IP Library Granted Patent US 11,279,616
Granted Patent B2
US 11,279,616 · App. 16/702,148 · Granted Mar 22, 2022

Multipass transfer surface for dynamic assembly

Inventors: Sourobh Raychaudhuri (Mountain View, CA); Jeng Ping Lu (Fremont, CA); David K. Biegelsen (Portola Valley, CA)
Assignee: Palo Alto Research Center Incorporated
B81C99/002H01L21/6833H02N13/00
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Quick Facts
Patent No.
US 11,279,616
App. No.
16/702,148
Granted
Mar 22, 2022
Kind
B2
Abstract

A method of manufacturing an intermediate transfer surface includes depositing an array of etch stops on a conductive surface, etching the conductive surface to form mesas of the conductive surface separated by gaps, and coating the mesas with a dielectric coating. A method of performing microassembly includes forming an assembly of particles on an assembly plane, providing an intermediate transfer surface having an array of electrodes, applying a bias to the intermediate transfer surface to form an electrostatic field between the assembly plane and the intermediate transfer surface, and moving the intermediate transfer surface towards the assembly surface until the electrostatic field strength is strong enough to cause transfer of the assembly to the intermediate transfer surface.

Claims (27)

1. A method of performing microassembly, comprising:

forming an assembly of particles on an assembly plane;

providing an intermediate transfer surface having an array of electrodes;

applying a bias to the array of electrodes of the intermediate transfer surface to form an electrostatic field between the assembly plane and the intermediate transfer surface; and

moving the intermediate transfer surface towards the assembly plane until the intermediate transfer surface reaches at a distance equal to a space between electrodes on the intermediate transfer surface so that the electrostatic field strength is strong enough to cause transfer of the assembly of particles to the intermediate transfer surface.

2. The method as claimed in claim 1 , further comprising applying a second bias to the assembly plane to hold the assembly of particles in place.

3. The method as claimed in claim 2 , further comprising reversing the second bias to repel the particles from the assembly plane as the intermediate transfer surface moves towards the assembly plane.

4. The method as claimed in claim 2 , further comprising reducing the second bias as the intermediate transfer surface moves towards the assembly plane.

5. The method as claimed in claim 2 , further comprising increasing the bias applied to the intermediate transfer surface as the intermediate transfer surface moves towards the assembly plane.

6. The method as claimed in claim 1 , wherein the particles are uncharged on the assembly plane and the transfer occurs dielectrophoretically.

7. The method as claimed in claim 1 , wherein the intermediate transfer surface moves towards and away from the assembly plane at least twice.

8. The method as claimed in claim 1 , further comprising curing the assembly of particles into a monolithic assembly on the intermediate transfer surface.

9. The method as claimed in claim 1 , further comprising locally curing the assembly of particles on the intermediate transfer surface.

10. The method as claimed in claim 9 , further comprising transferring the assembly of particles from the intermediate transfer surface to a final substrate.

11. The method as claimed in claim 10 , further comprising globally curing the assembly of particles on a final substrate.

12. The method as claimed in claim 1 , further comprising transferring the assembly of particles from the intermediate transfer surface to a final substrate.

13. A method of performing microassembly, comprising:

forming an assembly of particles on an assembly plane;

providing an intermediate transfer surface having an array of electrodes;

applying a bias to the electrodes of the intermediate transfer surface to form an electrostatic field between the assembly plane and the intermediate transfer surface;

applying a second bias to the assembly plane to hold the assembly of particles in place;

moving the intermediate transfer surface towards the assembly surface until the electrostatic field strength is strong enough to cause transfer of the assembly of particles to the intermediate transfer surface; and

reversing the second bias to repel the particles from the assembly plane as the intermediate transfer surfaces moves towards the assembly plane.

14. The method as claimed in claim 13 , wherein the particles are uncharged on the assembly plane and the transfer occurs dielectrophoretically.

15. The method as claimed in claim 13 , wherein the intermediate transfer surface moves towards and away from the assembly plane at least twice.

16. The method as claimed in claim 13 , further comprising curing the assembly of particles into a monolithic assembly on the intermediate transfer surface.

17. The method as claimed in claim 13 , further comprising locally curing the assembly of particles on the intermediate transfer surface.

Assignments (10)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073562/0677 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 3, 2019
From: RAYCHAUDHURI, SOUROBH; LU, JENG PING; BIEGELSEN, DAVID K.
To: PALO ALTO RESEARCH CENTER INCORPORATED
Reel/Frame 051165/0738 →
Continuity (2)
Division 14997680 · Jan 18, 2016
Related Publication 20200102219A1 · Apr 2, 2020