IP Library Granted Patent US 11,158,828
Granted Patent B2
US 11,158,828 · App. 16/711,842 · Granted Oct 26, 2021

Solar cell comprising an oxide-nanoparticle buffer layer and method of fabrication

Inventors: Kevin Alexander Bush (Stanford, CA); Colin David Bailie (Morgan Hill, CA); Michael David McGehee (Palo Alto, CA); Tomas Leijtens (Golden, CO)
Assignee: The Board of Trustees of the Leland Stanford Junior University
H01L51/442H01L31/02167H01L31/0725H01L51/424H01L51/4233H01L51/441H01L27/302H01L51/0047H01L2031/0344H01L2251/303Y02E10/549
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Quick Facts
Patent No.
US 11,158,828
App. No.
16/711,842
Granted
Oct 26, 2021
Kind
B2
Abstract

A buffer layer for protecting an organic layer during high-energy deposition of an electrically conductive layer is disclosed. Buffer layers in accordance with the present invention are particularly well suited for use in perovskite-based single-junction solar cells and double-junction solar cell structures that include at least one perovskite-based absorbing layer. In some embodiments, the buffer layer comprises a layer of oxide-based nanoparticles that is formed using solution-state processing, in which a solution comprising the nanoparticles and a volatile solvent is spin coated onto a structure that includes the organic layer. The solvent is subsequently removed in a low-temperature process that does not degrade the organic layer.

Claims (42)

1. A method for forming an optoelectronic device, the method comprising:

providing a first organic layer;

forming a first buffer layer comprising a first plurality of oxide nanoparticles, wherein the first buffer layer is configured to protect the first organic layer during a sputter-deposition process; and

forming a first transparent conductive electrode such that it is disposed on the first buffer layer, wherein the first transparent conductive electrode includes a first layer that is formed via sputter deposition.

2. The method of claim 1 wherein the first organic layer comprises a first perovskite.

3. The method of claim 1 wherein the first buffer layer is formed by operations including:

providing a first solution comprising a solvent and the first plurality of nanoparticles, wherein the nanoparticles of the first plurality thereof comprise a wide bandgap oxide;

distributing the first solution to form a nascent first buffer layer; and

enabling the removal of the solvent from the first solution, wherein the solvent is removed while the temperature of the optoelectronic device remains less than or equal to 200° C.

4. The method of claim 1 wherein the first layer includes indium tin oxide (ITO).

5. The method of claim 1 further comprising forming the first organic layer on a first layer stack comprising a first absorption layer having a first energy bandgap (EG);

wherein the first organic layer is formed such that is comprises a first perovskite having a second EG that is higher than the first EG; and

wherein the first layer stack includes a second transparent conductive electrode that is between the first organic layer and the first absorption layer.

6. The method of claim 5 further comprising:

forming a second organic layer on a second layer stack comprising the first organic layer and the first absorption layer, wherein the second organic layer comprises a second perovskite having a third EG that is higher than the second EG;

forming a second buffer layer comprising a second plurality of oxide nanoparticles, the second organic layer being between the second layer stack and the second buffer layer; and

forming a third transparent conducting electrode on the second buffer layer, the third transparent electrode being formed via a sputtering process.

7. The method of claim 6 wherein the first absorption layer comprises a third perovskite.

8. The method of claim 1 wherein the first plurality of oxide nanoparticles includes at least one nanoparticle comprising a material selected from the group consisting of zinc oxide (ZnO), tin oxide (SnO 2 ), titanium oxide (TiO 2 ), tungsten oxide (W 2 O 3 ), aluminum oxide (Al 2 O 3 ), silicon dioxide (SiO 2 ), nickel oxide (NiO), and molybdenum oxide (MoO x ).

9. The method of claim 8 wherein the oxide nanoparticles of the first plurality thereof are doped with a first dopant that is selected from the group consisting of aluminum, hydrogen, indium, and gallium.

10. The method of claim 1 wherein the optoelectronic device is formed such that it is a device selected from the group consisting of a solar cell, a light emitting diode, and an electrochromic.

11. A method for forming an optoelectronic device, the method comprising:

providing a first organic layer disposed on a substrate, wherein the first organic layer comprises a first perovskite;

forming a first buffer layer configured to protect the first organic layer during a sputter-deposition process, the first buffer layer comprising a first plurality of nanoparticles that includes at least one nanoparticle that comprises a wide-bandgap oxide; and

sputter depositing a first layer such that it is disposed on the first buffer layer and first organic layer, wherein the first layer comprises a first material that is a transparent conductor, and wherein the first layer defines at least a portion of a first transparent conductive electrode.

12. The method of claim 11 wherein the first buffer layer is formed by operations including:

providing a first solution comprising a solvent and the first plurality of nanoparticles, wherein the nanoparticles of the first plurality thereof comprise a wide bandgap oxide;

distributing the first solution to form a nascent first buffer layer; and

enabling the removal of the solvent from the first solution, wherein the solvent is removed while the temperature of the optoelectronic device remains less than or equal to 200° C.

13. The method of claim 11 wherein the first material includes indium tin oxide (ITO).

14. The method of claim 11 further comprising:

forming the first organic layer on a first layer stack comprising a first absorption layer having a first energy bandgap (EG), wherein the first layer stack includes a second transparent conductive electrode that is between the first organic layer and the first absorption layer;

wherein the first perovskite has a second EG that is higher than the first EG; and

wherein the first absorption layer includes a second material that is selected from the group consisting of silicon, copper indium gallium selenide (CIGS), and a perovskite.

15. The method of claim 14 further comprising:

forming a second organic layer such that it is disposed on a second layer stack comprising the first organic layer and the first layer stack, wherein the second organic layer comprises a second perovskite having a third EG that is higher than the second EG;

forming a second buffer layer such that it is disposed on the second organic layer, the second buffer layer comprising a second plurality of nanoparticles that includes at least one nanoparticle comprising a wide-bandgap oxide; and

sputter depositing a third layer such that the third layer is disposed on the second organic layer, wherein the third layer comprises a third material that is a transparent conductor, and wherein the third layer defines at least a portion of a third transparent conductive electrode.

16. The method of claim 14 wherein the second material comprises a third perovskite.

17. The method of claim 11 wherein the at least one nanoparticle includes a material selected from the group consisting of zinc oxide (ZnO), tin oxide (SnO 2 ), titanium oxide (TiO 2 ), tungsten oxide (W 2 O 3 ), aluminum oxide (Al 2 O 3 ), silicon dioxide (SiO 2 ), nickel oxide (NiO), and molybdenum oxide (MoO x ).

18. The method of claim 11 wherein the at least one nanoparticle is doped with a first dopant that is selected from the group consisting of aluminum, hydrogen, indium, and gallium.

19. The method of claim 11 wherein the optoelectronic device is formed such that it is a device selected from the group consisting of a solar cell, a light emitting diode, and an electrochromic.

Assignments (2)
CONFIRMATORY LICENSE Recorded May 25, 2021
From: STANFORD UNIVERSITY
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 056365/0940 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 12, 2019
From: BUSH, KEVIN ALEXANDER; BAILIE, COLIN DAVID; MCGEHEE, MICHAEL DAVID; LEIJTENS, TOMAS
To: THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
Reel/Frame 051264/0020 →
Continuity (4)
Division 15769287
Provisional Application 62398220 · Sep 22, 2016
Provisional Application 62245260 · Oct 22, 2015
Related Publication 20200136072A1 · Apr 30, 2020