Three dimensional circuit formation
Devices, methods, and systems for forming an electrical circuit out of a conductor embedded in two layers of substrate are disclosed. Portions of the two layers of substrate and the conductor are removed, forming a cavity through the two layers and the conductor. A blocker material is deposited along the wall of the cavity. A portion of the blocker material and adjacent layer of the substrate is removed forming another cavity in contact with a part of the conductor. A surface of the second cavity is then electroless plated by a conductive metal to form part of the electrical circuit.
1. A method of forming an electrical circuit out of a substrate having a first and a second layer with a conductor positioned between the first and second layers, comprising:
removing a portion of the first layer, the conductor, and the second layer to form a first cavity;
depositing a blocker material in the first cavity;
removing a first portion of the blocker material and only a portion of the first layer proximal to the first portion of the blocker material to form a second cavity; and
plating a surface of the second cavity with a metal.
2. The method of claim 1 , wherein the surface of the second cavity comprises a blocker surface and a non-blocker surface, and wherein the metal does not plate to the blocker surface.
3. The method of claim 2 , wherein the non-blocker surface comprises a portion of the conductor and the first layer.
4. The method of claim 2 , wherein the metal plates to the non-blocker surface.
5. The method of claim 1 , wherein a portion of the surface of the second cavity comprises a blocker surface separating a first non-blocker surface of the second cavity from a second non-blocker surface of the second cavity.
6. The method of claim 5 , wherein the metal plates to the first and second non-blocker surface.
7. The method of claim 1 , further comprising:
removing a second portion of the blocker material and a portion of the second layer proximal to the blocker material to form a third cavity; and
plating a surface of the third cavity with a metal.
8. The method of claim 7 , wherein the surface of the second cavity comprises a blocker surface and a non-blocker surface, and wherein the metal plates to the non-blocker surface but not the blocker surface.
9. The method of claim 1 , further comprising removing at least a portion of the plated metal.
10. The method of claim 1 , further comprising removing a portion of the second layer proximal to the conductor.
11. The method of claim 1 , wherein the first cavity forms at least one of a trench, a blind via, or a through hole.
12. The method of claim 1 , wherein the blocker material is a metal plating blocker.
13. The method of claim 1 , further comprising the step of removing a second portion of the blocker material and a further portion of the first layer proximal to the second portion of the blocker material to form a third cavity, wherein the third cavity is separated from the second cavity by the blocker material.
14. The method of claim 1 , wherein the step forming the second cavity further comprises removing a portion of the second layer proximal to the first portion of the blocker material, and wherein the plated surface of the second cavity comprises a surface of the first layer and the second layer.