Nanoribbon thick gate devices with differential ribbon spacing and width for SOC applications
Embodiments disclosed herein include nanowire and nanoribbon devices with non-uniform dielectric thicknesses. In an embodiment, the semiconductor device comprises a substrate and a plurality of first semiconductor layers in a vertical stack over the substrate. The first semiconductor layers may have a first spacing. In an embodiment, a first dielectric surrounds each of the first semiconductor layers, and the first dielectric has a first thickness. The semiconductor device may further comprise a plurality of second semiconductor layers in a vertical stack over the substrate, where the second semiconductor layers have a second spacing that is greater than the first spacing. In an embodiment a second dielectric surrounds each of the second semiconductor layers, and the second dielectric has a second thickness that is greater than the first thickness.
1. A semiconductor device, comprising:
a substrate;
a plurality of first semiconductor layers in a vertical stack over the substrate, wherein the first semiconductor layers have a first spacing;
a first dielectric surrounding each of the first semiconductor layers, wherein the first dielectric has a first thickness;
a plurality of second semiconductor layers in a vertical stack over the substrate, wherein the second semiconductor layers have a second spacing that is greater than the first spacing, wherein each one of the plurality of second semiconductor layers has a thickness different than a thickness of each one of the plurality of first semiconductor layers, wherein each one of the plurality of second semiconductor layers has a width different than a width of each one of the plurality of first semiconductor layers, and wherein individual ones of the plurality of second semiconductor layers are staggered with corresponding individual ones of the plurality of first semiconductor layers; and
a second dielectric surrounding each of the second semiconductor layers, wherein the second dielectric has a second thickness that is greater than the first thickness.
2. The semiconductor device of claim 1 , wherein the first semiconductor layers and the second semiconductor layers are nanowires or nanoribbons.
3. The semiconductor device of claim 1 , wherein a surface facing the substrate of a bottommost first semiconductor layer is aligned with a surface facing the substrate of a bottommost second semiconductor layer.
4. The semiconductor device of claim 1 , wherein a surface facing the substrate of a bottommost first semiconductor layer is misaligned with a surface facing the substrate of a bottommost second semiconductor layer.
5. The semiconductor device of claim 1 , wherein the second gate dielectric comprises:
a first dielectric layer over the second semiconductor layers; and
a second dielectric layer over the first dielectric layer.
6. The semiconductor device of claim 5 , wherein the first dielectric layer is an oxide, and wherein the second dielectric layer is a dipole material.
7. The semiconductor device of claim 6 , wherein the first dielectric layer is SiO 2 or HfO 2 and wherein the second dielectric layer comprises one or more of La 2 O 3 , ZrO 2 , and TiO 2 .
8. A semiconductor device, comprising:
a substrate;
a first transistor over the substrate, wherein the first transistor comprises:
a plurality of first nanoribbons, the first nanoribbons arranged in a vertical stack with a first spacing between each first nanoribbon;
a first gate structure over the plurality first nanoribbons, the first gate structure defining a first channel region of the plurality of first nanoribbons, wherein the first gate structure comprises:
a first gate dielectric wrapping around the plurality of first nanoribbons, the first gate dielectric having a first thickness; and
a first gate electrode wrapping around the first gate dielectric; and
a second transistor over the substrate, wherein the second transistor comprises:
a plurality of second nanoribbons, the second nanoribbons arranged in a vertical stack with a second spacing between each second nanoribbon, wherein the second spacing is greater than the first spacing, wherein each one of the plurality of second nanoribbons has a thickness different than a thickness of each one of the plurality of first nanoribbons, wherein each one of the plurality of second nanoribbons has a width different than a width of each one of the plurality of first nanoribbons, and wherein individual ones of the plurality of second nanoribbons are staggered with corresponding individual ones of the plurality of first nanoribbons;
a second gate structure over the plurality second nanoribbons, the second gate structure defining a second channel region of the plurality of second nanoribbons, wherein the first gate structure comprises:
a second gate dielectric wrapping around the plurality of second nanoribbons, the second gate dielectric having a second thickness that is greater than the first thickness; and
a second gate electrode wrapping around the second gate dielectric.
9. The semiconductor device of claim 8 , wherein the second spacing is an integer multiple of the first spacing.
10. The semiconductor device of claim 9 , wherein the second spacing is twice the first spacing.
11. The semiconductor device of claim 8 , wherein a bottommost second nanoribbon is aligned with a bottommost first nanoribbon.
12. The semiconductor device of claim 8 , wherein there are more first nanoribbons than second nanoribbons.
13. The semiconductor device of claim 12 , wherein the number of first nanoribbons is an integer multiple of the number of second nanoribbons.
14. The semiconductor device of claim 8 , wherein the second thickness is at least twice the first thickness.
15. The semiconductor device of claim 8 , wherein the first spacing is approximately 7 nm or less and wherein the second spacing is approximately 7 nm or greater.
16. An electronic device, comprising:
a board;
an electronic package coupled to the board; and
a die electrically coupled to the electronic package, wherein the die comprises:
a substrate;
a plurality of first semiconductor layers in a vertical stack over the substrate, wherein the first semiconductor layers have a first spacing;
a first dielectric surrounding each of the first semiconductor layers, wherein the first dielectric has a first thickness;
a plurality of second semiconductor layers in a vertical stack over the substrate, wherein the second semiconductor layers have a second spacing that is greater than the first spacing, wherein each one of the plurality of second semiconductor layers has a thickness different than a thickness of each one of the plurality of first semiconductor layers, wherein each one of the plurality of second semiconductor layers has a width different than a width of each one of the plurality of first semiconductor layers, and wherein individual ones of the plurality of second semiconductor layers are staggered with corresponding individual ones of the plurality of first semiconductor layers; and
a second dielectric surrounding each of the second semiconductor layers, wherein the second dielectric has a second thickness that is greater than the first thickness.
17. The electronic device of claim 16 , wherein the first semiconductor layers and the second semiconductor layers are nanowires or nanoribbons.
18. The electronic device of claim 16 , wherein the number of first semiconductor layers is an integer multiple of the number of second semiconductor layers.