Substrate treating apparatus and substrate transporting method
View Patent ↗A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.
1. A substrate treating apparatus for treating a substrate, comprising:
a plurality of treating blocks arranged in line;
a first indexer block connected to a treating block of the treating blocks on a first end and on which a first carrier platform for placing a carrier capable of accommodating a plurality of substrates thereon is disposed; and
a second indexer block disposed between at least one treating block on a first end side and at least one treating block on a second end side of the treating blocks and on which a second carrier platform for placing a carrier thereon is disposed; wherein
the first indexer block takes one substrate from the carrier placed on the first carrier platform and sends the taken substrate to the at least one treating block on the first end side,
the at least one treating block on the first end side performs a predetermined treatment on the sent substrate, and
the second indexer block sends the substrate, treated in the at least one treating block on the first end side, to the at least one treating block on the second end side,
the at least one treating block on the second end side performs a predetermined treatment on the sent substrate, and
the second indexer block returns the substrate treated in the at least one treating block on the second end side to the carrier placed on the second carrier platform,
the substrate treating apparatus further comprising:
a carrier transport mechanism configured to transport the carrier between the first carrier platform and the second carrier platform; wherein
the carrier transport mechanism is mounted on the at least one treating block on the first end side.
2. The substrate treating apparatus according to claim 1 , wherein
the treating blocks includes a first treating block configured to perform a first treatment, and a second treating block configured to perform a second treatment,
the first indexer block is connected to the first treating block,
the first treating block is connected to the second indexer block,
the second indexer block is connected to the second treating block,
the first indexer block takes the one substrate from the carrier placed on the first carrier platform and sends the taken substrate to the first treating block,
the first treating block performs a first treatment on the substrate, having been sent from the first indexer block, and sends the substrate subjected to the first treatment to the second indexer block,
the second indexer block sends the substrate subjected to the first treatment to the second treating block,
the second treating block performs a second treatment on the substrate, having been sent from the second indexer block, and returns the substrate subjected to the second treatment to the second indexer block,
the second indexer block returns the substrate subjected to the second treatment to the carrier disposed on the second carrier platform, and
the carrier transport mechanism is mounted on the first treating block.
3. A substrate transporting method for a substrate treating apparatus including:
a plurality of treating blocks arranged in line; and
a first indexer block connected to a treating block of the treating blocks on a first end and on which a first carrier platform for placing a carrier capable of accommodating a plurality of substrates thereon is disposed; the method comprising:
a taking and sending step of causing the first indexer block to take one substrate from the carrier placed on the first carrier platform and to send the taken substrate to at least one treating block on a first end side of the treating blocks;
a first treating step of causing the at least one treating block on the first end side to perform a predetermined treatment on the sent substrate;
a first sending step of causing a second indexer block, disposed between the at least one treating block on the first end side and at least one treating block on a second end side of the treating blocks, to send the substrate treated in the at least one treating block on the first end side to the at least one treating block on the second end side;
a second treating step of causing the at least one treating block on the second end side to perform a predetermined treatment on the sent substrate; and
a returning step of causing the second indexer block to return the substrate, treated in the at least one treating block on the second end side, to the carrier placed on a second carrier platform provided in the second indexer block,
the substrate treating apparatus further including:
a carrier transport mechanism configured to transport the carrier between the first carrier platform and the second carrier platform; wherein
the carrier transport mechanism is mounted on the at least one treating block on the first end side.