IP Library Granted Patent US 11,631,780
Granted Patent B2
US 11,631,780 · App. 16/737,828 · Granted Apr 18, 2023

Light-emitting metal-oxide-semiconductor devices and associated systems, devices, and methods

Inventors: Martin F. Schubert (Sunnyvale, CA); Vladimir Odnoblyudov (Danville, CA)
Assignee: Micron Technology, Inc.
H01L33/0041H01L27/15H01L33/06H01L33/32H01L33/38H05B44/00F21V23/003F21Y2115/10H05B45/00
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Quick Facts
Patent No.
US 11,631,780
App. No.
16/737,828
Granted
Apr 18, 2023
Kind
B2
Abstract

Various embodiments of solid state transducer (“SST”) devices are disclosed. In several embodiments, a light emitter device includes a metal-oxide-semiconductor (MOS) capacitor, an active region operably coupled to the MOS capacitor, and a bulk semiconductor material operably coupled to the active region. The active region can include at least one quantum well configured to store first charge carriers under a first bias. The bulk semiconductor material is arranged to provide second charge carriers to the active region under the second bias such that the active region emits UV light.

Claims (38)

1. A light emitter, comprising:

a semiconductor structure including an active region and a bulk material having a first surface and a third surface opposite the first surface and connected to a fourth surface of the active region, wherein the active region is configured to emit electromagnetic radiation, and wherein the bulk material is configured to supply charge carriers to the active region;

a first electrode including a first conductive contact directly connected to the first surface of the bulk material; and

a second electrode including a dielectric layer and a second conductive contact connected to the dielectric layer, wherein the dielectric layer is adjacent to a second surface of the active region opposite the fourth surface such that the second conductive contact, the dielectric layer, and the semiconductor structure collectively form a metal-oxide-semiconductor capacitor.

2. The light emitter of claim 1 , wherein:

the active region includes a first semiconductor material having a first bandgap energy;

the bulk material includes a second semiconductor material having a second bandgap energy that is greater than the first bandgap energy; and

the dielectric layer includes a dielectric material having a third bandgap energy that is greater than the second bandgap energy.

3. The light emitter of claim 1 , wherein the active region includes one or more quantum wells.

4. The light emitter of claim 1 , wherein the semiconductor structure includes AlGaN materials exclusive of p-type AlGaN materials.

5. The light emitter of claim 1 , wherein the dielectric layer is configured to support an electric field that draws the charge carriers from the bulk material to the active region when a voltage applied to the second electrode.

6. The light emitter of claim 1 , wherein the dielectric layer includes polymeric materials.

7. The light emitter of claim 1 , wherein the active region is configured to accumulate the charge carriers supplied from the bulk material in response to a reverse bias applied between the first conductive contact and the second conductive contact.

8. The light emitter of claim 7 , wherein the active region is configured to emit the electromagnetic radiation while the charge carriers accumulated therein are depleted in response to a forward bias applied between the first conductive contact and the second conductive contact.

9. The light emitter of claim 1 , further comprising:

a spacer disposed between the active region and the dielectric layer, the spacer including an intrinsic or lightly doped semiconductor material.

10. The light emitter of claim 9 , wherein the intrinsic or lightly doped semiconductor material includes a fourth bandgap energy that is greater than a first bandgap energy of a first semiconductor material that the active region includes.

11. A method of operating a light emitter, comprising:

applying a first voltage to an electrode of the light emitter, the electrode including a dielectric layer adjacent to an active region of a semiconductor structure of the light emitter, wherein the first voltage is configured to bring the active region into inversion; and

applying a second voltage to the electrode after applying the first voltage, wherein the second voltage is configured to bring the active region into accumulation, thereby emitting electromagnetic radiation from the active region.

12. The method of claim 11 , wherein:

the active region includes a first semiconductor material having a first bandgap energy;

a bulk material of the semiconductor structure includes a second semiconductor material having a second bandgap energy that is greater than the first bandgap energy, the bulk material connected to the active region; and

the dielectric layer includes a dielectric material having a third bandgap energy that is greater than the second bandgap energy.

13. The method of claim 11 , wherein the dielectric layer is configured to support an electric field that draws charge carriers from a bulk material of the semiconductor structure to the active region when the first voltage or the second voltage is applied to the electrode.

14. The method of claim 11 , wherein the first voltage reverse biases the semiconductor structure, and wherein the second voltage forward biases the semiconductor structure.

15. The method of claim 11 , wherein the active region is configured to accumulate charge carriers drawn from a bulk material of the semiconductor structure in response to applying the first voltage.

16. The method of claim 15 , wherein the active region is configured to emit the electromagnetic radiation while the charge carriers accumulated therein are depleted in response to applying the second voltage.

17. A method of forming a light emitter, comprising:

forming a semiconductor structure including an active region and a bulk material having a first surface and a third surface opposite the first surface and connected to a fourth surface of the active region, wherein the active region is configured to emit electromagnetic radiation, and wherein the bulk material is configured to supply charge carriers to the active region;

forming a first electrode including a first conductive contact directly connected to the first surface of the bulk material, wherein the first electrode is configured to supply a current corresponding to the charge carriers that the bulk material supplies to the active region; and

forming a second electrode including a dielectric layer and a second conductive contact connected to the dielectric layer, wherein the dielectric layer is adjacent to a second surface of the active region opposite the fourth surface such that the second conductive contact, the dielectric layer, and the semiconductor structure collectively form a metal-oxide-semiconductor capacitor, and wherein the dielectric layer is configured to support an electric field when an electrical bias is applied between the first conductive contact and the second conductive contact.

18. The method of claim 17 , wherein:

the active region includes a first semiconductor material having a first bandgap energy;

the bulk material includes a second semiconductor material having a second bandgap energy that is greater than the first bandgap energy; and

the dielectric layer includes a dielectric material having a third bandgap energy that is greater than the second bandgap energy.

19. The method of claim 17 , further comprising:

forming a spacer disposed between the active region and the dielectric layer, wherein the spacer is configured to reduce interfacial states between the active region and the dielectric layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 8, 2020
From: SCHUBERT, MARTIN F.; ODNOBLYUDOV, VLADIMIR
To: MICRON TECHNOLOGY, INC.
Reel/Frame 051456/0488 →
Continuity (5)
Continuation 16536528 · Aug 9, 2019
Continuation 15976794 · May 10, 2018
Continuation 15249140 · Aug 26, 2016
Division 13918655 · Jun 14, 2013
Related Publication 20200152823A1 · May 14, 2020
Cited By (1)
US 12,563,864