Apparatus, system and method for providing a vacuum ejector for an end effector
An apparatus, system and method for providing a vacuum ejector for use with an end effector. Included may be at least an end effector and a vacuum chamber for gripping an element during semiconductor processing. The end effector may include at least two clamp arms for placing a gripped element in relation to application of a vacuum to the gripped element; a vacuum cup having a mouth capable of sealing to the gripped element to provide a vacuum chamber; a vacuum ejector pin extending into the vacuum chamber and including a plurality of ports substantially at a tip thereof proximate to the gripped element, wherein the vacuum is applied by the plurality of ports; and an ejector pin actuator that is capable of moving the vacuum ejector pin toward the gripped element until the sealing of the mouth is broken and the gripped element is ejected from the vacuum cup.
1. An end effector, comprising:
positioning clamps for positioning an element in relation to application of a vacuum force to the element;
a vacuum cup comprising at least a pliable mouth capable of sealing to the element upon application of the vacuum force to the element via a vacuum chamber;
an actuatable vacuum ejector pin of a length greater than, and extending along a center axis of, the vacuum chamber, comprising a plurality of vacuum ports to supply the vacuum force from via a direct connection from the actuatable vacuum pin to, and substantially distally from, a generator of the vacuum force,
wherein actuation of the vacuum ejector pin moves the vacuum ejector pin toward the element through the vacuum chamber until the seal is broken, thereby breaking the vacuum force and ejecting the element from the vacuum cup.
2. The end effector of claim 1 , wherein the positioning clamps are spring actuated.
3. The end effector of claim 1 , wherein the positioning comprises centering with respect to the pliable mouth.
4. The end effector of claim 1 , further comprising a robotic interface for interfacing to a moving robotic.
5. The end effector of claim 1 , wherein an entirety of the vacuum cup is substantially pliable.
6. The end effector of claim 1 , wherein the element comprises a curved shell element.
7. The end effector of claim 1 , wherein the plurality of ports consists of two ports.
8. The end effector of claim 1 , wherein the plurality of ports consists of four ports.
9. The end effector of claim 1 , further comprising a vacuum force capable of providing suction through the plurality of ports.
10. The end effector of claim 1 , wherein the actuation of the ejector pin comprises a spring.
11. The end effector of claim 1 , wherein the positioning clamps are synchronous.
12. The end effector of claim 1 , wherein the positioning clamps comprise Mylar clamp shell springs.
13. The end effector of claim 1 , wherein the vacuum ejector pin is hollow.
14. The end effector of claim 1 , wherein the actuatable vacuum ejector pin comprises plastic.
15. The end effector of claim 1 , wherein the actuatable vacuum ejector pin comprises stainless steel.