Formation of air gap spacers for reducing parasitic capacitance
A method is presented for reducing parasitic capacitance. The method includes forming a source region and a drain region within a substrate, forming spacers in direct contact with sidewalls of a sacrificial layer, depositing an inter-layer dielectric (ILD) over the source and drain regions, replacing the sacrificial layer with a gate structure, removing the ILD, and depositing a sacrificial dielectric layer. The method further includes removing portions of the sacrificial dielectric layer to expose top surfaces of the source and drain regions, depositing a conductive material over the exposed top surfaces of the source and drain regions, and removing remaining portions of the sacrificial dielectric layer to form air gap spacers between the gate structure and the source and drain regions.
1. A semiconductor structure for reducing parasitic capacitance, the semiconductor structure comprising:
a source region and a drain region disposed within a substrate;
spacers disposed in direct contact with sidewalls of a gate structure;
a metallic conductive material disposed in direct contact with top surfaces of the source and drain regions; and
a dielectric material disposed on opposed ends of the metallic conductive material such that air gap spacers are created between the gate structure and the metallic conductive material, the air gap spacers disposed, in their entirety, directly above a topmost surface of the source/drain regions such that the dielectric material completely surrounds the air gap spacers to define an outline of the air gap spacers,
wherein the spacers extend below the topmost surface of the source/drain regions such that the spacers directly contact sidewalls of the source/drain regions;
wherein the spacers extend above a topmost surface of the metallic conductive material;
wherein the air gap spacers extend above the topmost surface of the metallic conductive material; and
wherein the spacers are vertically offset from the air gap spacers.
2. The semiconductor structure of claim 1 , wherein each of the air gap spacers extends along a length of the metallic conductive material.
3. The semiconductor structure of claim 1 , wherein the air gap spacers are surrounded only by a single material.
4. The semiconductor structure of claim 3 , wherein the single material is an oxide.
5. The semiconductor structure of claim 1 , wherein the air gap spacers have a substantially oval-shaped configuration.
6. The semiconductor structure of claim 1 , wherein the air gap spacers are vertically aligned with the source and drain regions.
7. The semiconductor structure of claim 1 , wherein the metallic conductive material includes tungsten (W).
8. The semiconductor structure of claim 1 , wherein the air gap spacers have a width of 2 nm.
9. A semiconductor structure for reducing parasitic capacitance, the semiconductor structure comprising:
a source region and a drain region disposed within a substrate;
a dielectric liner disposed in direct contact with sidewalls of a gate structure;
a metallic conductive material disposed in direct contact with top surfaces of the source and drain regions; and
a dielectric material disposed on opposed ends of the metallic conductive material such that air gap spacers are created between the gate structure and the metallic conductive material, the air gap spacers disposed, in their entirety, directly above a topmost surface of the source/drain regions such that the dielectric material completely surrounds the air gap spacers to define an outline of the air gap spacers,
wherein the dielectric liner extends below the topmost surface of the source/drain regions such that the dielectric liner directly contacts sidewalls of the source/drain regions;
wherein the dielectric liner directly contacts sidewalls and a top surface of the metallic conductive material; and
wherein the dielectric liner directly contacts only top corners of the source/drain regions.
10. The semiconductor structure of claim 9 , wherein the dielectric liner directly contacts the dielectric material.
11. The semiconductor structure of claim 9 , wherein the dielectric liner includes silicon nitride (SiN).
12. The semiconductor structure of claim 9 , wherein the air gap spacers have a substantially oval-shaped configuration.
13. The semiconductor structure of claim 9 , wherein the air gap spacers are vertically aligned with the source and drain regions.
14. The semiconductor structure of claim 9 , wherein the air gap spacers have a width of 2 nm.
15. The semiconductor structure of claim 9 , wherein the metallic conductive material includes tungsten (W).
16. The semiconductor structure of claim 9 , wherein the dielectric liner separates the substrate from the dielectric material.