Method of making heteroepitaxial structures and device formed by the method
A method for making a heteroepitaxial layer. The method comprises providing a semiconductor substrate. A seed area delineated with a selective growth mask is formed on the semiconductor substrate. The seed area comprises a first material and has a linear surface dimension of less than 100 nm. A heteroepitaxial layer is grown on the seed area, the heteroepitaxial layer comprising a second material that is different from the first material. Devices made by the method are also disclosed.
1. A semiconductor product, comprising:
a semiconductor substrate;
a nanostructured pedestal formed on the semiconductor substrate, the pedestal having a top surface and a side surface;
a selective growth mask layer on the side surface of the pedestal;
a seed area formed on the pedestal, the seed area having a linear surface dimension that ranges from about 10 nm to about 25 nm, the seed area comprising a (001) plane of silicon; and
a heteroepitaxial layer grown on the seed area without nucleating substantially any threading dislocations, wherein the heteroepitaxial layer is substantially unrestricted by sidewalls during growth and wherein a portion of the heteroepitaxial layer above the selective growth mask layer has a polygonal cross-sectional shape having a first lateral vertex and a second lateral vertex opposing the first lateral vertex, a first lower linear surface of the polygonal cross-sectional shape and a first upper linear surface of the polygonal cross-sectional shape meeting at the first lateral vertex, a second lower linear surface of the polygonal cross-sectional shape and a second upper linear surface of the polygonal cross-sectional shape meeting at the second lateral vertex, the first upper linear surface and the second upper linear surface both sloping toward an apex of the heteroepitaxial layer and the first lower linear surface and the second lower linear surface both sloping toward the nanostructured pedestal, wherein the entire heteroepitaxial layer is above a top surface of the selective growth mask layer.
2. The semiconductor product of claim 1 , wherein the heteroepitaxial layer is a discrete nanostructure.
3. The semiconductor product of claim 1 , wherein the heteroepitaxial layer is substantially defect-free.
4. The semiconductor product of claim 1 , wherein an interface between the heteroepitaxial layer and the seed area is substantially defect-free.
5. The semiconductor product of claim 1 , wherein the semiconductor substrate comprises silicon having a [001] direction normal to a substrate surface.
6. The semiconductor product of claim 1 , wherein the heteroepitaxial layer forms a portion of a transistor.
7. The semiconductor product of claim 1 , wherein the heteroepitaxial layer comprises a Group III-V semiconductor material.
8. The semiconductor product of claim 7 , wherein the Group III-V semiconductor material comprises a material chosen from Group III-N semiconductors, InAs and InAsSb.
9. The semiconductor product of claim 7 , wherein the Group III-V semiconductor material is a Group III-N semiconductor, the Group III-N semiconductor comprising a material chosen from gallium nitride, AlGaN, indium nitride (InN) and indium gallium nitride (In x Ga 1-x N).
10. The semiconductor product of claim 1 , wherein the heteroepitaxial layer comprises Ge.
11. A semiconductor product, comprising:
a semiconductor substrate;
a nanostructured pedestal formed on the semiconductor substrate, the pedestal having a top surface and a side surface;
a selective growth mask layer on the side surface of the pedestal;
a seed area formed on the pedestal, the seed area having a linear surface dimension that ranges from about 10 nm to about 25 nm, the seed area comprising a (001) plane of silicon, wherein the seed area is substantially level with a top surface of the selective growth mask layer; and
a heteroepitaxial layer grown on the seed area without nucleating substantially any threading dislocations, wherein the heteroepitaxial layer is substantially unrestricted by sidewalls during growth and wherein a portion of the heteroepitaxial layer above the selective growth mask layer has a polygonal cross-sectional shape having a first lateral vertex and a second lateral vertex opposing the first lateral vertex, a first lower linear surface of the polygonal cross-sectional shape and a first upper linear surface of the polygonal cross-sectional shape meeting at the first lateral vertex, a second lower linear surface of the polygonal cross-sectional shape and a second upper linear surface of the polygonal cross-sectional shape meeting at the second lateral vertex, the first upper linear surface and the second upper linear surface both sloping toward an apex of the heteroepitaxial layer and the first lower linear surface and the second lower linear surface both sloping toward the nanostructured pedestal.
12. A semiconductor product, comprising:
a semiconductor substrate;
a nanostructured pedestal formed on the semiconductor substrate, the pedestal having a top surface and a side surface;
a selective growth mask layer on the side surface of the pedestal;
a seed area formed on the pedestal, the seed area having a linear surface dimension that ranges from about 10 nm to about 25 nm, the seed area comprising a (001) plane of silicon, wherein the top surface of the pedestal forms a seed area that is approximately coplanar with a top surface of the selective growth mask layer; and
a heteroepitaxial layer grown on the seed area without nucleating substantially any threading dislocations, wherein the heteroepitaxial layer is substantially unrestricted by sidewalls during growth and wherein a portion of the heteroepitaxial layer above the selective growth mask layer has a polygonal cross-sectional shape having a first lateral vertex and a second lateral vertex opposing the first lateral vertex, a first lower linear surface of the polygonal cross-sectional shape and a first upper linear surface of the polygonal cross-sectional shape meeting at the first lateral vertex, a second lower linear surface of the polygonal cross-sectional shape and a second upper linear surface of the polygonal cross-sectional shape meeting at the second lateral vertex, the first upper linear surface and the second upper linear surface both sloping toward an apex of the heteroepitaxial layer and the first lower linear surface and the second lower linear surface both sloping toward the nanostructured pedestal.
13. A semiconductor product, comprising:
a semiconductor substrate;
a nanostructured pedestal formed on the semiconductor substrate, the pedestal having a top surface and a side surface;
a selective growth mask layer on the side surface of the pedestal;
a seed area formed on the pedestal, the seed area having a linear surface dimension that ranges from about 10 nm to about 25 nm, the seed area comprising a (001) plane of silicon, wherein the seed area is substantially level with the selective growth mask layer; and
a heteroepitaxial layer grown on the seed area without nucleating substantially any threading dislocations, wherein a portion of the heteroepitaxial layer above the selective growth mask layer has a polygonal cross-sectional shape having a first lateral vertex and a second lateral vertex opposing the first lateral vertex, a first lower linear surface of the polygonal cross-sectional shape and a first upper linear surface of the polygonal cross-sectional shape meeting at the first lateral vertex, a second lower linear surface of the polygonal cross-sectional shape and a second upper linear surface of the polygonal cross-sectional shape meeting at the second lateral vertex, the first upper linear surface and the second upper linear surface both sloping toward an apex of the heteroepitaxial layer and the first lower linear surface and the second lower linear surface both sloping toward the nanostructured pedestal.
14. The semiconductor product of claim 13 , wherein the heteroepitaxial layer is substantially unrestricted by sidewalls during growth.
15. The semiconductor product of claim 13 , wherein the heteroepitaxial layer is substantially defect-free.
16. The semiconductor product of claim 13 , wherein an interface between the heteroepitaxial layer and the seed area is substantially defect-free.
17. The semiconductor product of claim 13 , wherein the entire heteroepitaxial layer is above a top surface of the selective growth mask layer.
18. The semiconductor product of claim 11 , wherein the semiconductor substrate comprises silicon having a [001] direction normal to a substrate surface.
19. The semiconductor product of claim 13 , wherein the heteroepitaxial layer forms a portion of a transistor.
20. The semiconductor product of claim 13 , wherein the heteroepitaxial layer is a discrete nanostructure.
21. A semiconductor product, comprising:
a semiconductor substrate;
a nanostructured pedestal formed on the semiconductor substrate, the pedestal having a top surface and a side surface;
a selective growth mask layer on the side surface of the pedestal;
a seed area formed on the pedestal, the seed area having a linear surface dimension that ranges from about 10 nm to about 25 nm, the seed area comprising a (001) plane of silicon, wherein the top surface of the pedestal is approximately coplanar with a top surface of the selective growth mask layer; and
a heteroepitaxial layer grown on the seed area without nucleating substantially any threading dislocations, wherein the heteroepitaxial layer is wider than the seed area, a portion of the heteroepitaxial layer above the selective growth mask layer having a polygonal cross-section having a first lateral vertex and a second lateral vertex opposing the first lateral vertex, a first lower linear surface of the polygonal cross-sectional shape and a first upper linear surface of the polygonal cross-sectional shape meeting at the first lateral vertex, a second lower linear surface of the polygonal cross-sectional shape and a second upper linear surface of the polygonal cross-sectional shape meeting at the second lateral vertex, the first upper linear surface and the second upper linear surface both sloping toward an apex of the heteroepitaxial layer and the first lower linear surface and the second lower linear surface both sloping toward the nanostructured pedestal.
22. The semiconductor product of claim 21 , wherein the heteroepitaxial layer is substantially unrestricted by sidewalls during growth.
23. The semiconductor product of claim 21 , wherein the entire heteroepitaxial layer is above a top surface of the selective growth mask layer.
24. The semiconductor product of claim 21 , wherein the heteroepitaxial layer is a discrete nanostructure.