Method of manufacturing tantalum carbide material
A method of manufacturing a tantalum carbide material of the present invention includes heating a tantalum material ( 1 ) interposed between a pair of graphite guide members ( 2 and 3 ) under an atmosphere of a carbon source-containing gas ( 4 ) at 1,500° C. or higher for 0.5 hours or longer.
1. A method of manufacturing a tantalum carbide material in which a tantalum material interposed between a pair of graphite guide members is heated under a carbon source-containing gas atmosphere at 1,500° C. or higher for 0.5 hours or longer to make tantalum carbide from all the tantalum material.
2. The method of manufacturing a tantalum carbide material according to claim 1 , comprising
a process of preparing the tantalum material interposed between the pair of graphite guide members;
a process of placing the tantalum material interposed between the pair of graphite guide members and a hydrocarbon gas source in a container; and
a process of, while the inside of the container is made a closed space, heating the hydrocarbon gas source to generate the carbon source-containing gas and heating the tantalum material under an atmosphere of the carbon source-containing gas to obtain a tantalum carbide material.
3. The method of manufacturing a tantalum carbide material according to claim 2 ,
wherein the hydrocarbon gas source includes hydrocarbons, and
wherein the hydrocarbons include one or both of aromatic hydrocarbons and aliphatic hydrocarbons.
4. The method of manufacturing a tantalum carbide material according to claim 1 ,
wherein the thickness of the tantalum material is 0.1 mm or more and 3.0 mm or less.
5. The method of manufacturing a tantalum carbide material according to claim 1 ,
wherein the pair of graphite guide members are a pair of graphite plates.
6. The method of manufacturing a tantalum carbide material according to claim 1 ,
wherein the carbon source-containing gas is generated by heating a hydrocarbon gas source which includes hydrocarbons and graphite powder.