IP Library Granted Patent US 11,101,317
Granted Patent B2
US 11,101,317 · App. 16/713,513 · Granted Aug 24, 2021

Method of manufacturing element array and method of removing specific element

Inventors: Toshinobu Miyagoshi (Tokyo, JP); Seijiro Sunaga (Tokyo, JP); Osamu Shindo (Tokyo, JP); Yasuo Kato (Tokyo, JP)
Assignee: TDK CORPORATION
H01L27/156C09J201/00H01L33/0095B32B38/10B32B43/006C09J2301/416C09J2301/502Y10S156/924Y10S156/931Y10S156/937Y10S156/941Y10S156/942Y10T156/1137Y10T156/1158Y10T156/1917Y10T156/1939
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Quick Facts
Patent No.
US 11,101,317
App. No.
16/713,513
Filed
Dec 13, 2019
Granted
Aug 24, 2021
Kind
B2
Art Unit
1745
USPC
156/701
Abstract

In a method of manufacturing an element array, prepared is an adhesive sheet in which elements are arranged in a predetermined array on an adhesive layer. A specific element among the arrayed elements is removed from the adhesive sheet by radiating a laser to the specific element. The arrayed elements are directly or indirectly transferred onto a mounting substrate.

Claims (24)

1. A method of manufacturing an element array, comprising the steps of:

preparing an adhesive sheet in which elements are arranged in a predetermined array on an adhesive layer;

removing a specific element among the arrayed elements from the adhesive sheet by directly radiating a laser on a surface of the specific element; and

directly or indirectly transferring the arrayed elements onto a mounting substrate.

2. The method according to claim 1 , further comprising a step of attaching a good element different from the specific element onto the adhesive layer of the adhesive sheet at a vacant position from which the specific element is removed.

3. The method according to claim 1 , further comprising the steps of:

forming the elements in a predetermined array on an element-formation substrate; and

transferring the arrayed elements formed on the element-formation substrate onto the adhesive layer of the adhesive sheet.

4. The method according to claim 3 , further comprising a step of inspecting each of the elements formed in the predetermined array on the element-formation substrate.

5. The method according to claim 1 , further comprising a step of inspecting each of the elements formed in the predetermined array on the adhesive layer of the adhesive sheet.

6. The method according to claim 1 , wherein the elements are display elements.

7. The method according to claim 1 , wherein the specific element is radiated by the laser in a radiation area having a rectangular spot shape fitted to a plane shape of the specific element.

8. The method according to claim 1 , wherein the specific element is radiated by the laser in an area including an entire plane shape of the specific element.

9. The method according to claim 1 , wherein the laser has an output power and a wavelength determined so that the specific element is flipped away from the adhesive sheet by the laser radiation with three or less applications of the laser radiation.

10. The method according to claim 9 , wherein the laser has a wavelength of 532 nm or less.

11. The method according to claim 1 , wherein the surface is an exposed surface.

12. A method of removing a specific element, comprising the steps of:

preparing an adhesive sheet in which elements are arranged in a predetermined array on an adhesive layer; and

directly radiating a laser on a surface of a specific element among the elements arranged in the predetermined array so as to remove the specific element from the adhesive sheet and to leave the other elements on the adhesive sheet.

13. The method according to claim 12 , wherein the specific element is radiated by the laser in a radiation area having a rectangular spot shape fitted to a plane shape of the specific element.

14. The method according to claim 12 , wherein the specific element is radiated by the laser in an area including an entire plane shape of the specific element.

15. The method according to claim 12 , wherein the laser has an output power and a wavelength determined so that the specific element is flipped away from the adhesive sheet by the laser radiation with three or less applications of the laser radiation.

16. The method according to claim 15 , wherein the laser has a wavelength of 532 nm or less.

17. The method according to claim 12 , wherein the surface is an exposed surface.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 1, 2020
From: MIYAGOSHI, TOSHINOBU; SUNAGA, SEIJIRO; SHINDO, OSAMU; KATO, YASUO
To: TDK CORPORATION
Reel/Frame 052286/0352 →
Priority Claims (1)
JP JP2018-234755 · Dec 14, 2018 · national
Continuity (1)
Related Publication 20200227468A1 · Jul 16, 2020