Faceted sidewall magnetic tunnel junction structure
A magnetic tunnel junction (MTJ) structure having faceted sidewalls is formed on a conductive landing pad that is present on a surface of an electrically conductive structure embedded in a dielectric material layer. No metal ions are re-sputtered onto the sidewalls of the MTJ structure during the patterning of the MTJ material stack that provides the MTJ structure. The absence of re-sputtered metal on the MTJ structure sidewalls reduces the risk of shorts.
1. A structure comprising:
an electrically conductive structure embedded in a dielectric material layer and present in a magnetoresistive random access memory (MRAM) device area;
a conductive landing pad located on a surface of the electrically conductive structure;
a magnetic tunnel junction (MTJ) structure having faceted sidewalls and located on a surface of the conductive landing pad, wherein the MTJ structure has a truncated bi-cone shape;
a MTJ encapsulating dielectric layer located on the dielectric material layer and laterally surrounding the MTJ structure; and
an electrically conductive metal-containing layer located on the MTJ structure.
2. The structure of claim 1 , wherein the MTJ encapsulating dielectric layer has a topmost surface that is coplanar with a topmost surface of the MTJ structure.
3. The structure of claim 1 , wherein the MTJ structure comprises a MTJ synthetic anti-ferromagnetic (SAF) layer, a MTJ reference layer, a MTJ tunnel barrier, a MTJ free layer, and a MTJ capping layer.
4. The structure of claim 1 , wherein the MTJ structure comprises a MTJ reference layer, a MTJ tunnel barrier, a MTJ free layer, and a MTJ capping layer.
5. The structure of claim 1 , wherein the electrically conductive structure and the electrically conductive metal-containing layer are composed of copper or a copper alloy.
6. The structure of claim 1 , wherein the electrically conductive structure is composed of tungsten and the electrically conductive metal-containing layer is composed of copper or a copper alloy.
7. The structure of claim 1 , wherein at least a portion of the electrically conductive metal-containing layer is located within an opening disposed in an interconnect dielectric material that is located on the MTJ encapsulating dielectric layer.
8. The structure of claim 1 , further comprising a dielectric cap located on a topmost surface of the electrically conductive metal-containing layer.
9. The structure of claim 1 , wherein the surface of the electrically conductive structure is recessed relative to a topmost surface of the dielectric material layer, and is embedded in the dielectric material layer.
10. The structure of claim 1 , further comprising a diffusion barrier material layer separating the electrically conductive metal-containing layer from the MTJ structure.
11. The structure of claim 1 , wherein no re-sputtered metal is present on the faceted sidewalls of the MTJ structure.
12. A structure comprising:
an electrically conductive structure embedded in a dielectric material layer and present in a magnetoresistive random access memory (MRAM) device area;
a conductive landing pad located on a surface of the electrically conductive structure;
a magnetic tunnel junction (MTJ) structure having faceted sidewalls and located on a surface of the conductive landing pad;
a MTJ encapsulating dielectric layer located on the dielectric material layer and laterally surrounding the MTJ structure; and
an electrically conductive metal-containing layer located on the MTJ structure, wherein the MTJ structure contacts an entirety of the conductive landing pad and a portion of a dielectric material that is located laterally adjacent to the conductive landing pad.
13. A structure comprising:
an electrically conductive structure embedded in a dielectric material layer and present in a magnetoresistive random access memory (MRAM) device area;
a conductive landing pad located on a surface of the electrically conductive structure;
a magnetic tunnel junction (MTJ) structure having a truncated bi-cone shape located on a surface of the conductive landing pad;
a MTJ encapsulating dielectric layer located on the dielectric material layer and laterally surrounding the MTJ structure; and
an electrically conductive metal-containing layer located on the MTJ structure.
14. The structure of claim 13 , wherein the MTJ structure comprises a MTJ synthetic anti-ferromagnetic (SAF) layer, a MTJ reference layer, a MTJ tunnel barrier, a MTJ free layer, and a MTJ capping layer.
15. The structure of claim 13 , wherein the MTJ structure comprises a MTJ reference layer, a MTJ tunnel barrier, a MTJ free layer, and a MTJ capping layer.
16. The structure of claim 13 , wherein no re-sputtered metal is present on the faceted sidewalls of the MTJ structure.
17. The structure of claim 13 , wherein the MTJ structure contacts an entirety of the conductive landing pad and a portion of a dielectric material that is located laterally adjacent to the conductive landing pad.