IP Library Granted Patent US 10,418,509
Granted Patent B2
US 10,418,509 · App. 15/976,794 · Granted Sep 17, 2019

Light-emitting metal-oxide-semiconductor devices and associated systems, devices, and methods

Inventors: Martin F. Schubert (Sunnyvale, CA); Vladimir Odnoblyudov (Danville, CA)
Assignee: Micron Technology, Inc.
H01L33/0041H01L27/15H01L33/06H01L33/32H01L33/38H05B33/08F21V23/003F21Y2115/10
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,418,509
App. No.
15/976,794
Granted
Sep 17, 2019
Kind
B2
Abstract

Various embodiments of solid state transducer (“SST”) devices are disclosed. In several embodiments, a light emitter device includes a metal-oxide-semiconductor (MOS) capacitor, an active region operably coupled to the MOS capacitor, and a bulk semiconductor material operably coupled to the active region. The active region can include at least one quantum well configured to store first charge carriers under a first bias. The bulk semiconductor material is arranged to provide second charge carriers to the active region under the second bias such that the active region emits UV light.

Claims (38)

1. A method of forming a light emitter device, the method comprising:

forming a semiconductor structure including a first semiconductor material and a second semiconductor material, wherein the second semiconductor material includes an active region having a bandgap configured to emit light; and

operably coupling an electrode to the second semiconductor material, wherein the electrode includes a conductive contact and a dielectric material between the second semiconductor material and the conductive contact, and wherein the electrode is configured to—

accumulate charge in the active region, and

draw a discharge current through the first semiconductor material to discharge at least a portion of the accumulated charge.

2. The method of claim 1 wherein the first semiconductor material includes an N-type semiconductor material, and wherein the method further comprises operably coupling the first semiconductor material to the electrode without an intermediary P-type material.

3. The method of claim 1 , further comprising forming a spacer between the second semiconductor material and the electrode.

4. The method of claim 1 wherein the conductive contact is a first conductive contact, and wherein the method further comprises coupling a second conductive contact to the first semiconductor material, wherein the dielectric material of the electrode prevents current flow between the first and second contacts.

5. The method of claim 4 , further comprising operably coupling a waveform generator to the first and second conductive contacts, wherein the waveform generator is configured to generate a bias signal that alternatingly causes the electrode to accumulate the charge in the active region and draw the discharge current through the first semiconductor material.

6. The method of claim 1 wherein forming the semiconductor structure includes forming the first semiconductor material to have a thickness more than ten times greater than the thickness of the second semiconductor material.

7. The method of claim 1 wherein forming the semiconductor structure includes forming the active region to include at least one quantum well.

8. A method of forming an ultraviolet (UV) light emitter device, the method comprising:

coupling a first semiconductor material having an active region to a metal-oxide-semiconductor (MOS) capacitor, wherein the active region includes at least one quantum well configured to store first charge carriers under a first bias; and

coupling a second semiconductor material to the first semiconductor material, wherein the first semiconductor material is configured to provide second charge carriers to the active region such that the active region emits UV light.

9. The method of claim 8 , further comprising coupling a spacer material between the MOS capacitor and the first semiconductor material.

10. The method of claim 9 wherein the spacer material includes at least one of gallium nitride (GaN) or aluminum GaN (AlGaN), but not P-type GaN nor P-type AlGaN.

11. The method of claim 9 wherein coupling the spacer material to the first semiconductor material includes directly contacting the active region of the first semiconductor material with the spacer material.

12. The method of claim 8 wherein—

the active region of the first semiconductor material includes at least one of gallium nitride (GaN) or aluminum GaN (AlGaN), and

the second semiconductor material is a bulk semiconductor material including N-type AlGaN.

13. The method of claim 12 wherein the active region and the bulk semiconductor material do not include P-type GaN nor P-type AlGaN.

14. A solid state transducer (SST) system, comprising:

a light emitter device including—

a first conductive contact;

a second conductive contact;

a semiconductor structure between the first and second conductive contacts, the semiconductor structure including a bulk semiconductor material and an active region; and

a dielectric material between the semiconductor structure and the second conductive contact; and

a waveform generator operably coupled to the first and second contacts and configured to output a bias signal that alternatingly produces—

a first electric field in the dielectric material that depletes electrons from the active region of the semiconductor structure; and

a second electric field in the dielectric material that draws electrons from the bulk material into the active region such that the active region emits electromagnetic radiation.

15. The SST system of claim 14 wherein the electromagnetic radiation is in the ultraviolet (UV) spectrum.

16. The SST system of claim 14 wherein the light emitter device further includes a spacer between the semiconductor structure and the dielectric material.

17. The SST system of claim 14 wherein the bias signal includes a first waveform configured to produce the first electric field in the dielectric material, and a second waveform configured to produce the second electric field in the dielectric material.

18. The SST system of claim 14 wherein the bias signal has a frequency configured such that the electromagnetic radiation is pulsed.

19. The SST system of claim 14 wherein the bulk semiconductor material includes an N-type semiconductor material, and wherein the active region operably couples the semiconductor structure to the dielectric material without an intermediary P-type material.

20. The SST system of claim 14 wherein—

the bulk semiconductor material has a thickness of between about 10-500 nm, and

the active region comprises a single grain semiconductor material having a thickness of between about 1-10 nm.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 11, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050713/0001 →
SUPPLEMENT NO. 9 TO PATENT SECURITY AGREEMENT Recorded Aug 9, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 047282/0463 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2018
From: SCHUBERT, MARTIN F.; ODNOBLYUDOV, VLADIMIR
To: MICRON TECHNOLOGY, INC.
Reel/Frame 045774/0796 →
Continuity (3)
Continuation 15249140 · Aug 26, 2016
Division 13918655 · Jun 14, 2013
Related Publication 20180269350A1 · Sep 20, 2018
Cited By (1)
US 12,563,864