Illumination apparatus having planar array of LEDs and movable pair of lens arrays for modifying light output
An illumination apparatus includes a plurality of LED chips arranged to form an LED array, light from the plurality of LED chips superimpose to project a light intensity distribution projected on the predetermined plane; a pair of lens arrays each including a plurality of lenses and configured to collect light from the LED arrays; a driving unit configured to adjust a distance between the pair of lens arrays and change the light intensity distribution projected on the predetermined plane; and a control unit for individually controlling the output of the first and second LED arrays.
1. An illumination apparatus comprising:
a light source device that includes a plurality of LED chips arranged to form an LED array, light from the plurality of LED chips superimpose to project a light intensity distribution on a predetermined plane;
an optical system configured to illuminate an illumination target plane using light from the light source device,
a condenser lens; and
an optical integrator,
wherein the light source device includes a pair of lens arrays in which lenses configured to collect light from the plurality of LED chips are provided, at least one of the pair of lens arrays is driven in a direction along an optical axis of the device, and a change in a distance between the pair of lens arrays changes the light intensity distribution projected on the predetermined plane, and
wherein the light intensity distribution obtained by superimposing the light intensity distributions of the light from the plurality of LED chips of the light source device is formed on an entrance surface of the optical integrator through the condenser lens using the light from the light source device.
2. The illumination apparatus according to claim 1 , further comprising a control unit configured to change an illumination mode, wherein the distance between the pair of lens arrays of the light source device is changed according to the change in the illumination mode.
3. The illumination apparatus according to claim 1 , wherein the optical integrator includes a lens group.
4. The illumination apparatus according to claim 1 , wherein the pair of lens arrays are configured to be moved, such that a distance between the lens arrays changes to adjust a position of a peak of the light intensity distribution projected on the predetermined plane.
5. The illumination apparatus according to claim 1 , wherein the pair of lens arrays are configured to be moved, such that a distance between the lens arrays changes to adjust the light intensity distribution between a first light intensity distribution having a peak in a center area including the optical axis, and a second light intensity distribution having a peak in an outside area not including the optical axis.
6. The illumination apparatus according to claim 1 , further comprising a driving unit configured to move at least one of the pair of lens arrays.
7. The illumination apparatus according to claim 1 , further comprising a driving unit configured to move at least one of the pair of lens arrays.
8. The illumination apparatus according to claim 1 ,
wherein the LED arrays include first and second LED arrays, a first lens array of the pair of lens arrays is configured to collect light from the first LED array, and a second lens array of the pair of lens array is configured to collect light from the second LED array, and
wherein at least one of the first and second lens arrays is moveable.
9. The illumination apparatus according to claim 1 , further comprising a control unit configured to individually control an output of the first LED array and the second LED array.
10. An illumination apparatus, comprising:
a light source device that includes a plurality of LED chips arranged to form an LED array, light from the plurality of LED chips arranged to form an LED array, light from the plurality of LED chips superimpose to project a light intensity distribution on a predetermined plane;
an optical system configured to illuminate an illumination target plane using light from the light source device; and
a measuring instrument configured to measure a pupil intensity distribution on a pupil plane of the illumination apparatus,
wherein the light source device includes a pair of lens arrays in which lenses configured to collect light from the plurality of LED chips are provided, at least one of the pair of lens arrays is driven in a direction along an optical axis of the device, and a change in a distance between the pair of lens arrays changes the light intensity distribution projected on the predetermined plane, and
wherein the distance between the pair of lens arrays of the light source device is changed based on the pupil intensity distribution measured by the measuring instrument.
11. An exposure apparatus comprising:
an illumination apparatus including a light source device that includes a plurality of LED chips arranged to form an LED array, light from the plurality of LED chips superimpose to project a light intensity distribution on a predetermined plane, and an optical system configured to illuminate an illumination target plane using light from the light source device, the illumination apparatus configured to illuminate a mask; and
an exposure unit configured to expose a pattern of the mask on a substrate,
wherein the light source device includes a pair of lens arrays in which lenses configured to collect light from the plurality of LED chips are provided, and changes a distance between the pair of lens arrays, thereby changing the light intensity distribution projected on the predetermined plane.
12. The exposure apparatus according to claim 11 , wherein the distance between the pair of lens arrays of the light source device is changed based on an image forming characteristic of the pattern.
13. The exposure apparatus according to claim 11 , wherein at least one of the pair of lens arrays is driven in a direction along an optical axis of the device, and a change in a distance between the pair of lens arrays changes the light intensity distribution projected on the predetermined plane.
14. The exposure apparatus according to claim 11 , wherein the pair of lens arrays are configured to be moved, such that a distance between the lens arrays changes to adjust a position of a peak of the light intensity distribution projected on the predetermined plane.
15. The exposure apparatus according to claim 11 , wherein the pair of lens arrays are configured to be moved, such that a distance between the lens arrays changes to adjust the light intensity distribution between a first light intensity distribution having a peak in a center area including the optical axis, and a second light intensity distribution having a peak in an outside area not including the optical axis.
16. The exposure apparatus according to claim 11 , wherein one of the pair of lens arrays on a side closer to the LED array is configured to be moved to change the distance between the pair of lens arrays.
17. The exposure apparatus according to claim 11 , further comprising a dividing unit configured to move at least one of the pair of lens arrays.
18. The exposure apparatus according to claim 11 ,
wherein the LED arrays include first and second LED arrays, a first lens array of the pair of lens arrays is configured to collect light from the first LED array, and a second lens array of the pair of lens array is configured to collect light from the second LED array, and
wherein at least one of the first and second lens arrays is movable.
19. The exposure apparatus according to claim 11 , further comprising a control unit configured to individually control an output of the first LED array and the second LED array.