Wafer support table with ceramic substrate including core and surface layer
A ceramic heater includes a ceramic substrate including, on an upper surface, a wafer mount surface that receives a wafer, and a heater electrode embedded in an inside of the ceramic substrate. The ceramic substrate includes a core portion and a surface layer portion disposed on a surface of the core portion. The surface layer portion has volume resistivity higher than volume resistivity of the core portion. The core portion has thermal conductivity higher than thermal conductivity of the surface layer portion. The surface layer portion is disposed over an area of at least one of a side surface of the core portion and an upper surface of the core portion, the area being not covered with the wafer.
1. A wafer support table, comprising:
a ceramic substrate including, on an upper surface, a wafer mount portion that receives a wafer; and
a heater electrode embedded in an inside of the ceramic substrate, wherein
the ceramic substrate includes a core portion and a surface layer portion disposed on a surface of the core portion,
the surface layer portion has volume resistivity higher than volume resistivity of the core portion,
the core portion has thermal conductivity higher than thermal conductivity of the surface layer portion,
the surface layer portion is disposed over at least one of a side surface of the core portion and an upper surface of the core portion that is not covered with the wafer, and
the core portion is formed of a sintered aluminum nitride, which has a grain diameter, and the surface layer portion is formed of a sintered aluminum nitride containing Ti, which has a grain diameter, such that the grain diameter of the sintered aluminum nitride containing Ti of the surface layer portion is smaller than the grain diameter of the sintered aluminum nitride of the core portion.
2. The wafer support table according to claim 1 ,
wherein the surface layer portion is further disposed over an undersurface of the core portion.
3. The wafer support table according to claim 1 ,
wherein the surface layer portion is further disposed over an upper surface of the core portion that is covered with the wafer.
4. The wafer support table according to claim 1 ,
wherein the surface layer portion is disposed to surround all the surfaces of the core portion.
5. The wafer support table according to claim 1 ,
wherein at least one of an electrostatic electrode and a RF electrode is embedded in the inside of the ceramic substrate to serve as an electrode other than the heater electrode.
6. The wafer support table according to claim 5 ,
wherein the electrode other than the heater electrode is embedded between the upper surface of the ceramic substrate and the heater electrode.