IP Library Granted Patent US 11,441,235
Granted Patent B2
US 11,441,235 · App. 16/702,749 · Granted Sep 13, 2022

Crystal growing apparatus and crucible having a main body portion and a low radiation portion

Inventors: Rimpei Kindaichi (Chiba, JP); Yoshishige Okuno (Chiba, JP); Tomohiro Shonai (Hikone, JP)
Assignee: SHOWA DENKO K.K.
C30B23/066C23C14/0635C23C14/243C30B29/36C30B35/002
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Quick Facts
Patent No.
US 11,441,235
App. No.
16/702,749
Granted
Sep 13, 2022
Kind
B2
Abstract

A crystal growing apparatus includes: a crucible including a main body portion and a low radiation portion having a radiation rate lower than that of the main body portion; and a heating unit which is positioned on the outside of the crucible and is configured to heat the crucible by radiant heat, and the low radiation portion is provided on an outer surface of a first point which is a heating center, in a case where the crucible does not include the low radiation portion.

Claims (52)

1. A crystal growing apparatus comprising:

a crucible including a main body portion, a low radiation portion having a radiation rate lower than that of the main body portion, a crystal installation portion on which a seed crystal is installed, and a bottom portion which is filled with a raw material; and

a heating unit which is positioned on the outside of the crucible and is configured to heat the crucible by radiant heat,

wherein the low radiation portion is provided on an outer surface of a first point which is a heating center of the crucible, in a case where the crucible does not include the low radiation portion,

the crystal installation portion is disposed on a position facing the raw material, and

a height of the low radiation portion is 2 times or more and 4 times or less than a distance of a perpendicular line drawn towards the heating unit from the first point.

2. The crystal growing apparatus according to claim 1 ,

wherein a radiation rate of the low radiation portion is 0.6 times or less than a radiation rate of the main body portion.

3. The crystal growing apparatus according to claim 1 ,

wherein the main body portion is composed of graphite, and

the low radiation portion is composed of an element, carbide, or nitride including an element selected from the group consisting of Ta, Mo, Nb, Hf, W, and Zr, or a mixture thereof.

4. The crystal growing apparatus according to claim 1 ,

wherein an outer surface of the main body portion is uneven, and

an outer surface of the low radiation portion is a flat surface.

5. The crystal growing apparatus according to claim 1 ,

wherein the height of the low radiation portion is 40% or more and 80% or less of a height of the raw material contained in the crucible.

6. The crystal growing apparatus according to claim 1 , further comprising:

a support,

wherein the support is positioned on a lower portion of the crucible and supports the crucible, and

the support rotates in a radial direction.

7. The crystal growing apparatus according to claim 1 , further comprising:

a heat insulating material,

wherein the heat insulating material is a member having a thermal conductivity equal to or smaller than 5 W/mK.

8. The crystal growing apparatus according to claim 6 , further comprising:

a heat insulating material,

wherein the heat insulating material is a member having a thermal conductivity equal to or smaller than 5 W/mK.

9. The crystal growing apparatus according to claim 8 , wherein the support passes through the heat insulating material and projects downward from the crucible.

10. A crystal growing apparatus comprising:

a crucible including a main body portion, a low radiation portion having a radiation rate lower than that of the main body portion, a crystal installation portion on which a seed crystal is installed, and a bottom portion which is filled with a raw material; and

a heating unit which is positioned on the outside of the crucible and is configured to heat the crucible by radiant heat,

wherein the low radiation portion is provided on an outer surface of a first point which is a heating center of the crucible, in a case where the crucible does not include the low radiation portion,

the crystal installation portion is disposed on a position facing the raw material, and

a height of the low radiation portion is 40% or more and 80% or less of a height of the raw material contained in the crucible.

11. The crystal growing apparatus according to claim 10 ,

wherein a radiation rate of the low radiation portion is 0.6 times or less than a radiation rate of the main body portion.

12. The crystal growing apparatus according to claim 10 ,

wherein the main body portion is composed of graphite, and

the low radiation portion is composed of an element, carbide, or nitride including an element selected from the group consisting of Ta, Mo, Nb, Hf, W, and Zr, or a mixture thereof.

13. The crystal growing apparatus according to claim 10 ,

wherein an outer surface of the main body portion is uneven, and

an outer surface of the low radiation portion is a flat surface.

14. The crystal growing apparatus according to claim 10 , further comprising:

a support, wherein,

the support is positioned on a lower portion of the crucible and supports the crucible, and

the support rotates in a radial direction.

15. The crystal growing apparatus according to claim 10 , further comprising:

a heat insulating material, wherein,

the heat insulating material is a member having a thermal conductivity equal to or smaller than 5 W/mK.

16. The crystal growing apparatus according to claim 14 , further comprising:

a heat insulating material, wherein,

the heat insulating material is a member having a thermal conductivity equal to or smaller than 5 W/mK.

17. The crystal growing apparatus according to claim 16 , wherein the support passes through the heat insulating material and projects downward from the crucible.

Assignments (3)
CHANGE OF ADDRESS Recorded Feb 14, 2024
From: RESONAC CORPORATION
To: RESONAC CORPORATION
Reel/Frame 066599/0037 →
CHANGE OF NAME Recorded Jun 23, 2023
From: SHOWA DENKO K.K.
To: RESONAC CORPORATION
Reel/Frame 064082/0513 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 4, 2019
From: KINDAICHI, RIMPEI; OKUNO, YOSHISHIGE; SHONAI, TOMOHIRO
To: SHOWA DENKO K.K.
Reel/Frame 051174/0103 →