Wafer process, apparatus and method of manufacturing an article
An apparatus is provided. The apparatus has a chuck having a first side configured to retain a superstrate or a template and a second side, an array of image sensors disposed at the second side of the chuck and spaced from the chuck, and an array of light sources disposed between the transparent chuck and the array of image sensors.
1. An apparatus, comprising:
a chuck having a first side configured to retain a superstrate or a template and a second side;
an array of image sensors disposed at the second side of the chuck and spaced from the chuck; and
an array of light sources disposed between the chuck transparent to the light sources and the array of image sensors.
2. The apparatus of claim 1 , wherein each of the array of image sensors and the array of the light sources is spaced from the chuck with a specific distance such that interference of an image acquired from each of the image sensors with light from the light sources is minimized.
3. The apparatus of claim 1 , wherein the array of image sensors and the array of the light sources are arranged to minimize an overlap between each individual image sensor and each individual light source.
4. The apparatus of claim 1 , wherein the chuck is transparent to each of the light sources.
5. The apparatus of claim 1 , wherein the image sensors are configured to measure visible light.
6. The apparatus of claim 1 , wherein each of the image sensors is configured to obtain an image of a local area.
7. The apparatus of claim 4 , further comprising an image processor configured to combine the images acquired by each of the image sensors into a single image.
8. The apparatus of claim 1 , wherein the array of light sources is configured to generate UV light to transmit through the chuck and the superstrate and the template.
9. The apparatus of claim 1 , wherein the array of light sources include an array of UV light emitting diodes (LEDs).
10. The apparatus of claim 1 , further comprising:
a first board for mounting the array of light sources thereon; and
a second board for mounting the array of image sensors thereon.
11. The apparatus of claim 10 , wherein the first board includes a plurality of holes between the light sources.
12. The apparatus of claim 11 , wherein each of the image sensors is aligned with a respective one of the holes.