X-ray inspection apparatus and x-ray inspection method
Provided are an X-ray inspection apparatus and an X-ray inspection method. The X-ray inspection apparatus includes: an X-ray source; a sample moving mechanism; the TDI sensor; and a TDI computing unit. The TDI computing unit includes a data transfer unit configured to transfer, to an outside, data of accumulated charges obtained by accumulating and transferring the charges, and has a function of setting in advance, as a determination region, a plurality of columns of line sensors with which the sample is detectable, and of detecting the sample in the determination region. The data transfer unit is configured to set, as detecting rows, rows of the pixels with which the sample has been detected in the determination region and rows around the rows, and transfer, to the outside, the data of accumulated charges only for pixels in the detecting rows.
1. An X-ray inspection apparatus, comprising:
an X-ray source configured to irradiate a sample with an X-ray;
a sample moving mechanism configured to move the sample in a particular direction during the irradiation with the X-ray from the X-ray source;
a TDI sensor, which is mounted on an opposite side of the X-ray source with respect to the sample, and includes a plurality of columns of line sensors in the particular direction, the line sensors each including a plurality of pixels arrayed in a direction orthogonal to the particular direction so that the pixels are arranged in matrix, the TDI sensor being configured to detect the X-ray that has been transmitted through the sample with the pixels; and
a TDI computing unit configured to control accumulation and transfer of charges in a plurality of the pixels in the particular direction,
the TDI computing unit including a data transfer unit configured to transfer, to an outside, data of accumulated charges obtained by accumulating and transferring the charges, and having a function of setting in advance, as a determination region, a plurality of columns of the line sensors with which the sample is detectable, and of detecting the sample in the determination region,
the data transfer unit being configured to set, as detecting rows, rows of the pixels with which the sample has been detected in the determination region and rows around the rows, and transfer, to the outside, the data of accumulated charges only for pixels in the detecting rows.
2. The X-ray inspection apparatus according to claim 1 , wherein the TDI computing unit is configured to set in advance, as the determination region, a plurality of columns of the line sensors of all columns of the line sensors with which the sample is detectable first along with the movement of the sample, and to accumulate and transfer the charges only with pixels in the detecting rows in a region formed of the line sensors in columns subsequent to the determination region.
3. The X-ray inspection apparatus according to claim 1 or 2 , wherein the TDI computing unit is configured to suitably set a number of columns of the line sensors in the determination region depending on a material of the sample.
4. An X-ray inspection method, comprising:
an X-ray irradiation step of irradiating, by an X-ray source, a sample with an X-ray;
a sample moving step of continuously moving the sample in a particular direction during the irradiation with the X-ray from the X-ray source;
an X-ray detection step of detecting, by a TDI sensor, which is mounted on an opposite side of the X-ray source with respect to the sample, and includes a plurality of columns of line sensors in the particular direction, the line sensors each including a plurality of pixels arrayed in a direction orthogonal to the particular direction so that the pixels are arranged in matrix, the X-ray that has been transmitted through the sample with the pixels;
a TDI computing step of accumulating and transferring charges in a plurality of the pixels in the particular direction; and
a data transfer step of transferring, to an outside, data of accumulated charges obtained by accumulating and transferring the charges in the TDI computing step,
the TDI computing step including setting in advance, as a determination region, a plurality of columns of the line sensors with which the sample is detectable, and determining to detect the sample in the determination region,
the data transfer step including setting, as detecting rows, rows of the pixels with which the sample has been detected in the determination region and rows around the rows, and transferring, to the outside, the data of accumulated charges only for pixels in the detecting rows.
5. The X-ray inspection method according to claim 4 , wherein the TDI computing step includes setting in advance, as the determination region, a plurality of columns of the line sensors of all columns of the line sensors with which the sample is detectable first along with the movement of the sample, and accumulating and transferring the charges for pixels in a next adjacent column only with pixels in the detecting rows in a region formed of the line sensors in columns subsequent to the determination region.