Image pickup device and electronic apparatus
The present disclosure relates to an image pickup device and an electronic apparatus that enable warping of a substrate to be suppressed. A first structural body including a pixel array unit is layered with a second structural body including an input/output circuit unit and outputting a pixel signal output from the pixel to the outside of the device, and a signal processing circuit; and a signal output external terminal and a signal input external terminal are arranged below the pixel array unit, the signal output external terminal being connected to the outside via a first through-via penetrating through a semiconductor substrate in the second structural body, the signal input external terminal being connected to the outside via a second through-via connected to an input circuit unit and penetrating through the semiconductor substrate. The signal output external terminal is electrically connected to the first through-via via a first rewiring line, the signal input external terminal is electrically connected to the second through-via via a second rewiring line, and a third rewiring line being electrically independent is arranged in a layer in which the first rewiring line and the second rewiring line are arranged. The present disclosure can be applied to, for example, the image pickup device, and the like.
1. An image pickup device, comprising:
a first structural body, wherein the first structural body includes a pixel array unit having a plurality of pixels that photoelectrically convert incident light into an electric charge; and
a second structural body, wherein the second structural body is fixed to a side of the first structural body that is opposite a light incident side of the first structural body,
the second structural body including an input unit having an input circuit unit that inputs a signal from an outside of the device, an output unit having an output circuit unit that outputs a pixel signal from at least one of the pixels included in the plurality of pixels, and a signal processing circuit, wherein the output unit and the input unit are arranged adjacent the pixel array unit of the first structural body,
wherein a first through-via penetrates a semiconductor substrate constituting a part of the second structural body and connects a signal output external terminal to the output circuit unit,
wherein a second through-via penetrates the semiconductor substrate constituting a part of the second structural body and connects a signal input external terminal to the input circuit unit,
wherein the signal output external terminal is electrically connected to the first through-via by a first rewiring line,
wherein the signal input external terminal is electrically connected to the second through-via by a second rewiring line, and
wherein a third rewiring line that is electrically independent from at least the first rewiring line and the second rewiring line is disposed in a layer in which the first rewiring line and the second rewiring line are disposed.
2. The image pickup device according to claim 1 , wherein the third rewiring line is disposed in a region where the first rewiring line, the second rewiring line, the signal output external terminal, the signal input external terminal, the first through-via, and the second through-via are not disposed.
3. The image pickup device according to claim 1 , wherein the third rewiring line is formed in a shape and a position for suppressing warping of the device.
4. The image pickup device according to claim 1 , wherein the third rewiring line is formed in a shape and a position for reducing stress to be applied to the device by contraction of a protective film due to heat treatment of when the protective film is formed, the protective film protecting the first rewiring line and the second rewiring line.
5. The image pickup device according to claim 1 , wherein the third rewiring line is formed in a shape and a position for subdividing the protective film that protects the first rewiring line and the second rewiring line.
6. The image pickup device according to claim 1 , wherein the third rewiring line is formed with a large area or a large peripheral length on a surface of the second structural body.
7. The image pickup device according to claim 1 , wherein the third rewiring line is formed in a shape and a position for dissipating heat inside the device.
8. The image pickup device according to claim 1 , wherein the third rewiring line is arranged between a plurality of the first rewiring lines, between a plurality of the second rewiring lines, or between the first rewiring line and the second rewiring line.
9. The image pickup device according to claim 1 , wherein the third rewiring line is arranged between signal lines that exchange data at a high speed.
10. The image pickup device according to claim 8 , wherein the third rewiring line is connected to a fixed voltage.
11. The image pickup device according to claim 8 , wherein the third rewiring line is connected to a terminal connected to a fixed voltage.
12. The image pickup device according to claim 1 , wherein the third rewiring line connects a plurality of the signal output external terminals to each other, a plurality of the signal input external terminals to each other, or the signal output external terminal and the signal input external terminal to each other.
13. The image pickup device according to claim 12 , wherein the third rewiring line is connected to a fixed voltage.
14. An electronic apparatus comprising
an image pickup device including:
a first structural body, wherein the first structural body includes a pixel array unit having a plurality of pixels that photoelectrically convert incident light into an electric charge; and
a second structural body, wherein the second structural body is fixed to a side of the first structural body that is opposite a light incident side of the first structural body,
the second structural body including an input unit having an input circuit unit that inputs a signal from an outside of the device, an output unit having an output circuit unit that outputs a pixel signal from at least one of the pixels included in the plurality of pixels and a signal processing circuit,
wherein the output unit and the input unit that are arranged adjacent the pixel array unit of the first structural body,
wherein a first through-via penetrates a semiconductor substrate constituting a part of the second structural body and connects a signal output external terminal to the output circuit unit,
wherein a second through-via penetrates the semiconductor substrate constituting a part of the second structural body; and connects a signal input external terminal to the input circuit unit,
wherein the signal output external terminal is electrically connected to the first through-via by a first rewiring line,
wherein the signal input external terminal is electrically connected to the second through-via by a second rewiring line, and
wherein a third rewiring line that is electrically independent from at least the first rewiring line and the second rewiring line is disposed in a layer in which the first rewiring line and the second rewiring line are disposed.