IP Library Granted Patent US 11,476,133
Granted Patent B2
US 11,476,133 · App. 16/693,400 · Granted Oct 18, 2022

Picking apparatus with heating element and temperature-controlled adhesive and the method of using the same

Inventors: Fu-Hsin Chen (Hsinchu, TW); Yu-Chun Lee (Hsinchu, TW)
Assignee: Lextar Electronics Corporation
H01L21/67144
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Quick Facts
Patent No.
US 11,476,133
App. No.
16/693,400
Granted
Oct 18, 2022
Kind
B2
Abstract

A picking apparatus is configured to pick up a plurality of micro elements. The picking apparatus includes an elastic plate, a substrate, a temperature-controlled adhesive layer, at least one heating element and a power source. The elastic plate has a first surface and a second surface opposite to each other. The substrate is disposed on the first surface. The temperature-controlled adhesive layer is disposed on the second surface and configured to adhere the micro elements. The heating element is disposed between the second surface and the temperature-controlled adhesive layer. The power source is electrically connected with the heating element. A viscosity of the temperature-controlled adhesive layer varies with a temperature of the temperature-controlled adhesive layer.

Claims (20)

1. A picking apparatus, configured to pick up a plurality of micro elements, the picking apparatus comprising:

an elastic plate having a first surface and a second surface opposite to each other;

a substrate disposed on the first surface;

a temperature-controlled adhesive layer disposed on the second surface and configured to adhere the micro elements;

at least one heating element disposed between the second surface and the temperature-controlled adhesive layer; and

a power source electrically connected with the heating element,

wherein a viscosity of the temperature-controlled adhesive layer increases when a temperature of the temperature-controlled adhesive layer increases, and the viscosity of the temperature-controlled adhesive layer decreases when the temperature of the temperature-controlled adhesive layer decreases.

2. The picking apparatus of claim 1 , wherein a quantity of the heating element is plural, and the heating elements are evenly distributed between the second surface and the temperature-controlled adhesive layer.

3. The picking apparatus of claim 1 , wherein the substrate comprises glass, quartz, silicon, ceramic or sapphire.

4. The picking apparatus of claim 1 , wherein the elastic plate comprises polydimethylsiloxane (PDMS).

5. A picking method for picking up a plurality of micro elements, the picking method comprising:

conducting an electricity to at least one heating element to heat up the heating element;

conducting a heat from the heated heating element to a temperature-controlled adhesive layer until a temperature of the temperature-controlled adhesive layer increases to a first temperature in order to increase a viscosity of the temperature-controlled adhesive layer;

adhering the micro elements by the temperature-controlled adhesive layer with an increased viscosity; and

stopping conducting the electricity to the heating element after the micro elements contacting with a receiving substrate such that the temperature of the temperature-controlled adhesive layer decreases to a second temperature in order to decrease the viscosity of the temperature-controlled adhesive layer.

6. The picking method of claim 5 , further comprising:

placing the micro elements on the receiving substrate and moving the temperature-controlled adhesive layer away from the receiving substrate.

7. The picking method of claim 5 , wherein a quantity of the heating element is plural, stopping conducting the electricity further comprises:

stopping conducting the electricity to at least one of the heating elements and keeping conducting the electricity to at least another one of the heating elements.

8. The picking method of claim 5 , wherein the first temperature ranges between about 80 degrees Celsius (° C.) and about 120 degrees Celsius (° C.), and the second temperature ranges between about 25 degrees Celsius (° C.) and about 35 degrees Celsius (° C.).

Assignments (2)
MERGER Recorded Mar 27, 2026
From: LEXTAR ELECTRONICS CORPORATION
To: ENNOSTAR CORPORATION
Reel/Frame 075286/0822 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 25, 2019
From: CHEN, FU-HSIN; LEE, YU-CHUN
To: LEXTAR ELECTRONICS CORPORATION
Reel/Frame 051111/0039 →