IP Library › Granted Patent US 11,140,493
Granted Patent B2
US 11,140,493 · App. 16/754,182 · Granted Oct 5, 2021

Input current-tolerant amplifier input stage for MEMS sensors and other devices

Inventors: Mark Niederberger (Einsiedein, CH); Lukas Perktold (Hinwil, CH)
Assignee: ams International AG
H04R19/04H03F3/70H04R3/04H03F2200/03H03F2200/165H04R2201/003
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Quick Facts
Patent No.
US 11,140,493
App. No.
16/754,182
Granted
Oct 5, 2021
Kind
B2
Abstract

An interface circuit comprises a signal path including a front-end charge amplifier coupling an input of the interface circuit to an output of the interface circuit, and a DC control loop separate from the signal path. In some implementations, the interface circuit is part of a MEMS sensor that includes a MEMS transducer having an output coupled to the input of the interface circuit. The interface circuit can, in some cases, allow faster settling of the circuit to its steady-state operating point.

Claims (49)

1. An interface circuit comprising:

a signal path including a front-end charge amplifier coupling an input of the interface circuit to an output of the interface circuit; and

a DC control loop separate from the signal path, wherein the front-end charge amplifier is not part of the DC control loop.

2. The interface circuit of claim 1 wherein the front-end charge amplifier has an input operating point and a low frequency gain, and wherein the DC control loop includes a second amplifier having an input operating point and a low frequency gain that are the same as for the front-end charge amplifier.

3. The interface circuit of claim 2 wherein the DC control loop includes an integrator or low-pass filter, either

wherein first and second high resistance circuit elements are coupled between an input of the front-end charge amplifier and an input of the second amplifier; or

wherein the integrator or low-pass filter is coupled to an output of the second amplifier, and wherein a first high resistance circuit element is coupled between an output of the integrator or low-pass filter and an input of the second amplifier, and a second high resistance circuit element is coupled between the output of the integrator or low-pass filter and an input of the front-end charge amplifier.

4. The interface circuit of claim 3 wherein the interface circuit further includes a capacitor coupled between the output of the integrator or low-pass filter and the input of the second amplifier.

5. The interface circuit of claim 3 wherein at least one of the first or second high resistance circuit elements includes a pair of anti-parallel diodes.

6. The interface circuit of claim 3 further including:

a first switch in parallel to the first high resistance circuit element; and

a second switch in parallel to the second high resistance circuit element.

7. The interface circuit of claim 6 wherein the first and second switches are configured to be closed

during a start-up operation; and/or

after occurrence of an overload condition.

8. The interface circuit of claim 4 further including:

a first switch in parallel to the first high resistance circuit element; and

a second switch in parallel to the capacitor.

9. A MEMS sensor comprising:

an interface circuit having an input and an output;

a MEMS transducer having an output coupled to the input of the interface circuit, wherein the interface circuit includes:

a signal path including a front-end charge amplifier coupling the input of the interface circuit to the output of the interface circuit; and

a DC control loop separate from the signal path, wherein the front-end charge amplifier is not part of the DC control loop.

10. The MEMS sensor of claim 9 wherein the front-end charge amplifier has an input operating point and a low frequency gain, and wherein the DC control loop includes a second amplifier having an input operating point and a low frequency gain that are the same as for the front-end charge amplifier.

11. The MEMS sensor of claim 10 wherein the DC control loop includes an integrator or low-pass filter, either:

wherein first and second high resistance circuit elements are coupled between an input of the front-end charge amplifier and an input of the second amplifier; or

wherein the integrator or low-pass filter is coupled to an output of the second amplifier, and wherein a first high resistance circuit element is coupled between an output of the integrator or low-pass filter and an input of the second amplifier, and a second high resistance circuit element is coupled between the output of the integrator or low-pass filter and an input of the front-end charge amplifier.

12. The MEMS sensor of claim 11 wherein the interface circuit further includes a capacitor coupled between the output of the integrator or low-pass filter and the input of the second amplifier.

13. The MEMS sensor of claim 11 wherein at least one of the first or second high resistance circuit elements includes a pair of anti-parallel diodes.

14. The MEMS sensor of claim 11 further including:

a first switch in parallel to the first high resistance circuit element; and

a second switch in parallel to the second high resistance circuit element.

15. The MEMS sensor of claim 14 wherein the first and second switches are configured to be closed:

during a start-up operation; and/or

after occurrence of an overload condition.

16. The MEMS sensor of claim 12 further including:

a first switch in parallel to the first high resistance circuit element; and

a second switch in parallel to the capacitor.

17. The MEMS sensor of claim 9 wherein the interface circuit has differential inputs and outputs.

18. A MEMS sensor comprising:

an interface circuit having an input and an output;

a MEMS transducer having an output coupled to the input of the interface circuit, wherein the interface circuit includes:

a signal path including a front-end charge amplifier coupling the input of the interface circuit to the output of the interface circuit; and

a DC control loop including:

a second amplifier having an input and an output;

an integrator or low-pass filter having an input coupled to the output of the second amplifier;

a capacitor coupled between an output of the integrator or low-pass filter and the input of the second amplifier;

the interface circuit further including a first high resistive circuit element and a second high resistive circuit element, wherein at least one of the high resistive circuit elements is coupled between the output of the integrator or low-pass filter and the input of the front-end charge amplifier.

19. The MEMS sensor of claim 18 wherein the MEMS transducer is configured as a MEMS microphone.

Assignments (2)
CHANGE OF NAME Recorded Sep 21, 2026
From: TITAN NEWCO AG
To: INFINEON TECHNOLOGIES INTERNATIONAL SWITZERLAND AG
Reel/Frame 076079/0939 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 2, 2020
From: NIEDERBERGER, MARK; PERKTOLD, LUKAS
To: AMS INTERNATIONAL AG
Reel/Frame 053964/0717 →
Continuity (2)
Provisional Application 62573199 · Oct 17, 2017
Related Publication 20210067881A1 · Mar 4, 2021