 2 Å to about 30 Å.
1. A method of manufacturing a device, the method comprising:
forming a first semiconductor fin and a second semiconductor fin protruding from a substrate;
forming a first gate structure over the first semiconductor fin;
recessing the first semiconductor fin to form a first recess adjacent the first gate structure; and
forming a first source/drain region in the first recess, wherein forming the first source/drain region comprises:
epitaxially growing a first body layer in the first recess;
depositing a first buffer layer on the first body layer;
epitaxially growing a second body layer on the first buffer layer;
depositing a second buffer layer on the second body layer;
epitaxially growing a third body layer on the second buffer layer, the third body layer being recessed below a top surface of the first semiconductor fin;
depositing a third buffer layer on the third body layer; and
recessing sidewalls of the third body layer and the third buffer layer.
2. The method of claim 1 , further comprising epitaxially growing one or more upper body layers on the third buffer layer, wherein a top surface of an uppermost upper body layer is higher than a top surface of a first semiconductor fin by 6 nm.
3. The method of claim 2 , further comprising depositing a protection layer on an uppermost upper body layer.
4. The method of claim 1 , wherein recessing the sidewalls of the third body layer comprises a dry etch using at least one of HCl, HF, or HBr.
5. The method of claim 1 , further comprising:
forming a second gate structure over the second semiconductor fin; and
recessing the second semiconductor fin to form a second recess adjacent the second gate structure, wherein forming the first source/drain region simultaneously forms a second source/drain region, wherein the first source/drain region and second source/drain region remain separated.
6. The method of claim 1 , wherein recessing the sidewalls of the third body layer comprises a dry etch using a mixed gas comprising HCl, Ge, and H 2.
7. A method of manufacturing a device, the method comprising:
forming a first fin and a second fin, the first fin and the second fin extending from a semiconductor substrate;
forming a dummy gate structure over the first fin and the second fin;
etching a first recess in the first fin and etching a second recess in the second fin, the first recess being adjacent to the dummy gate structure, the second recess being adjacent to the second fin;
forming a source/drain region extending from the first recess and the second recess, wherein forming the source/drain region comprises:
forming a first body layer in the first recess and the second recess;
forming a first buffer layer on the first body layer, the first buffer layer having a first germanium concentration;
forming a second body layer on the first buffer layer, the second body layer having a second germanium concentration, the second germanium concentration being greater than the first germanium concentration; and
forming alternating additional buffer layers and additional body layers, wherein each additional buffer layer has an average thickness in a range of 2 Å to 30 Å, wherein each additional buffer layer has a respective germanium concentration smaller than the second germanium concentration, wherein each additional body layer has a respective germanium concentration greater than each respective germanium concentration of each additional buffer layer; and
replacing the dummy gate structure with a gate electrode, wherein a top surface of the first fin under the gate electrode is lower than a top surface of the source/drain region.
8. The method of claim 7 , wherein the top surface of the first fin under the gate electrode is lower than a top surface of the source/drain region by greater than or equal to 6 nm.
9. The method of claim 7 , wherein the first buffer layer and the additional buffer layers comprise silicon germanium doped with boron.
10. The method of claim 9 , wherein the first buffer layer and the additional buffer layers have a concentration of germanium less than 15 atomic percent.
11. The method of claim 7 , further comprising forming an air gap interposed between the source/drain region and the semiconductor substrate.
12. The method of claim 11 , wherein a top point of the air gap is lower than a top point of a lowermost body layer of the source/drain region.
13. The method of claim 11 , wherein a height of the air gap is in a range of 5 nm to 30 nm.
14. A method of manufacturing a device, the method comprising:
forming a source/drain region in a first semiconductor fin and a second semiconductor fin, the forming the source/drain region comprising:
epitaxially growing a first portion of a first body layer in the first semiconductor fin and a second portion of the first body layer in the second semiconductor fin;
epitaxially growing a first portion of a first buffer layer on the first portion of the first body layer and a second portion of the first buffer layer on the second portion of the first body layer;
epitaxially growing a second body layer on the first buffer layer, the second body layer being a single continuous material, wherein the second body layer is free of facets;
epitaxially growing a second buffer layer on the second body layer;
epitaxially growing a third body layer on the second buffer layer;
epitaxially growing a third buffer layer on the third body layer; and
removing lateral portions of the third body layer and the third buffer layer with a first etch back process.
15. The method of claim 14 , further comprising:
epitaxially growing a fourth body layer on the third buffer layer;
epitaxially growing a fourth buffer layer on the fourth body layer; and
removing lateral portions of the fourth body layer and the fourth buffer layer with a second etch back process.
16. The method of claim 14 , wherein the first buffer layer has an average thickness in a range of 2 Å to 30 Å.
17. The method of claim 14 , wherein the first etch back process is a dry etch performed with a gas comprising HCl.
18. The method of claim 14 , wherein the first etch back process is performed at a temperature in a range of 400° C. to 700° C.
19. The method of claim 14 , wherein the first etch back process is performed for a duration in a range of 20 seconds to 600 seconds.
20. The method of claim 14 , wherein the third body layer is below a top surface of the second semiconductor fin.