IP Library Granted Patent US 11,328,834
Granted Patent B2
US 11,328,834 · App. 16/747,906 · Granted May 10, 2022

Nanowires-based transparent conductors

Inventors: Jonathan S. Alden (Mountain View, CA); Haixia Dai (Mountain View, CA); Michael R. Knapp (Emerald Hills, CA); Shuo Na (San Jose, CA); Hash Pakbaz (Hayward, CA); Florian Pschenitzka (San Francisco, CA); Xina Quan (Saratoga, CA); Michael A. Spaid (Mountain View, CA); Adrian Winoto (San Francisco, CA); Jeffrey Wolk (Half Moon Bay, CA)
Assignee: Cambrios Film Solutions Corporation
H01B1/22B82Y20/00B82Y30/00C03C17/007C03C17/008C09D11/52C23F11/02C30B7/02C30B29/02C30B29/60C30B33/00G02F1/13439H01L31/022466B22F1/0547B22F2998/00C03C2217/445C03C2217/479H01L27/14623H01L31/02164H01L2224/45139H01L2224/49175H01L2924/00011H01L2924/12044H01L2924/3011H05K1/0269H05K1/097H05K3/048H05K2201/0145H05K2201/0154H05K2201/026H05K2201/10128H05K2203/1545Y10S977/762
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Quick Facts
Patent No.
US 11,328,834
App. No.
16/747,906
Granted
May 10, 2022
Kind
B2
Abstract

A method of fabricating a transparent conductor is provided. The method includes forming a nanowire dispersion layer on a substrate, forming a nanowire network layer on the substrate by drying the nanowire dispersion layer, and forming a matrix material layer on the nanowire network layer.

Claims (58)

1. A method of fabricating a transparent conductor, comprising:

forming a nanowire dispersion layer on a substrate;

forming a nanowire network layer on the substrate by drying the nanowire dispersion layer;

applying pressure to the nanowire network layer; and

forming a matrix material layer on the nanowire network layer after applying the pressure to the nanowire network layer.

2. The method of claim 1 , wherein applying the pressure to the nanowire network layer changes a cross-sectional shape of one or more nanowires of the nanowire network layer.

3. The method of claim 1 , wherein:

a crossing point is present in the nanowire network layer where a first nanowire of the nanowire network layer crosses a second nanowire of the nanowire network layer, and

applying the pressure to the nanowire network layer causes at least one of the first nanowire or the second nanowire to form a flattened cross-section at the crossing point.

4. The method of claim 1 , comprising:

forming an intermediate layer on a first portion of the substrate prior to forming the nanowire dispersion layer, wherein the intermediate layer is not formed on a second portion of the substrate; and

rinsing the nanowire dispersion layer prior to forming the nanowire network layer, wherein:

rinsing the nanowire dispersion layer removes nanowires of the nanowire dispersion layer formed on the second portion of the substrate, and

nanowires of the nanowire dispersion layer formed on the first portion of the substrate remain on the first portion of the substrate after rinsing the nanowire dispersion layer.

5. The method of claim 4 , wherein the intermediate layer comprises a polypeptide.

6. The method of claim 1 , comprising:

performing a plasma surface treatment on a first portion of the substrate to define a pre-treated region of the substrate, wherein an untreated region of the substrate is defined where the plasma surface treatment is not performed; and

rinsing the nanowire dispersion layer prior to forming the nanowire network layer, wherein:

rinsing the nanowire dispersion layer removes nanowires of the nanowire dispersion layer formed on the untreated region of the substrate, and

nanowires of the nanowire dispersion layer formed on the pre-treated region of the substrate remain on the pre-treated region of the substrate after rinsing the nanowire dispersion layer.

7. The method of claim 1 , comprising:

applying a roller to a surface of the nanowire network layer prior to forming the matrix material layer, wherein:

the roller comprises a tacky portion and a non-tacky portion,

applying the roller to the surface of the nanowire network layer comprises:

removing nanowires of the nanowire network layer that contact the tacky portion of the roller to define a patterned nanowire network layer, and

forming the matrix material layer comprises forming the matrix material layer on the patterned nanowire network layer.

8. The method of claim 1 , comprising:

performing a plasma treatment on the nanowire network layer prior to forming the matrix material layer.

9. The method of claim 8 , wherein the plasma treatment is configured to change at least one of a transparency or a conductivity of the nanowire network layer.

10. The method of claim 1 , wherein applying the pressure comprises:

applying first pressure using a first roller moving in a first direction, and

applying second pressure using a second roller moving in a second direction different than the first direction.

11. The method of claim 1 , comprising:

applying heat at a temperature of 80° C. to 250° C. to the nanowire network layer prior to forming the matrix material layer.

12. The method of claim 11 , wherein applying the heat causes a resistance of the nanowire network layer to decrease from a resistance of more than 1000 Ω/□ to a resistance of less than 400 Ω/□.

13. The method of claim 1 , comprising:

applying heat at a temperature of higher than 250° C. in a non-oxidative atmosphere to the nanowire network layer prior to forming the matrix material layer.

14. The method of claim 1 , comprising:

exposing the nanowire network layer to a reducing agent prior to forming the matrix material layer, wherein the reducing agent comprises at least one of sodium borohydride, dimethyl aminoborane, or hydrogen gas.

15. A method of fabricating a transparent conductor comprising:

forming a nanowire dispersion layer on a substrate;

forming a nanowire network layer on the substrate by drying the nanowire dispersion layer;

forming a matrix material layer on the nanowire network layer;

defining a pattern with a first region and a second region, wherein the nanowire network layer located in the first region forms a conductive region and the nanowire network layer in the second region is partially removed to lower a concentration of nanowires of the nanowire network layer in the second region under a percolation threshold so that the second region is a non-conductive region; and

forming, in the first region, a conductive layer comprising the nanowire network layer embedded in a matrix layer by drying the matrix material layer.

16. The method of claim 15 , wherein the matrix material layer in the second region is totally removed.

17. A method of fabricating a transparent conductor, comprising:

performing a plasma surface treatment on a first portion of a substrate to define a pre-treated region of the substrate, wherein an untreated region of the substrate is defined where the plasma surface treatment is not performed

forming a nanowire dispersion layer on the pre-treated region and the untreated region of the substrate;

rinsing the nanowire dispersion layer, wherein rinsing the nanowire dispersion layer removes nanowires of the nanowire dispersion layer formed on the untreated region of the substrate,

forming a nanowire network layer by drying the nanowire dispersion layer; and

forming a matrix material layer on the nanowire network layer.

18. The method of claim 17 , comprising:

performing a plasma treatment on the nanowire network layer prior to forming the matrix material layer.

19. The method of claim 17 , comprising:

exposing the nanowire network layer to a reducing agent prior to forming the matrix material layer, wherein the reducing agent comprises at least one of sodium borohydride, dimethyl aminoborane, or hydrogen gas.

20. The method of claim 17 , comprising:

applying heat at a temperature of 80° C. or more to the nanowire network layer prior to forming the matrix material layer, wherein the heat decreases a resistance of the nanowire network layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2025
From: CAMBRIOS FILM SOLUTIONS CORPORATION
To: PINE CASTLE INVESTMENTS LIMITED
Reel/Frame 070110/0392 →
Continuity (7)
Continuation 15871949 · Jan 15, 2018
Continuation 12098329 · Apr 4, 2008
Division 11504822 · Aug 14, 2006
Provisional Application 60798878 · May 8, 2006
Provisional Application 60796027 · Apr 28, 2006
Provisional Application 60707675 · Aug 12, 2005
Related Publication 20200161017A1 · May 21, 2020